十(shi)萬(wan)級無塵車間是(shi)指將一(yi)(yi)定空(kong)間范(fan)圍內(nei)之空(kong)氣(qi)(qi)中的微粒(li)子、有害空(kong)氣(qi)(qi)、細菌等(deng)之污染物排除，電子半(ban)導體凈化車間安裝(zhuang)，并(bing)將室(shi)內(nei)之溫度、潔凈度、室(shi)內(nei)壓力、氣(qi)(qi)流速度與(yu)氣(qi)(qi)流分布、噪音振動及(ji)照明、靜電控制在某一(yi)(yi)需求范(fan)圍內(nei)，而所(suo)給予特別設計之房間。無塵車間室(shi)內(nei)空(kong)氣(qi)(qi)經處理后，所(suo)含微粒(li)數(shu)少于(yu)(yu)一(yi)(yi)定數(shu)量要求，一(yi)(yi)般(ban)分十(shi)萬(wan)級、萬(wan)級、千級等(deng)，即室(shi)內(nei)每立方(fang)米空(kong)間的微粒(li)數(shu)不大于(yu)(yu)十(shi)萬(wan)、一(yi)(yi)萬(wan)、一(yi)(yi)千個(ge)……。

山東(dong)凈(jing)(jing)(jing)化(hua)(hua)(hua)工(gong)程中(zhong)在(zai)(zai)確(que)定集中(zhong)或分散凈(jing)(jing)(jing)化(hua)(hua)(hua)空(kong)(kong)(kong)氣(qi)(qi)體(ti)(ti)調(diao)節系統(tong)時，應綜合考慮生(sheng)產工(gong)藝特點和(he)凈(jing)(jing)(jing)化(hua)(hua)(hua)車間(jian)空(kong)(kong)(kong)氣(qi)(qi)體(ti)(ti)的(de)(de)(de)潔凈(jing)(jing)(jing)度等級、面(mian)積和(he)位置(zhi)(zhi)等因(yin)素(su)。對(dui)于生(sheng)產過(guo)程連(lian)續的(de)(de)(de)潔凈(jing)(jing)(jing)室(shi)、大型無(wu)塵室(shi)或凈(jing)(jing)(jing)化(hua)(hua)(hua)車間(jian)、集中(zhong)選址、噪聲控制和(he)振動控制要求嚴格的(de)(de)(de)潔凈(jing)(jing)(jing)室(shi)，應采用集中(zhong)凈(jing)(jing)(jing)化(hua)(hua)(hua)空(kong)(kong)(kong)空(kong)(kong)(kong)調(diao)系統(tong)。山東(dong)凈(jing)(jing)(jing)化(hua)(hua)(hua)工(gong)程中(zhong)凈(jing)(jing)(jing)化(hua)(hua)(hua)空(kong)(kong)(kong)氣(qi)(qi)如果空(kong)(kong)(kong)調(diao)系統(tong)需要電(dian)加熱，電(dian)子半導體(ti)(ti)凈(jing)(jing)(jing)化(hua)(hua)(hua)車間(jian)維(wei)護(hu)，應選擇管式電(dian)加熱器(qi)，電(dian)子半導體(ti)(ti)凈(jing)(jing)(jing)化(hua)(hua)(hua)車間(jian)，該電(dian)加熱器(qi)應布置(zhi)(zhi)在(zai)(zai)高效空(kong)(kong)(kong)氣(qi)(qi)過(guo)濾(lv)器(qi)的(de)(de)(de)迎風(feng)面(mian)，并應配備防火措施(shi)。山東(dong)凈(jing)(jing)(jing)化(hua)(hua)(hua)工(gong)程中(zhong)，除(chu)直流(liu)系統(tong)和(he)帶值班風(feng)機的(de)(de)(de)系統(tong)外，凈(jing)(jing)(jing)化(hua)(hua)(hua)空(kong)(kong)(kong)調(diao)系統(tong)應采取反(fan)傾銷措施(shi)，防止(zhi)室(shi)外污(wu)染空(kong)(kong)(kong)氣(qi)(qi)通過(guo)新風(feng)口進入凈(jing)(jing)(jing)化(hua)(hua)(hua)車間(jian)。

凈(jing)(jing)化(hua)(hua)(hua)工(gong)(gong)程(cheng)(cheng)(cheng)車(che)(che)間(jian)的(de)(de)注(zhu)意要點有(you)哪些？凈(jing)(jing)化(hua)(hua)(hua)工(gong)(gong)程(cheng)(cheng)(cheng)車(che)(che)間(jian)是(shi)指控制產品（例如(ru)硅片(pian)）接(jie)觸的(de)(de)大氣(qi)的(de)(de)清潔度(du)以及溫度(du)和(he)(he)濕度(du)，電子半(ban)導體凈(jing)(jing)化(hua)(hua)(hua)車(che)(che)間(jian)廠家，以便可以在良好的(de)(de)環境空間(jian)中(zhong)生產和(he)(he)制造產品。這個環境空間(jian)的(de)(de)設計和(he)(he)建造過程(cheng)(cheng)(cheng)可以稱(cheng)為凈(jing)(jing)化(hua)(hua)(hua)項目。凈(jing)(jing)化(hua)(hua)(hua)工(gong)(gong)程(cheng)(cheng)(cheng)車(che)(che)間(jian)的(de)(de)凈(jing)(jing)化(hua)(hua)(hua)原理：氣(qi)流→初效(xiao)凈(jing)(jing)化(hua)(hua)(hua)→加濕段(duan)→加熱段(duan)→工(gong)(gong)作臺冷卻段(duan)→中(zhong)效(xiao)凈(jing)(jing)化(hua)(hua)(hua)→風(feng)機供氣(qi)→管道(dao)→高效(xiao)凈(jing)(jing)化(hua)(hua)(hua)出風(feng)口→吹入(ru)室內→帶走塵埃和(he)(he)其他顆(ke)粒→回風(feng)百葉窗→初步凈(jing)(jing)化(hua)(hua)(hua)，重(zhong)復以上過程(cheng)(cheng)(cheng)，即可達(da)到凈(jing)(jing)化(hua)(hua)(hua)目的(de)(de)。