以(yi)含有(you)(you)氯(lv)原(yuan)子(zi)的(de)表(biao)(biao)橡(xiang)膠(jiao)(jiao)為代表(biao)(biao)的(de)橡(xiang)膠(jiao)(jiao)組(zu)分(fen)，用(yong)于(yu)(yu)(yu)(yu)導(dao)(dao)(dao)電(dian)(dian)(dian)(dian)橡(xiang)膠(jiao)(jiao)輥，哪(na)里有(you)(you)包(bao)(bao)銀導(dao)(dao)(dao)電(dian)(dian)(dian)(dian)輥，以(yi)允許導(dao)(dao)(dao)電(dian)(dian)(dian)(dian)橡(xiang)膠(jiao)(jiao)輥呈離(li)子(zi)導(dao)(dao)(dao)電(dian)(dian)(dian)(dian)性。該情況(kuang)下，含有(you)(you)氯(lv)原(yuan)子(zi)的(de)橡(xiang)膠(jiao)(jiao)組(zu)分(fen)具有(you)(you)較(jiao)高(gao)(gao)的(de)表(biao)(biao)面自由(you)能(neng)。因此(ci)，包(bao)(bao)銀導(dao)(dao)(dao)電(dian)(dian)(dian)(dian)輥回收，含有(you)(you)氯(lv)原(yuan)子(zi)的(de)橡(xiang)膠(jiao)(jiao)組(zu)分(fen)容(rong)(rong)易粘附于(yu)(yu)(yu)(yu)色粉和用(yong)于(yu)(yu)(yu)(yu)色粉的(de)添加(jia)劑上(shang)。當含有(you)(you)氯(lv)原(yuan)子(zi)的(de)橡(xiang)膠(jiao)(jiao)組(zu)分(fen)與離(li)子(zi)導(dao)(dao)(dao)電(dian)(dian)(dian)(dian)的(de)單(dan)體聚合時，導(dao)(dao)(dao)電(dian)(dian)(dian)(dian)輥具有(you)(you)較(jiao)高(gao)(gao)的(de)表(biao)(biao)面自由(you)能(neng)并且容(rong)(rong)易弄濕。因此(ci)粘附于(yu)(yu)(yu)(yu)導(dao)(dao)(dao)電(dian)(dian)(dian)(dian)橡(xiang)膠(jiao)(jiao)輥的(de)色粉量變得較(jiao)高(gao)(gao)。當通過(guo)用(yong)紫外線(xian)照射其(qi)表(biao)(biao)面或(huo)者使其(qi)暴露于(yu)(yu)(yu)(yu)臭氧中，使導(dao)(dao)(dao)電(dian)(dian)(dian)(dian)橡(xiang)膠(jiao)(jiao)輥的(de)表(biao)(biao)面上(shang)形(xing)成氧化膜時，導(dao)(dao)(dao)電(dian)(dian)(dian)(dian)橡(xiang)膠(jiao)(jiao)輥表(biao)(biao)面的(de)氧濃度變得較(jiao)高(gao)(gao)。

金屬靶材材質分為：

鎳(nie)靶(ba)(ba)(ba)(ba)(ba)(ba)、Ni、鈦靶(ba)(ba)(ba)(ba)(ba)(ba)、Ti、鋅(xin)靶(ba)(ba)(ba)(ba)(ba)(ba)、Zn、鉻靶(ba)(ba)(ba)(ba)(ba)(ba)、Cr、鎂靶(ba)(ba)(ba)(ba)(ba)(ba)、Mg、鈮靶(ba)(ba)(ba)(ba)(ba)(ba)、Nb、錫(xi)靶(ba)(ba)(ba)(ba)(ba)(ba)、Sn、鋁靶(ba)(ba)(ba)(ba)(ba)(ba)、Al、銦靶(ba)(ba)(ba)(ba)(ba)(ba)、In、鐵(tie)(tie)靶(ba)(ba)(ba)(ba)(ba)(ba)、Fe、鋯鋁靶(ba)(ba)(ba)(ba)(ba)(ba)、ZrAl、鈦鋁靶(ba)(ba)(ba)(ba)(ba)(ba)、TiAl、鋯靶(ba)(ba)(ba)(ba)(ba)(ba)、Zr、鋁硅靶(ba)(ba)(ba)(ba)(ba)(ba)、AlSi、硅靶(ba)(ba)(ba)(ba)(ba)(ba)、Si、銅(tong)靶(ba)(ba)(ba)(ba)(ba)(ba)Cu、鉭靶(ba)(ba)(ba)(ba)(ba)(ba)T、a、鍺靶(ba)(ba)(ba)(ba)(ba)(ba)、Ge、銀靶(ba)(ba)(ba)(ba)(ba)(ba)、Ag、鈷(gu)靶(ba)(ba)(ba)(ba)(ba)(ba)、Co、金靶(ba)(ba)(ba)(ba)(ba)(ba)、Au、釓靶(ba)(ba)(ba)(ba)(ba)(ba)、Gd、鑭靶(ba)(ba)(ba)(ba)(ba)(ba)、La、釔(yi)靶(ba)(ba)(ba)(ba)(ba)(ba)、Y、鎢靶(ba)(ba)(ba)(ba)(ba)(ba)、w、不銹鋼靶(ba)(ba)(ba)(ba)(ba)(ba)、鎳(nie)鉻靶(ba)(ba)(ba)(ba)(ba)(ba)、NiCr、鉿靶(ba)(ba)(ba)(ba)(ba)(ba)、Hf、鉬靶(ba)(ba)(ba)(ba)(ba)(ba)、Mo、鐵(tie)(tie)鎳(nie)靶(ba)(ba)(ba)(ba)(ba)(ba)、FeNi、鎢靶(ba)(ba)(ba)(ba)(ba)(ba)、W等。

什么(me)是靶材(cai)綁(bang)定？靶材(cai)綁(bang)定的(de)適用范圍、流程？

 綁定(ding)是指用(yong)焊(han)料將靶材與背靶焊(han)接起來。主要有三種的方(fang)式：壓接、釬(han)焊(han)和導電膠。

 1.壓(ya)接：采用壓(ya)條(tiao)，一(yi)般為了提(ti)高(gao)接觸(chu)的良好性，包銀(yin)導電(dian)輥價格，會增加石墨紙、Pb或In皮；

 2.釬(han)焊：一般使用軟釬(han)料的情況下，上(shang)海包銀導電輥，要求濺(jian)射功率小于20W/cm2，釬(han)料常用In、Sn、In-Sn；我司(si)采用銦焊綁定技(ji)術。

 3.導電膠：采用的導電膠要耐高溫(wen)，厚度在0.02-0.05um。