石(shi)英撓性(xing)(xing)(xing)(xing)加(jia)(jia)(jia)速度(du)計(ji)(ji)測量(liang)(liang)(liang)加(jia)(jia)(jia)速度(du)的(de)(de)(de)原(yuan)理(li)主要(yao)基(ji)于(yu)牛頓第二運動定律(lv)，即力(li)(li)等(deng)(deng)于(yu)質量(liang)(liang)(liang)乘以加(jia)(jia)(jia)速度(du)。其工作(zuo)原(yuan)理(li)簡述如下：當(dang)外(wai)界有加(jia)(jia)(jia)速度(du)輸入時，石(shi)英撓性(xing)(xing)(xing)(xing)加(jia)(jia)(jia)速度(du)計(ji)(ji)的(de)(de)(de)敏感質量(liang)(liang)(liang)塊因慣性(xing)(xing)(xing)(xing)效應(ying)產(chan)生(sheng)位(wei)移(yi)；該位(wei)移(yi)通過精心設計(ji)(ji)的(de)(de)(de)石(shi)英撓性(xing)(xing)(xing)(xing)支承引發力(li)(li)矩變化（或稱為(wei)(wei)差(cha)動電(dian)容(rong)容(rong)值改變），這(zhe)一電(dian)信號隨后(hou)被伺服電(dian)路中(zhong)的(de)(de)(de)檢測器(qi)(qi)并(bing)轉換為(wei)(wei)輸出(chu)電(dian)壓，再(zai)經(jing)跨(kua)導補償放(fang)大(da)(da)器(qi)(qi)將電(dian)壓轉化為(wei)(wei)輸出(chu)電(dian)流。此過程中(zhong)輸出(chu)的(de)(de)(de)反饋力(li)(li)與輸入的(de)(de)(de)慣性(xing)(xing)(xing)(xing)力(li)(li)作(zuo)用(yong)相(xiang)反且大(da)(da)小(xiao)相(xiang)等(deng)(deng)、方(fang)向(xiang)相(xiang)反以達到平衡狀態——沒有外(wai)部作(zuo)用(yong)力(li)(li)的(de)(de)(de)情(qing)況下線圈(quan)中(zhong)無感應(ying)電(dian)流流動而保(bao)持靜止(zhi)不動一旦(dan)受力(li)(li)則偏離原(yuan)來位(wei)置并(bing)通過電(dian)磁作(zuo)用(yong)恢復(fu)到原(yuan)狀態同時記錄下相(xiang)關數據供后(hou)續(xu)分析使用(yong)。輸出(chu)電(dian)流的(de)(de)(de)大(da)(da)小(xiao)與輸入的(de)(de)(de)加(jia)(jia)(jia)速度(du)成(cheng)(cheng)正比關系由此可推算得到實際發生(sheng)變化的(de)(de)(de)物(wu)理(li)量(liang)(liang)(liang)的(de)(de)(de)具體數值從而實現計(ji)(ji)量(liang)(liang)(liang)目標物(wu)體的(de)(de)(de)動態性(xing)(xing)(xing)(xing)能參數如瞬(shun)時速率等(deng)(deng)信息的(de)(de)(de)獲取工作(zuo)完成(cheng)(cheng)整個(ge)流程循環(huan)往復(fu)直至外(wai)界條件發生(sheng)改變導致新一輪的(de)(de)(de)測量(liang)(liang)(liang)周期開始為(wei)(wei)止(zhi).總的(de)(de)(de)來說，石(shi)英撓性(xing)(xing)(xing)(xing)加(jia)(jia)(jia)速度(du)計(ji)(ji)較其他類型的(de)(de)(de)傳感器(qi)(qi)具有更高的(de)(de)(de)精度(du)和穩定性(xing)(xing)(xing)(xing)廣泛應(ying)用(yong)于(yu)航(hang)空航(hang)天導航(hang)系統監測等(deng)(deng)領域發揮著的(de)(de)(de)作(zuo)用(yong)

