氦(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)檢(jian)(jian)(jian)(jian)(jian)(jian)漏(lou)(lou)(lou)系(xi)(xi)(xi)統(tong)(tong)是(shi)(shi)(shi)一種用(yong)于(yu)檢(jian)(jian)(jian)(jian)(jian)(jian)測(ce)(ce)(ce)(ce)(ce)(ce)和(he)診(zhen)斷氣(qi)(qi)(qi)(qi)密(mi)性(xing)缺(que)陷的(de)(de)(de)(de)(de)技術(shu)。它利用(yong)氦(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)氣(qi)(qi)(qi)(qi)在密(mi)封(feng)空(kong)(kong)(kong)間(jian)中(zhong)的(de)(de)(de)(de)(de)膨脹特性(xing)，對封(feng)閉(bi)空(kong)(kong)(kong)間(jian)內(nei)的(de)(de)(de)(de)(de)氣(qi)(qi)(qi)(qi)體進行檢(jian)(jian)(jian)(jian)(jian)(jian)測(ce)(ce)(ce)(ce)(ce)(ce)，以確定(ding)是(shi)(shi)(shi)否存在泄(xie)(xie)(xie)(xie)漏(lou)(lou)(lou)。氦(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)檢(jian)(jian)(jian)(jian)(jian)(jian)漏(lou)(lou)(lou)系(xi)(xi)(xi)統(tong)(tong)包括氦(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)氣(qi)(qi)(qi)(qi)發(fa)生器(qi)(qi)(qi)、氦(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)氣(qi)(qi)(qi)(qi)檢(jian)(jian)(jian)(jian)(jian)(jian)測(ce)(ce)(ce)(ce)(ce)(ce)器(qi)(qi)(qi)和(he)氦(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)氣(qi)(qi)(qi)(qi)流量(liang)(liang)計等(deng)設(she)備。氦(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)氣(qi)(qi)(qi)(qi)發(fa)生器(qi)(qi)(qi)將高壓(ya)氣(qi)(qi)(qi)(qi)體氦(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)氣(qi)(qi)(qi)(qi)壓(ya)縮到(dao)一定(ding)壓(ya)力(li)，然后通過(guo)(guo)氦(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)氣(qi)(qi)(qi)(qi)檢(jian)(jian)(jian)(jian)(jian)(jian)測(ce)(ce)(ce)(ce)(ce)(ce)器(qi)(qi)(qi)將氦(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)氣(qi)(qi)(qi)(qi)注入到(dao)封(feng)閉(bi)空(kong)(kong)(kong)間(jian)中(zhong)。氦(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)氣(qi)(qi)(qi)(qi)檢(jian)(jian)(jian)(jian)(jian)(jian)測(ce)(ce)(ce)(ce)(ce)(ce)器(qi)(qi)(qi)通過(guo)(guo)檢(jian)(jian)(jian)(jian)(jian)(jian)測(ce)(ce)(ce)(ce)(ce)(ce)氦(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)氣(qi)(qi)(qi)(qi)的(de)(de)(de)(de)(de)壓(ya)力(li)變(bian)化(hua)來確定(ding)是(shi)(shi)(shi)否存在泄(xie)(xie)(xie)(xie)漏(lou)(lou)(lou)。氦(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)氣(qi)(qi)(qi)(qi)流量(liang)(liang)計用(yong)于(yu)測(ce)(ce)(ce)(ce)(ce)(ce)量(liang)(liang)封(feng)閉(bi)空(kong)(kong)(kong)間(jian)中(zhong)氦(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)氣(qi)(qi)(qi)(qi)的(de)(de)(de)(de)(de)流量(liang)(liang)。