特(te)種(zhong)氣(qi)(qi)(qi)體(ti)(ti)(ti)在太(tai)陽(yang)能電(dian)(dian)池中(zhong)的(de)應(ying)用(yong)：非(fei)(fei)晶硅(gui)太(tai)陽(yang)能 電(dian)(dian)池在 LPCVD 沉(chen)積(ji) TCO 工(gong)(gong)(gong)(gong)序用(yong)到 DEZn、B2H6；非(fei)(fei)晶/微晶硅(gui)沉(chen)積(ji)工(gong)(gong)(gong)(gong)序用(yong)到 SiH4、PH3/H2、 TMB/H2、CH4、NF3 等。特(te)種(zhong)氣(qi)(qi)(qi)體(ti)(ti)(ti)種(zhong)類：廣(guang)義(yi)的(de)“電(dian)(dian)子(zi)(zi)氣(qi)(qi)(qi)體(ti)(ti)(ti)”指(zhi)可用(yong)于(yu)(yu)電(dian)(dian)子(zi)(zi)工(gong)(gong)(gong)(gong)業生產(chan)(chan)中(zhong)使(shi)用(yong)的(de)氣(qi)(qi)(qi)體(ti)(ti)(ti)，是重要原材料之一， 狹(xia)義(yi)的(de)“電(dian)(dian)子(zi)(zi)氣(qi)(qi)(qi)體(ti)(ti)(ti)”特(te)指(zhi)可用(yong)于(yu)(yu)電(dian)(dian)子(zi)(zi)半導體(ti)(ti)(ti)領域生產(chan)(chan)的(de)特(te)種(zhong)氣(qi)(qi)(qi)體(ti)(ti)(ti)。特(te)種(zhong)氣(qi)(qi)(qi)體(ti)(ti)(ti)種(zhong)類：電(dian)(dian)子(zi)(zi)氣(qi)(qi)(qi)體(ti)(ti)(ti)可以(yi)分(fen)為電(dian)(dian) 子(zi)(zi)特(te)種(zhong)氣(qi)(qi)(qi)體(ti)(ti)(ti)和(he)電(dian)(dian)子(zi)(zi)大宗氣(qi)(qi)(qi)體(ti)(ti)(ti)。電(dian)(dian)子(zi)(zi)氣(qi)(qi)(qi)體(ti)(ti)(ti)在電(dian)(dian)子(zi)(zi)產(chan)(chan)品(pin)制(zhi)程工(gong)(gong)(gong)(gong)藝中(zhong)廣(guang)泛應(ying)用(yong)于(yu)(yu)離(li)子(zi)(zi)注入、刻(ke) 蝕、氣(qi)(qi)(qi)相沉(chen)積(ji)、摻雜等工(gong)(gong)(gong)(gong)藝，被稱為集(ji)成(cheng)電(dian)(dian)路、液晶面板(ban)、LED 及光(guang)伏等材料的(de)“糧食” 和(he)“源”。

特(te)(te)(te)(te)種(zhong)(zhong)(zhong)氣(qi)(qi)體(ti)(ti)(ti)在(zai)太陽能電(dian)(dian)池中(zhong)的(de)應(ying)用(yong)(yong)：晶體(ti)(ti)(ti)硅電(dian)(dian)池片生(sheng)產中(zhong)的(de)擴散工藝(yi)用(yong)(yong) 到 POCl3 和 O2，工業(ye)特(te)(te)(te)(te)種(zhong)(zhong)(zhong)氣(qi)(qi)體(ti)(ti)(ti)廠家，減反射(she)層 PECVD 工藝(yi)用(yong)(yong)到 SiH4、NH3，刻蝕工藝(yi)用(yong)(yong)到 CF4；特(te)(te)(te)(te)種(zhong)(zhong)(zhong)氣(qi)(qi)體(ti)(ti)(ti)的(de)儲存(cun)(cun)注意(yi)事(shi)項：為防止高壓容(rong)器(qi)跌倒、滾落、損壞(huai)、閥門泄(xie)漏等造成安(an)全隱患，電(dian)(dian)子(zi)(zi)特(te)(te)(te)(te)種(zhong)(zhong)(zhong)氣(qi)(qi)體(ti)(ti)(ti)生(sheng)產廠家，存(cun)(cun)放場地(di)需(xu)平坦，電(dian)(dian)子(zi)(zi)特(te)(te)(te)(te)種(zhong)(zhong)(zhong)氣(qi)(qi)體(ti)(ti)(ti)哪家好，操作需(xu)謹慎、輕柔；并用(yong)(yong)鏈條(tiao)、繩(sheng)索等將其(qi)固(gu)定(ding)在(zai)靠墻等堅(jian)固(gu)位置。特(te)(te)(te)(te)種(zhong)(zhong)(zhong)氣(qi)(qi)體(ti)(ti)(ti)的(de)重(zhong)要性：正(zheng)是因為電(dian)(dian)子(zi)(zi)氣(qi)(qi)體(ti)(ti)(ti)在(zai)集成電(dian)(dian)路制造中(zhong)的(de)使用(yong)(yong)量大，銅陵(ling)特(te)(te)(te)(te)種(zhong)(zhong)(zhong)氣(qi)(qi)體(ti)(ti)(ti)，應(ying)用(yong)(yong)范圍廣的(de)特(te)(te)(te)(te)點。所以電(dian)(dian)子(zi)(zi)氣(qi)(qi)體(ti)(ti)(ti)直接決定(ding)了芯(xin)片制造的(de)良率 與可(ke)靠性等等。所以電(dian)(dian)子(zi)(zi)氣(qi)(qi)體(ti)(ti)(ti)也被(bei)譽為集成電(dian)(dian)路制造中(zhong)的(de)“血液”。

特(te)種(zhong)(zhong)氣(qi)體的(de)(de)儲(chu)存(cun)(cun)注意事項(xiang)：根據儲(chu)存(cun)(cun)的(de)(de)氣(qi)體類型(xing)設置(zhi)(zhi)標牌(pai)，如“嚴(yan)禁(jin)明火”、“危險”、“禁(jin)止入內”等等。并(bing)配置(zhi)(zhi)消防(fang)器材、噴淋系統、吸收劑、中和劑、防(fang)毒(du)面具(ju)、空氣(qi)呼吸器等設施(shi)。特(te)種(zhong)(zhong)氣(qi)體的(de)(de)儲(chu)存(cun)(cun)注意事項(xiang)：為防(fang)止高壓容(rong)器跌倒、滾落、損(sun)壞、閥(fa)門泄漏等造成安全隱患，存(cun)(cun)放場地需(xu)平坦，操作需(xu)謹(jin)慎、輕柔；并(bing)用鏈條(tiao)、繩索等將其固(gu)(gu)定在靠墻(qiang)等堅固(gu)(gu)位置(zhi)(zhi)。滅菌(jun)特(te)種(zhong)(zhong)氣(qi)體可(ke)殺滅細菌(jun)（及其內孢(bao)子）、霉菌(jun)及真菌(jun)，因此可(ke)用于消毒(du)一些不能耐受高溫消毒(du)的(de)(de)物(wu)品。