滑閥(fa)泵(beng)(beng)：由于滑閥(fa)泵(beng)(beng)比(bi)較耐用、可(ke)靠(kao)，國(guo)(guo)(guo)內外各種真(zhen)空爐、鍍(du)膜機以(yi)及干燥、浸漬等設備都(dou)是用滑閥(fa)泵(beng)(beng)作(zuo)為(wei)前級泵(beng)(beng)，但(dan)是滑閥(fa)泵(beng)(beng)鑄件重，加工(gong)工(gong)作(zuo)量(liang)較大，所以(yi)國(guo)(guo)(guo)外各真(zhen)空廠都(dou)在中國(guo)(guo)(guo)尋找合(he)作(zuo)伙伴。為(wei)了(le)使國(guo)(guo)(guo)產滑閥(fa)泵(beng)(beng)能夠進入國(guo)(guo)(guo)際市場，必須進一步降低泵(beng)(beng)的振動噪(zao)聲，噴油和(he)漏油，提(ti)高滑閥(fa)泵(beng)(beng)長期運行(xing)的可(ke)靠(kao)性。

直(zhi)(zhi)聯(lian)(lian)旋(xuan)片(pian)泵(beng)(beng)：隨著(zhu)真空技術在各個(ge)應用領域的不斷(duan)擴大，直(zhi)(zhi)聯(lian)(lian)旋(xuan)片(pian)泵(beng)(beng)的需求量(liang)越來越大。由于這種泵(beng)(beng)數量(liang)很多，加工裝配(pei)工作量(liang)很大，價(jia)格又很低，所(suo)以有的國(guo)(guo)(guo)(guo)外(wai)真空廠商在中(zhong)國(guo)(guo)(guo)(guo)建立廠。國(guo)(guo)(guo)(guo)產中(zhong)小型直(zhi)(zhi)聯(lian)(lian)旋(xuan)片(pian)泵(beng)(beng)在技術上已經過關，價(jia)格又遠比國(guo)(guo)(guo)(guo)外(wai)的泵(beng)(beng)便宜，所(suo)以國(guo)(guo)(guo)(guo)產泵(beng)(beng)仍然有競(jing)爭(zheng)優勢，關鍵是要解決軸(zhou)封漏油以及(ji)旋(xuan)片(pian)材料(liao)和(he)真空泵(beng)(beng)油的性能質量(liang)問題，確(que)保直(zhi)(zhi)聯(lian)(lian)泵(beng)(beng)在高(gao)速、高(gao)溫下(xia)性能穩(wen)定和(he)運行(xing)可靠，同時還要進一步提高(gao)國(guo)(guo)(guo)(guo)產直(zhi)(zhi)聯(lian)(lian)旋(xuan)片(pian)泵(beng)(beng)抽除水蒸氣的能力。

旋(xuan)(xuan)(xuan)片式(shi)真(zhen)空泵(beng)(beng)(beng)(beng)：轉(zhuan)(zhuan)(zhuan)子(zi)以一(yi)定的偏心(xin)距裝(zhuang)(zhuang)(zhuang)在(zai)泵(beng)(beng)(beng)(beng)殼(ke)(ke)內(nei)(nei)并與泵(beng)(beng)(beng)(beng)殼(ke)(ke)內(nei)(nei)表(biao)面(mian)的固定面(mian)靠近，在(zai)轉(zhuan)(zhuan)(zhuan)子(zi)槽內(nei)(nei)裝(zhuang)(zhuang)(zhuang)有(you)兩個（或兩個以上）旋(xuan)(xuan)(xuan)片，當轉(zhuan)(zhuan)(zhuan)子(zi)旋(xuan)(xuan)(xuan)轉(zhuan)(zhuan)(zhuan)時旋(xuan)(xuan)(xuan)片能沿(yan)其徑向槽往復(fu)滑(hua)(hua)動(dong)(dong)(dong)且與泵(beng)(beng)(beng)(beng)殼(ke)(ke)內(nei)(nei)壁始終接觸，此旋(xuan)(xuan)(xuan)片隨轉(zhuan)(zhuan)(zhuan)子(zi)一(yi)起旋(xuan)(xuan)(xuan)轉(zhuan)(zhuan)(zhuan)，可將泵(beng)(beng)(beng)(beng)腔(qiang)分成(cheng)幾(ji)個可變容(rong)積。滑(hua)(hua)閥(fa)式(shi)真(zhen)空泵(beng)(beng)(beng)(beng)：在(zai)偏心(xin)轉(zhuan)(zhuan)(zhuan)子(zi)外部(bu)裝(zhuang)(zhuang)(zhuang)有(you)一(yi)個滑(hua)(hua)閥(fa)，轉(zhuan)(zhuan)(zhuan)子(zi)旋(xuan)(xuan)(xuan)轉(zhuan)(zhuan)(zhuan)帶動(dong)(dong)(dong)滑(hua)(hua)閥(fa)沿(yan)泵(beng)(beng)(beng)(beng)殼(ke)(ke)內(nei)(nei)壁滑(hua)(hua)動(dong)(dong)(dong)和滾動(dong)(dong)(dong)，滑(hua)(hua)閥(fa)上部(bu)的滑(hua)(hua)閥(fa)桿能在(zai)可擺動(dong)(dong)(dong)的滑(hua)(hua)閥(fa)導軌中滑(hua)(hua)動(dong)(dong)(dong)，而泵(beng)(beng)(beng)(beng)腔(qiang)分成(cheng)兩個可變容(rong)積。

旋片式(shi)真空泵(beng)( Sliding Vane Rotary Vacuum Pump )具有(you)結(jie)構緊湊，體(ti)積小(xiao)，重量輕，噪音低，振動小(xiao)等(deng)優點(dian)。所以，它(ta)適用(yong)于作擴散泵(beng)的前級(ji)泵(beng)，而且更(geng)適用(yong)于精(jing)密儀器配(pei)套和實驗(yan)室使用(yong)。例如：質譜儀器，冰箱(xiang)流水線，真空冷(leng)凍干燥機等(deng)。

羅茨(ci)真(zhen)(zhen)空(kong)(kong)泵(beng)( Roots Vacuum Pump )是(shi)一種旋(xuan)轉式(shi)變容真(zhen)(zhen)空(kong)(kong)泵(beng)，須有(you)前(qian)級泵(beng)配(pei)合方可使用(yong)在較寬的壓力范(fan)圍內(nei)，有(you)較大(da)的抽(chou)速，對(dui)被抽(chou)除氣體中含(han)有(you)灰塵和水蒸(zheng)汽不敏感。廣泛用(yong)于冶金、化工、食品、電子(zi)鍍膜等行業。主要用(yong)于真(zhen)(zhen)空(kong)(kong)機組的主泵(beng)，需要用(yong)前(qian)級泵(beng)輔助。如(ru)：水環式(shi)真(zhen)(zhen)空(kong)(kong)泵(beng)，滑閥真(zhen)(zhen)空(kong)(kong)泵(beng)，立式(shi)無油真(zhen)(zhen)空(kong)(kong)泵(beng)，分子(zi)真(zhen)(zhen)空(kong)(kong)泵(beng)等。國內(nei)最大(da)羅茨(ci)真(zhen)(zhen)空(kong)(kong)泵(beng)保持(chi)紀錄為20000L/S。