氦(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)檢(jian)(jian)(jian)(jian)(jian)(jian)漏(lou)(lou)(lou)系(xi)(xi)(xi)統(tong)(tong)廣泛應用(yong)于(yu)航(hang)空(kong)(kong)(kong)航(hang)天、石油化(hua)工、電(dian)(dian)子電(dian)(dian)氣(qi)(qi)(qi)(qi)、汽車制造等(deng)領域，用(yong)于(yu)檢(jian)(jian)(jian)(jian)(jian)(jian)測(ce)(ce)(ce)(ce)(ce)(ce)氣(qi)(qi)(qi)(qi)密(mi)性(xing)缺(que)陷，保證產品質(zhi)量(liang)(liang)和(he)安(an)全(quan)生產。檢(jian)(jian)(jian)(jian)(jian)(jian)測(ce)(ce)(ce)(ce)(ce)(ce)泄(xie)(xie)(xie)(xie)漏(lou)(lou)(lou)的(de)(de)(de)(de)(de)原(yuan)理是(shi)(shi)(shi)，當封(feng)閉(bi)空(kong)(kong)(kong)間(jian)中(zhong)的(de)(de)(de)(de)(de)氦(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)氣(qi)(qi)(qi)(qi)壓(ya)力(li)低于(yu)泄(xie)(xie)(xie)(xie)漏(lou)(lou)(lou)標(biao)準(zhun)時，氦(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)氣(qi)(qi)(qi)(qi)會在泄(xie)(xie)(xie)(xie)漏(lou)(lou)(lou)處(chu)擴散(san)，導致氦(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)氣(qi)(qi)(qi)(qi)壓(ya)力(li)降低。通過(guo)(guo)檢(jian)(jian)(jian)(jian)(jian)(jian)測(ce)(ce)(ce)(ce)(ce)(ce)氦(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)氣(qi)(qi)(qi)(qi)壓(ya)力(li)的(de)(de)(de)(de)(de)變(bian)化(hua)，可(ke)以檢(jian)(jian)(jian)(jian)(jian)(jian)測(ce)(ce)(ce)(ce)(ce)(ce)到(dao)泄(xie)(xie)(xie)(xie)漏(lou)(lou)(lou)點。氦(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)檢(jian)(jian)(jian)(jian)(jian)(jian)漏(lou)(lou)(lou)系(xi)(xi)(xi)統(tong)(tong)的(de)(de)(de)(de)(de)性(xing)能指(zhi)標(biao)包括漏(lou)(lou)(lou)率(lv)(lv)、靈(ling)敏(min)(min)度和(he)精度等(deng)。漏(lou)(lou)(lou)率(lv)(lv)是(shi)(shi)(shi)指(zhi)在一定(ding)量(liang)(liang)的(de)(de)(de)(de)(de)氣(qi)(qi)(qi)(qi)體中(zhong)泄(xie)(xie)(xie)(xie)漏(lou)(lou)(lou)的(de)(de)(de)(de)(de)氦(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)氣(qi)(qi)(qi)(qi)量(liang)(liang)，是(shi)(shi)(shi)衡量(liang)(liang)檢(jian)(jian)(jian)(jian)(jian)(jian)漏(lou)(lou)(lou)系(xi)(xi)(xi)統(tong)(tong)性(xing)能的(de)(de)(de)(de)(de)重要指(zhi)標(biao)。靈(ling)敏(min)(min)度是(shi)(shi)(shi)指(zhi)氦(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)檢(jian)(jian)(jian)(jian)(jian)(jian)漏(lou)(lou)(lou)系(xi)(xi)(xi)統(tong)(tong)檢(jian)(jian)(jian)(jian)(jian)(jian)測(ce)(ce)(ce)(ce)(ce)(ce)到(dao)泄(xie)(xie)(xie)(xie)漏(lou)(lou)(lou)的(de)(de)(de)(de)(de)能力(li)，即漏(lou)(lou)(lou)率(lv)(lv)越小，靈(ling)敏(min)(min)度越高。精度是(shi)(shi)(shi)指(zhi)氦(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)檢(jian)(jian)(jian)(jian)(jian)(jian)漏(lou)(lou)(lou)系(xi)(xi)(xi)統(tong)(tong)的(de)(de)(de)(de)(de)誤(wu)差，即檢(jian)(jian)(jian)(jian)(jian)(jian)測(ce)(ce)(ce)(ce)(ce)(ce)到(dao)的(de)(de)(de)(de)(de)泄(xie)(xie)(xie)(xie)漏(lou)(lou)(lou)量(liang)(liang)與實際(ji)泄(xie)(xie)(xie)(xie)漏(lou)(lou)(lou)量(liang)(liang)之間(jian)的(de)(de)(de)(de)(de)誤(wu)差。