石(shi)英撓性加(jia)速(su)度計主(zhu)要由表(biao)頭組件和電路(lu)(lu)部分組成(cheng)。表(biao)頭組件包括石(shi)英擺(bai)(bai)片、上(shang)下(xia)力(li)矩器、檢(jian)測(ce)電容等；電路(lu)(lu)部分通常(chang)包含前置(zhi)放大(da)器、解調電路(lu)(lu)、濾波器、伺服電路(lu)(lu)等。其中(zhong)，石(shi)英擺(bai)(bai)片是敏感元件，通過(guo)其在加(jia)速(su)度作用(yong)下(xia)的(de)(de)撓曲變形來感知加(jia)速(su)度。上(shang)下(xia)力(li)矩器用(yong)于(yu)產生反(fan)饋力(li)矩以實現閉環(huan)控制。檢(jian)測(ce)電容用(yong)于(yu)檢(jian)測(ce)擺(bai)(bai)片的(de)(de)位(wei)置(zhi)變化(hua)并轉化(hua)為電信號，再經電路(lu)(lu)部分進行處(chu)理和放大(da)，終輸出與加(jia)速(su)度成(cheng)正比的(de)(de)電信號。石(shi)英撓性加(jia)速(su)度計具有以下(xia)一些性能特點：

1. 高精度：能夠實現(xian)較高的測量(liang)精度。

2. 高穩定性：長期工作穩定性較(jiao)好。

3. 寬頻帶：可(ke)在較(jiao)寬的頻率范圍內準確(que)測量加速(su)度。

4. 低噪(zao)聲：輸出信(xin)號(hao)的噪(zao)聲水平相(xiang)對較低。

5. 高可(ke)(ke)靠(kao)(kao)(kao)性：結(jie)構可(ke)(ke)靠(kao)(kao)(kao)，能在多(duo)種環境條件下可(ke)(ke)靠(kao)(kao)(kao)工作。

