特(te)(te)種氣(qi)體(ti)(ti)(ti)(ti)(ti)的儲存(cun)注(zhu)意事項：為防止高壓容(rong)器(qi)跌倒、滾(gun)落、損壞、閥(fa)門泄漏等(deng)造(zao)成(cheng)安全隱患，存(cun)放場地需(xu)(xu)平坦(tan)，操(cao)作需(xu)(xu)謹慎、輕(qing)柔；并用鏈條、繩索等(deng)將(jiang)其固定(ding)在靠(kao)墻等(deng)堅固位置。特(te)(te)種氣(qi)體(ti)(ti)(ti)(ti)(ti)的重(zhong)要(yao)性：正是因為電(dian)(dian)(dian)子(zi)氣(qi)體(ti)(ti)(ti)(ti)(ti)在集成(cheng)電(dian)(dian)(dian)路制造(zao)中(zhong)的使用量大，應用范圍廣的特(te)(te)點(dian)。所(suo)以(yi)電(dian)(dian)(dian)子(zi)氣(qi)體(ti)(ti)(ti)(ti)(ti)直接決定(ding)了芯片制造(zao)的良率 與可(ke)靠(kao)性等(deng)等(deng)。所(suo)以(yi)電(dian)(dian)(dian)子(zi)氣(qi)體(ti)(ti)(ti)(ti)(ti)也被譽為集成(cheng)電(dian)(dian)(dian)路制造(zao)中(zhong)的“血液”。特(te)(te)種氣(qi)體(ti)(ti)(ti)(ti)(ti)主要(yao)包括高純氣(qi)體(ti)(ti)(ti)(ti)(ti)、電(dian)(dian)(dian)子(zi)氣(qi)體(ti)(ti)(ti)(ti)(ti)、標準(zhun)氣(qi)體(ti)(ti)(ti)(ti)(ti)三大類，特(te)(te)種氣(qi)體(ti)(ti)(ti)(ti)(ti)批(pi)發，電(dian)(dian)(dian)子(zi)特(te)(te)種氣(qi)體(ti)(ti)(ti)(ti)(ti)（簡稱(cheng)電(dian)(dian)(dian)子(zi)特(te)(te)氣(qi)）是特(te)(te)種氣(qi)體(ti)(ti)(ti)(ti)(ti)的 一個(ge)重(zhong)要(yao)分(fen)支，是超大規模集成(cheng)電(dian)(dian)(dian)路（IC）、平面(mian)顯示器(qi)件（LCD、LED、OLED）、太陽能電(dian)(dian)(dian)池等(deng)電(dian)(dian)(dian)子(zi)工業生產(chan)不(bu) 可(ke)或缺的原材料。

 特(te)(te)種(zhong)氣(qi)(qi)體(ti)(ti)使用(yong)的封(feng)閉式(shi)氣(qi)(qi)瓶(ping)放置(zhi)(zhi)與管理設(she)備，一般應(ying)配置(zhi)(zhi)減壓(ya)(ya)裝(zhuang)置(zhi)(zhi)、真空發生(sheng)器、、緊急(ji)切斷閥、過流開關、風(feng)壓(ya)(ya)事(shi)故報(bao)(bao)警(jing)、、壓(ya)(ya)力監測及(ji)報(bao)(bao)警(jing)等(deng)(deng)安全(quan)(quan)使用(yong)所必(bi)須的設(she)施。排風(feng)管配置(zhi)(zhi)泄漏探頭。氣(qi)(qi)瓶(ping)柜有(you)手動(dong)、半自(zi)動(dong)、全(quan)(quan)自(zi)動(dong)三類(lei)。目前，特(te)(te)種(zhong)氣(qi)(qi)體(ti)(ti)供(gong)應(ying)商，國(guo)內(nei)共有(you)特(te)(te)種(zhong)氣(qi)(qi)體(ti)(ti)生(sheng)產企(qi)業(ye)達(da)150余(yu)家(jia)，沈陽特(te)(te)種(zhong)氣(qi)(qi)體(ti)(ti)，多(duo)數企(qi)業(ye)生(sheng)產規模(mo)較小(xiao)。跨國(guo)企(qi)業(ye)已(yi)經在國(guo)內(nei)投(tou)資(zi)(zi)(zi)設(she)立(li)了眾多(duo)合資(zi)(zi)(zi)或獨資(zi)(zi)(zi)的氣(qi)(qi)體(ti)(ti)公(gong)司(si)，特(te)(te)種(zhong)氣(qi)(qi)體(ti)(ti)公(gong)司(si)，占國(guo)內(nei)銷(xiao)售(shou)氣(qi)(qi)體(ti)(ti)產品市場份(fen)額(e)的70%左(zuo)右。硅片的蝕(shi)刻氣(qi)(qi)體(ti)(ti)（特(te)(te)種(zhong)氣(qi)(qi)體(ti)(ti)）主要(yao)是氟(fu)基氣(qi)(qi)體(ti)(ti)，包括四(si)氟(fu)化(hua)碳、四(si)氟(fu)化(hua)碳/氧(yang)氣(qi)(qi)、六氟(fu)化(hua)硫、六氟(fu)乙1烷/氧(yang)氣(qi)(qi)、三氟(fu)化(hua)氮(dan)等(deng)(deng)。

 對特(te)氣(qi)(qi)的危害(hai)性進(jin)行分析，通過(guo)本質安全設(she)計(ji)，消除安全隱(yin)患(huan)。根據行業規(gui)范，對特(te)氣(qi)(qi)房選(xuan)址、安全間距(ju)、防火分區(qu)、房間通風、電氣(qi)(qi)防爆(bao)等進(jin)行評估。管道(dao)設(she)計(ji)應(ying)進(jin)行保(bao)壓和氦測漏，確保(bao)系統(tong)密閉性。特(te)種(zhong)(zhong)氣(qi)(qi)體的應(ying)用(yong)領(ling)域主(zhu)要在(zai)集成電路制造、太(tai)陽(yang)能電池、化(hua)合物半導體、液(ye)晶(jing)顯示器、光纖生產四大領(ling)域，其中(zhong)(zhong)主(zhu)要應(ying)用(yong)于半導體集成電路的生產制造。在(zai)半導體工業中(zhong)(zhong)應(ying)用(yong)的有(you)110 余種(zhong)(zhong)單元特(te)種(zhong)(zhong)氣(qi)(qi)體，其中(zhong)(zhong)常用(yong)的有(you)20～30 種(zhong)(zhong)。根據有(you)關(guan)數據顯示，中(zhong)(zhong)國(guo)特(te)種(zhong)(zhong)功能電子氣(qi)(qi)體市場規(gui)模逐年增長，僅2016年，中(zhong)(zhong)國(guo)特(te)種(zhong)(zhong)電子氣(qi)(qi)體市場規(gui)模約(yue)為98億元左右。值得關(guan)注的是，從產業鏈以及技術(shu)層(ceng)面(mian)歐美國(guo)家占(zhan)據較(jiao)好的地位。