總的(de)(de)(de)(de)(de)來說，氦(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)(hai)檢(jian)(jian)(jian)(jian)(jian)(jian)漏(lou)(lou)(lou)系(xi)(xi)(xi)統(tong)(tong)是(shi)(shi)(shi)一種、、靈(ling)敏(min)(min)的(de)(de)(de)(de)(de)氣(qi)(qi)(qi)(qi)密(mi)性(xing)檢(jian)(jian)(jian)(jian)(jian)(jian)測(ce)(ce)(ce)(ce)(ce)(ce)技術(shu)，廣泛應用(yong)于(yu)各個領域，對保證產品質(zhi)量(liang)(liang)和(he)安(an)全(quan)生產起著重要作用(yong)。

氦質譜檢(jian)漏系(xi)統是(shi)一種高(gao)靈敏度的(de)(de)氣(qi)體檢(jian)測(ce)儀器，氦質譜檢(jian)漏公(gong)司，主(zhu)要用(yong)于探(tan)測(ce)微(wei)量(liang)(liang)的(de)(de)泄(xie)漏物(wu)質。其工作原理是(shi)利(li)用(yong)高(gao)壓(ya)(ya)電(dian)離室產(chan)生的(de)(de)高(gao)壓(ya)(ya)離子(zi)束轟(hong)擊惰(duo)性(xing)氣(qi)體（如He）分子(zi)，使它們解離并釋放出正、負粒(li)子(zi)或電(dian)子(zi)，形成(cheng)原子(zi)簇模型——由大量(liang)(liang)的(de)(de)單核(he)和雙(shuang)核(he)對許(xu)多(duo)具有(you)一定(ding)能量(liang)(liang)的(de)(de)自由玻爾態(tai)的(de)(de)束縛(fu)粒(li)子(zi)和游(you)離電(dian)子(zi)組(zu)成(cheng)的(de)(de)微(wei)觀體系(xi)結構；這些帶有(you)一定(ding)能量(liang)(liang)的(de)(de)狀態(tai)在(zai)一定(ding)的(de)(de)空間范(fan)圍內存在(zai)著庫侖場(chang)分布(bu)不均勻而受到激發時就會發射特征X射線作為示蹤信(xin)號源來檢(jian)查(cha)工件上(shang)的(de)(de)氣(qi)密性(xing)和確定(ding)缺陷的(de)(de)位置及(ji)大小。

氦(hai)質譜檢(jian)(jian)(jian)漏(lou)系統(tong)是(shi)(shi)一種(zhong)用(yong)于檢(jian)(jian)(jian)測(ce)和(he)(he)測(ce)量容(rong)器和(he)(he)管道內(nei)部氣體(ti)泄(xie)漏(lou)的(de)儀器。它(ta)的(de)工作原理是(shi)(shi)利用(yong)氦(hai)氣在不同濃度下(xia)的(de)特(te)征(zheng)響應來檢(jian)(jian)(jian)測(ce)漏(lou)點。具(ju)體(ti)來說，系統(tong)包含(han)一個(ge)充滿氦(hai)氣的(de)容(rong)器和(he)(he)一個(ge)檢(jian)(jian)(jian)測(ce)器。當容(rong)器內(nei)的(de)氦(hai)氣濃度發(fa)生變(bian)(bian)化(hua)時(shi)，其特(te)征(zheng)響應會(hui)發(fa)生變(bian)(bian)化(hua)。通(tong)過檢(jian)(jian)(jian)測(ce)這些(xie)變(bian)(bian)化(hua)，系統(tong)就可以(yi)(yi)確定(ding)容(rong)器內(nei)是(shi)(shi)否(fou)存(cun)在泄(xie)漏(lou)。系統(tong)通(tong)常(chang)包含(han)多(duo)個(ge)傳(chuan)感(gan)(gan)器，每個(ge)傳(chuan)感(gan)(gan)器都可以(yi)(yi)檢(jian)(jian)(jian)測(ce)不同的(de)氦(hai)氣濃度。當傳(chuan)感(gan)(gan)器檢(jian)(jian)(jian)測(ce)到氦(hai)氣濃度發(fa)生變(bian)(bian)化(hua)時(shi)，它(ta)會(hui)將信號發(fa)送給系統(tong)的(de)控制器。控制器會(hui)根據(ju)設定(ding)的(de)閾值來確定(ding)是(shi)(shi)否(fou)存(cun)在泄(xie)漏(lou)，并(bing)決定(ding)是(shi)(shi)否(fou)需要打開排(pai)(pai)氣裝置來排(pai)(pai)除泄(xie)漏(lou)。總的(de)來說，氦(hai)質譜檢(jian)(jian)(jian)漏(lou)系統(tong)是(shi)(shi)一種(zhong)非常(chang)有(you)效的(de)檢(jian)(jian)(jian)測(ce)氣體(ti)泄(xie)漏(lou)的(de)方法(fa)。它(ta)可以(yi)(yi)檢(jian)(jian)(jian)測(ce)到微(wei)小的(de)泄(xie)漏(lou)，并(bing)且準確度高(gao)，是(shi)(shi)石油和(he)(he)化(hua)工行業等領域中(zhong)廣泛使用(yong)的(de)一種(zhong)儀器。