6. 體積(ji)小、重量輕：便于(yu)安裝和使用(yong)在(zai)不同的應(ying)用(yong)場景(jing)。

7. 溫(wen)度適(shi)應(ying)性(xing)(xing)：在一定溫(wen)度范圍內能保持(chi)較好性(xing)(xing)能。

8. 快(kuai)速(su)響應：對加速(su)度變化的(de)響應速(su)度較快(kuai)。

石(shi)(shi)英(ying)(ying)(ying)(ying)(ying)撓(nao)性(xing)(xing)加(jia)速(su)度(du)計(ji)是一種基于石(shi)(shi)英(ying)(ying)(ying)(ying)(ying)材(cai)料特(te)性(xing)(xing)和(he)(he)撓(nao)性(xing)(xing)結(jie)構(gou)設(she)計(ji)的(de)(de)(de)高精(jing)度(du)慣性(xing)(xing)傳(chuan)感器(qi)，主(zhu)要(yao)用于測量(liang)線加(jia)速(su)度(du)或傾角(jiao)變(bian)(bian)化。其(qi)由石(shi)(shi)英(ying)(ying)(ying)(ying)(ying)晶(jing)體(ti)和(he)(he)精(jing)密撓(nao)性(xing)(xing)支撐結(jie)構(gou)組成，結(jie)合了石(shi)(shi)英(ying)(ying)(ying)(ying)(ying)的(de)(de)(de)壓電(dian)效應(ying)與(yu)機(ji)(ji)械(xie)撓(nao)性(xing)(xing)元件的(de)(de)(de)形(xing)變(bian)(bian)特(te)性(xing)(xing)，實現對加(jia)速(su)度(du)的(de)(de)(de)高靈敏度(du)檢測。**結(jie)構(gou)與(yu)原(yuan)理**該(gai)加(jia)速(su)度(du)計(ji)的(de)(de)(de)組件包括石(shi)(shi)英(ying)(ying)(ying)(ying)(ying)振(zhen)(zhen)梁(liang)、撓(nao)性(xing)(xing)鉸(jiao)(jiao)鏈(lian)和(he)(he)質(zhi)量(liang)塊(kuai)。當外部(bu)加(jia)速(su)度(du)作用于質(zhi)量(liang)塊(kuai)時，撓(nao)性(xing)(xing)鉸(jiao)(jiao)鏈(lian)發生彈(dan)性(xing)(xing)形(xing)變(bian)(bian)，帶動石(shi)(shi)英(ying)(ying)(ying)(ying)(ying)振(zhen)(zhen)梁(liang)產生彎曲或拉伸。石(shi)(shi)英(ying)(ying)(ying)(ying)(ying)材(cai)料的(de)(de)(de)壓電(dian)特(te)性(xing)(xing)將(jiang)機(ji)(ji)械(xie)形(xing)變(bian)(bian)轉(zhuan)換為電(dian)荷信(xin)號，經后(hou)續電(dian)路放(fang)大處理后(hou)輸出(chu)與(yu)加(jia)速(su)度(du)成正比的(de)(de)(de)電(dian)信(xin)號。部(bu)分設(she)計(ji)通過閉環(huan)反饋系統動態調整振(zhen)(zhen)梁(liang)位(wei)置，以提升線性(xing)(xing)度(du)和(he)(he)穩(wen)(wen)定性(xing)(xing)。**性(xing)(xing)能(neng)特(te)點**1.**高精(jing)度(du)**：石(shi)(shi)英(ying)(ying)(ying)(ying)(ying)的(de)(de)(de)低(di)遲滯(zhi)性(xing)(xing)和(he)(he)高彈(dan)性(xing)(xing)模量(liang)確保微小加(jia)速(su)度(du)的(de)(de)(de)檢測，精(jing)度(du)可達微重(zhong)力（μg）級別。2.**強環(huan)境(jing)適(shi)應(ying)性(xing)(xing)**：寬溫域（-40℃~85℃）下保持穩(wen)(wen)定，抗(kang)(kang)振(zhen)(zhen)動、抗(kang)(kang)沖擊性(xing)(xing)能(neng)優(you)(you)異，適(shi)用于航(hang)空(kong)航(hang)天(tian)等(deng)環(huan)境(jing)。3.**長期穩(wen)(wen)定性(xing)(xing)**：石(shi)(shi)英(ying)(ying)(ying)(ying)(ying)材(cai)料的(de)(de)(de)老化率極低(di)，年漂移量(liang)小于0.1%，適(shi)合長期監測任務。4.**低(di)功耗(hao)**：被動式傳(chuan)感機(ji)(ji)制(zhi)無需持續供電(dian)，特(te)別適(shi)合等(deng)能(neng)源受限場景(jing)。**應(ying)用領域**-**航(hang)空(kong)航(hang)天(tian)**：制(zhi)導、姿態控制(zhi)、飛機(ji)(ji)導航(hang)系統-**地質(zhi)勘探**：監測、鉆井平(ping)臺傾斜(xie)校正-**工業(ye)自動化**：精(jing)密機(ji)(ji)床振(zhen)(zhen)動補償、機(ji)(ji)器(qi)人運動控制(zhi)-**科研領域**：重(zhong)力梯(ti)度(du)測量(liang)、慣性(xing)(xing)約束(shu)聚變(bian)(bian)實驗(yan)**技術(shu)對比**相(xiang)較于MEMS加(jia)速(su)度(du)計(ji)，石(shi)(shi)英(ying)(ying)(ying)(ying)(ying)撓(nao)性(xing)(xing)型(xing)在(zai)(zai)精(jing)度(du)和(he)(he)穩(wen)(wen)定性(xing)(xing)上更具優(you)(you)勢(shi)(shi)，但體(ti)積和(he)(he)成本較高；與(yu)光纖加(jia)速(su)度(du)計(ji)相(xiang)比，其(qi)響應(ying)速(su)度(du)更快，環(huan)境(jing)適(shi)應(ying)性(xing)(xing)更強。未來發展趨勢(shi)(shi)集(ji)中(zhong)于微型(xing)化、多軸(zhou)集(ji)成及智能(neng)化校準技術(shu)，以滿足無人系統與(yu)物(wu)聯網設(she)備的(de)(de)(de)輕量(liang)化需求。該(gai)傳(chuan)感器(qi)在(zai)(zai)科技與(yu)工業(ye)領域持續發揮的(de)(de)(de)作用。