雙(shuang)軸(zhou)石英(ying)撓性(xing)加(jia)(jia)速(su)度(du)(du)計可(ke)能(neng)是(shi)(shi)(shi)(shi)一(yi)種(zhong)利用(yong)石英(ying)材料(liao)(liao)的(de)(de)(de)(de)某種(zhong)特(te)(te)性(xing)來測量(liang)(liang)加(jia)(jia)速(su)度(du)(du)的(de)(de)(de)(de)裝置吧(ba)。撓性(xing)可(ke)能(neng)指(zhi)的(de)(de)(de)(de)是(shi)(shi)(shi)(shi)它的(de)(de)(de)(de)結構有彈性(xing)或者柔(rou)韌性(xing)，這樣在受到加(jia)(jia)速(su)度(du)(du)時(shi)會有形變(bian)(bian)，進而被(bei)檢(jian)測到。石英(ying)作為(wei)(wei)材料(liao)(liao)，可(ke)能(neng)因(yin)為(wei)(wei)它的(de)(de)(de)(de)壓(ya)電效應(ying)，可(ke)以(yi)將機械(xie)形變(bian)(bian)轉化(hua)(hua)為(wei)(wei)電信(xin)號。首先想到的(de)(de)(de)(de)是(shi)(shi)(shi)(shi)精度(du)(du)，也就是(shi)(shi)(shi)(shi)測量(liang)(liang)的(de)(de)(de)(de)準確程度(du)(du)。然后是(shi)(shi)(shi)(shi)靈敏度(du)(du)，加(jia)(jia)速(su)度(du)(du)變(bian)(bian)化(hua)(hua)時(shi)輸出信(xin)號的(de)(de)(de)(de)變(bian)(bian)化(hua)(hua)量(liang)(liang)。量(liang)(liang)程應(ying)該(gai)也很(hen)重要，能(neng)夠測量(liang)(liang)的(de)(de)(de)(de)大和(he)加(jia)(jia)速(su)度(du)(du)范圍(wei)。穩定(ding)性(xing)，長時(shi)間使用(yong)后是(shi)(shi)(shi)(shi)否(fou)會有漂移或者性(xing)能(neng)變(bian)(bian)化(hua)(hua)。溫度(du)(du)影響(xiang)，因(yin)為(wei)(wei)石英(ying)材料(liao)(liao)可(ke)能(neng)對(dui)溫度(du)(du)敏感，雙(shuang)軸(zhou)石英(ying)撓性(xing)加(jia)(jia)速(su)度(du)(du)計定(ding)制，溫度(du)(du)變(bian)(bian)化(hua)(hua)可(ke)能(neng)導致測量(liang)(liang)誤(wu)差。還有動(dong)態(tai)響(xiang)應(ying)，比(bi)如頻率響(xiang)應(ying)，能(neng)否(fou)快(kuai)速(su)變(bian)(bian)化(hua)(hua)的(de)(de)(de)(de)加(jia)(jia)速(su)度(du)(du)。另外(wai)，功耗、尺(chi)寸、重量(liang)(liang)這些(xie)在特(te)(te)定(ding)應(ying)用(yong)中(zhong)也很(hen)重要，比(bi)如航空(kong)航天設備可(ke)能(neng)對(dui)體積和(he)重量(liang)(liang)有嚴格要求。

石(shi)(shi)英(ying)(ying)撓性(xing)(xing)(xing)加速度(du)(du)計(ji)是一種基于(yu)石(shi)(shi)英(ying)(ying)材(cai)料撓性(xing)(xing)(xing)結(jie)構(gou)(gou)和慣性(xing)(xing)(xing)原(yuan)理(li)的高精度(du)(du)加速度(du)(du)傳感(gan)(gan)器(qi)(qi)，其(qi)測(ce)(ce)量(liang)過(guo)程可(ke)分為(wei)以(yi)(yi)下步(bu)驟(zou)：###一、結(jie)構(gou)(gou)與工作原(yuan)理(li)1.**撓性(xing)(xing)(xing)擺組件**：由石(shi)(shi)英(ying)(ying)玻璃(li)制(zhi)(zhi)成的雙(shuang)(shuang)擺結(jie)構(gou)(gou)組成，包含檢測(ce)(ce)質(zhi)量(liang)塊和撓性(xing)(xing)(xing)支撐梁(liang)。石(shi)(shi)英(ying)(ying)材(cai)料具有(you)低熱(re)膨脹(zhang)系(xi)數和高彈性(xing)(xing)(xing)特(te)性(xing)(xing)(xing)。2.