滅菌特(te)(te)(te)種(zhong)(zhong)氣體(ti)(ti)可殺(sha)滅細菌（及(ji)其內(nei)孢子(zi)）、霉菌及(ji)真菌，因此可用(yong)于消毒(du)一(yi)些不能耐(nai)受高(gao)溫消毒(du)的(de)物品。特(te)(te)(te)種(zhong)(zhong)氣體(ti)(ti)的(de)儲(chu)存(cun)(cun)注(zhu)意(yi)事項：儲(chu)存(cun)(cun)高(gao)壓氣體(ti)(ti)≥300m，特(te)(te)(te)種(zhong)(zhong)氣體(ti)(ti)供應商，液化氣≥3000kgs時，儲(chu)存(cun)(cun)場(chang)所(suo)需(xu)要經過(guo)縣級以上相關單位(wei)批準。高(gao)壓容器儲(chu)存(cun)(cun)場(chang)所(suo)出入口及(ji)顯眼處(chu)，需(xu)設(she)有安全(quan)警示牌。特(te)(te)(te)種(zhong)(zhong)氣體(ti)(ti)主要包括高(gao)純(chun)氣體(ti)(ti)、電(dian)(dian)(dian)子(zi)氣體(ti)(ti)、標準氣體(ti)(ti)三(san)大(da)(da)類(lei)，特(te)(te)(te)種(zhong)(zhong)氣體(ti)(ti)公司，電(dian)(dian)(dian)子(zi)特(te)(te)(te)種(zhong)(zhong)氣體(ti)(ti)（簡稱電(dian)(dian)(dian)子(zi)特(te)(te)(te)氣）是特(te)(te)(te)種(zhong)(zhong)氣體(ti)(ti)的(de) 一(yi)個重要分支，合肥(fei)特(te)(te)(te)種(zhong)(zhong)氣體(ti)(ti)，是超大(da)(da)規模集成電(dian)(dian)(dian)路（IC）、平面顯示器件（LCD、LED、OLED）、太陽能電(dian)(dian)(dian)池等電(dian)(dian)(dian)子(zi)工業生產不 可或缺的(de)原材(cai)料。

特種(zhong)(zhong)氣(qi)(qi)(qi)體(ti)在太陽(yang)能(neng)電(dian)(dian)(dian)(dian)(dian)池中(zhong)的(de)(de)(de)應(ying)用(yong)：非晶硅(gui)太陽(yang)能(neng) 電(dian)(dian)(dian)(dian)(dian)池在 LPCVD 沉積(ji) TCO 工(gong)序用(yong)到 DEZn、B2H6；非晶/微晶硅(gui)沉積(ji)工(gong)序用(yong)到 SiH4、PH3/H2、 TMB/H2、CH4、NF3 等。特種(zhong)(zhong)氣(qi)(qi)(qi)體(ti)種(zhong)(zhong)類：電(dian)(dian)(dian)(dian)(dian)子(zi)(zi)氣(qi)(qi)(qi)體(ti)可以分為(wei)電(dian)(dian)(dian)(dian)(dian) 子(zi)(zi)特種(zhong)(zhong)氣(qi)(qi)(qi)體(ti)和電(dian)(dian)(dian)(dian)(dian)子(zi)(zi)大宗(zong)氣(qi)(qi)(qi)體(ti)。電(dian)(dian)(dian)(dian)(dian)子(zi)(zi)氣(qi)(qi)(qi)體(ti)在電(dian)(dian)(dian)(dian)(dian)子(zi)(zi)產(chan)品(pin)(pin)制程工(gong)藝中(zhong)廣(guang)泛應(ying)用(yong)于離子(zi)(zi)注入、刻 蝕、氣(qi)(qi)(qi)相沉積(ji)、摻(chan)雜等工(gong)藝，被稱為(wei)集(ji)成電(dian)(dian)(dian)(dian)(dian)路、液晶面(mian)板、LED 及光(guang)(guang)伏等材料的(de)(de)(de)“糧食” 和“源(yuan)”。特種(zhong)(zhong)氣(qi)(qi)(qi)體(ti)從應(ying)用(yong)領(ling)域(yu)來看，主要包括電(dian)(dian)(dian)(dian)(dian)子(zi)(zi)氣(qi)(qi)(qi)體(ti)、標準氣(qi)(qi)(qi)體(ti)、食品(pin)(pin)氣(qi)(qi)(qi)體(ti)、電(dian)(dian)(dian)(dian)(dian)光(guang)(guang)源(yuan)氣(qi)(qi)(qi)體(ti)等，其中(zhong)，電(dian)(dian)(dian)(dian)(dian)子(zi)(zi)氣(qi)(qi)(qi)體(ti)廣(guang)泛用(yong)于集(ji)成電(dian)(dian)(dian)(dian)(dian)路、顯示面(mian)板、光(guang)(guang)伏能(neng)源(yuan)、光(guang)(guang)纖光(guang)(guang)纜等電(dian)(dian)(dian)(dian)(dian)子(zi)(zi)產(chan)業(ye)的(de)(de)(de)加工(gong)制造(zao)過程，高純(chun)特種(zhong)(zhong)氣(qi)(qi)(qi)體(ti)，是下游(you)的(de)(de)(de)行業(ye)關鍵性化工(gong)基礎(chu)材料，被譽為(wei)電(dian)(dian)(dian)(dian)(dian)子(zi)(zi)產(chan)業(ye)的(de)(de)(de)“血液”。

 特種(zhong)氣體(ti)的(de)(de)重(zhong)要性(xing)：電子(zi)特種(zhong)氣體(ti)決定(ding)了集成電路的(de)(de)終良率和可(ke)靠(kao)性(xing)。由于(yu)電子(zi)氣體(ti)用(yong)途多(duo)，用(yong)量大(da)。所以電子(zi)氣體(ti)也直(zhi)接(jie)決定(ding)了 終芯片的(de)(de)良率和可(ke)靠(kao)性(xing)，特種(zhong)氣體(ti)的(de)(de)儲存注意(yi)事項：為防止高壓(ya)容器(qi)跌倒、滾落、損壞、閥門泄漏等(deng)造成安全(quan)隱(yin)患，存放場地需平(ping)坦，操作需謹慎、輕柔；并用(yong)鏈條、繩索(suo)等(deng)將其(qi)固定(ding)在靠(kao)墻(qiang)等(deng)堅固位(wei)置。滅(mie)菌特種(zhong)氣體(ti)可(ke)殺滅(mie)細菌（及其(qi)內孢子(zi)）、霉菌及真菌，因此(ci)可(ke)用(yong)于(yu)消(xiao)毒一些(xie)不能耐(nai)受(shou)高溫消(xiao)毒的(de)(de)物(wu)品。