石(shi)英(ying)(ying)撓性(xing)(xing)(xing)(xing)(xing)加(jia)(jia)(jia)(jia)速(su)(su)度(du)(du)計(ji)(ji)是(shi)一種基于(yu)(yu)(yu)石(shi)英(ying)(ying)材(cai)料(liao)特(te)(te)性(xing)(xing)(xing)(xing)(xing)設(she)(she)(she)計(ji)(ji)的(de)(de)(de)高(gao)(gao)精(jing)(jing)度(du)(du)慣(guan)性(xing)(xing)(xing)(xing)(xing)傳感(gan)器(qi)，通(tong)過(guo)(guo)撓性(xing)(xing)(xing)(xing)(xing)支撐(cheng)結(jie)構將加(jia)(jia)(jia)(jia)速(su)(su)度(du)(du)轉換為電信(xin)號(hao)，廣泛應(ying)用(yong)(yong)于(yu)(yu)(yu)航空航天(tian)、慣(guan)性(xing)(xing)(xing)(xing)(xing)導航、地質勘(kan)探及(ji)精(jing)(jing)密工業控制等領(ling)域(yu)。其(qi)由(you)(you)石(shi)英(ying)(ying)擺(bai)片、力(li)矩(ju)器(qi)、差(cha)動(dong)(dong)電容檢測(ce)器(qi)等組成(cheng)，利用(yong)(yong)石(shi)英(ying)(ying)的(de)(de)(de)高(gao)(gao)穩(wen)定(ding)性(xing)(xing)(xing)(xing)(xing)、低熱膨脹系(xi)(xi)數和(he)優異(yi)彈性(xing)(xing)(xing)(xing)(xing)性(xing)(xing)(xing)(xing)(xing)能(neng)實(shi)現(xian)高(gao)(gao)靈敏(min)度(du)(du)測(ce)量(liang)。根(gen)據設(she)(she)(she)計(ji)(ji)特(te)(te)點(dian)與(yu)(yu)(yu)應(ying)用(yong)(yong)需求，新(xin)型(xing)加(jia)(jia)(jia)(jia)速(su)(su)度(du)(du)計(ji)(ji)型(xing)號(hao)，石(shi)英(ying)(ying)撓性(xing)(xing)(xing)(xing)(xing)加(jia)(jia)(jia)(jia)速(su)(su)度(du)(du)計(ji)(ji)可(ke)分(fen)為以(yi)(yi)下主(zhu)要(yao)類(lei)型(xing)：###1.**按結(jie)構設(she)(she)(she)計(ji)(ji)分(fen)類(lei)**-**懸臂(bei)梁式(shi)**：采用(yong)(yong)單(dan)(dan)端固定(ding)的(de)(de)(de)石(shi)英(ying)(ying)梁結(jie)構，加(jia)(jia)(jia)(jia)速(su)(su)度(du)(du)作用(yong)(yong)下自由(you)(you)端產生(sheng)位移(yi)，通(tong)過(guo)(guo)電容變化檢測(ce)加(jia)(jia)(jia)(jia)速(su)(su)度(du)(du)。結(jie)構簡單(dan)(dan)，適(shi)(shi)用(yong)(yong)于(yu)(yu)(yu)中低量(liang)程場(chang)景，如車輛(liang)穩(wen)定(ding)系(xi)(xi)統(tong)(tong)(tong)。-**扭(niu)擺(bai)式(shi)**：石(shi)英(ying)(ying)擺(bai)片通(tong)過(guo)(guo)扭(niu)轉樞軸(zhou)支撐(cheng)，加(jia)(jia)(jia)(jia)速(su)(su)度(du)(du)引(yin)起擺(bai)片繞軸(zhou)旋(xuan)轉，差(cha)動(dong)(dong)電容檢測(ce)角位移(yi)。