**差(cha)動(dong)(dong)電(dian)(dian)容(rong)檢測(ce)(ce)**：質(zhi)量(liang)塊兩(liang)側對稱布置(zhi)電(dian)(dian)容(rong)極板(ban)，構(gou)(gou)成差(cha)動(dong)(dong)電(dian)(dian)容(rong)傳感(gan)(gan)器(qi)(qi)，間距(ju)約10-50μm。3.**閉環反(fan)饋系(xi)統**：通(tong)過(guo)靜電(dian)(dian)力或(huo)電(dian)(dian)磁力實現力平衡(heng)控制(zhi)(zhi)，雙(shuang)(shuang)軸(zhou)石(shi)(shi)英(ying)(ying)撓性(xing)(xing)(xing)加速度(du)(du)計(ji)批發，保(bao)持質(zhi)量(liang)塊動(dong)(dong)態(tai)平衡(heng)。###二、動(dong)(dong)態(tai)測(ce)(ce)量(liang)流(liu)程1.**加速度(du)(du)輸(shu)入**：外部加速度(du)(du)作用于(yu)傳感(gan)(gan)器(qi)(qi)時，雙(shuang)(shuang)軸(zhou)石(shi)(shi)英(ying)(ying)撓性(xing)(xing)(xing)加速度(du)(du)計(ji)型號(hao)，檢測(ce)(ce)質(zhi)量(liang)塊因慣性(xing)(xing)(xing)力產生位移。2.**電(dian)(dian)容(rong)變化(hua)檢測(ce)(ce)**：質(zhi)量(liang)塊位移導致兩(liang)側電(dian)(dian)容(rong)差(cha)值(zhi)變化(hua)（典(dian)型靈(ling)敏度(du)(du)0.1pF/g）。3.**信號(hao)轉(zhuan)(zhuan)換**：電(dian)(dian)容(rong)變化(hua)經調(diao)制(zhi)(zhi)解調(diao)電(dian)(dian)路轉(zhuan)(zhuan)換為(wei)電(dian)(dian)壓信號(hao)（常用載波頻率(lv)1-10kHz）。4.**閉環反(fan)饋控制(zhi)(zhi)**：輸(shu)出信號(hao)經PID控制(zhi)(zhi)器(qi)(qi)生成反(fan)饋電(dian)(dian)流(liu)（典(dian)型范圍(wei)±10mA），驅動(dong)(dong)力矩器(qi)(qi)產生平衡(heng)力。5.**數據輸(shu)出**：反(fan)饋電(dian)(dian)流(liu)值(zhi)與加速度(du)(du)成線性(xing)(xing)(xing)關系(xi)（標準輸(shu)出±5V或(huo)4-20mA），雙(shuang)(shuang)軸(zhou)石(shi)(shi)英(ying)(ying)撓性(xing)(xing)(xing)加速度(du)(du)計(ji)，經AD轉(zhuan)(zhuan)換輸(shu)出數字信號(hao)。###三(san)、關鍵技(ji)術(shu)特(te)性(xing)(xing)(xing)-**靈(ling)敏度(du)(du)**：可(ke)達10^-5g量(liang)級（0.1mg分辨率(lv)）-**帶(dai)寬**：0-100Hz（可(ke)通(tong)過(guo)阻尼調(diao)節）-**溫度(du)(du)補(bu)償**：內(nei)置(zhi)熱(re)敏電(dian)(dian)阻網絡，補(bu)償范圍(wei)-40℃~85℃-**交叉耦(ou)合(he)誤(wu)差(cha)**：###四、應用校準要(yao)點1.需在(zai)精密離心機或(huo)重力場(chang)(chang)翻(fan)轉(zhuan)(zhuan)裝(zhuang)置(zhi)中進行標定(ding)2.六位置(zhi)法校準（±X/Y/Z軸(zhou)向）3.二次非線性(xing)(xing)(xing)誤(wu)差(cha)補(bu)償（典(dian)型值(zhi)該傳感(gan)(gan)器(qi)(qi)通(tong)過(guo)力平衡(heng)原(yuan)理(li)實現10^-6g量(liang)級精度(du)(du)，在(zai)戰略制(zhi)(zhi)導、航天器(qi)(qi)姿態(tai)控制(zhi)(zhi)等(deng)場(chang)(chang)景(jing)具有(you)性(xing)(xing)(xing)，其(qi)抗沖擊能力可(ke)達1000g以(yi)(yi)上，MTBF超過(guo)50，000小時。