此類(lei)設(she)(she)(she)計(ji)(ji)靈敏(min)度(du)(du)高(gao)(gao)，抗橫向(xiang)干(gan)(gan)擾能(neng)力(li)強，常用(yong)(yong)于(yu)(yu)(yu)高(gao)(gao)精(jing)(jing)度(du)(du)導航系(xi)(xi)統(tong)(tong)(tong)。###2.**按工作模式(shi)分(fen)類(lei)**-**開環(huan)型(xing)**：直接檢測(ce)擺(bai)片位移(yi)并輸(shu)(shu)(shu)出(chu)(chu)信(xin)號(hao)，結(jie)構簡單(dan)(dan)、響應(ying)快，但線性(xing)(xing)(xing)(xing)(xing)度(du)(du)和(he)溫漂性(xing)(xing)(xing)(xing)(xing)能(neng)較差(cha)，多(duo)用(yong)(yong)于(yu)(yu)(yu)低成(cheng)本工業設(she)(she)(she)備。-**閉(bi)環(huan)型(xing)**：引(yin)入反(fan)饋力(li)矩(ju)平衡加(jia)(jia)(jia)(jia)速(su)(su)度(du)(du)力(li)，擺(bai)片始終(zhong)處(chu)于(yu)(yu)(yu)零位附近，顯著提升線性(xing)(xing)(xing)(xing)(xing)度(du)(du)、動(dong)(dong)態范(fan)圍和(he)穩(wen)定(ding)性(xing)(xing)(xing)(xing)(xing)，是(shi)航空航天(tian)領(ling)域(yu)的(de)(de)(de)主(zhu)流選擇。###3.**按測(ce)量(liang)維度(du)(du)分(fen)類(lei)**-**單(dan)(dan)軸(zhou)型(xing)**：僅敏(min)感(gan)單(dan)(dan)一軸(zhou)向(xiang)加(jia)(jia)(jia)(jia)速(su)(su)度(du)(du)，結(jie)構緊湊，適(shi)(shi)用(yong)(yong)于(yu)(yu)(yu)定(ding)向(xiang)測(ce)量(liang)場(chang)景，如制導。-**雙軸(zhou)/三軸(zhou)型(xing)**：集成(cheng)多(duo)組敏(min)感(gan)單(dan)(dan)元，可(ke)同步檢測(ce)多(duo)維度(du)(du)加(jia)(jia)(jia)(jia)速(su)(su)度(du)(du)，用(yong)(yong)于(yu)(yu)(yu)全姿(zi)(zi)態慣(guan)性(xing)(xing)(xing)(xing)(xing)導航系(xi)(xi)統(tong)(tong)(tong)，但工藝復雜(za)、成(cheng)本較高(gao)(gao)。###4.**按性(xing)(xing)(xing)(xing)(xing)能(neng)與(yu)(yu)(yu)用(yong)(yong)途分(fen)類(lei)**-**高(gao)(gao)精(jing)(jing)度(du)(du)型(xing)**：采用(yong)(yong)閉(bi)環(huan)設(she)(she)(she)計(ji)(ji)、溫度(du)(du)補償及(ji)精(jing)(jing)密封裝，精(jing)(jing)度(du)(du)可(ke)達微(wei)重(zhong)力(li)級(ji)（μg），用(yong)(yong)于(yu)(yu)(yu)姿(zi)(zi)態控制或重(zhong)力(li)測(ce)量(liang)。-**高(gao)(gao)過(guo)(guo)載型(xing)**：強化結(jie)構以(yi)(yi)承受數千g的(de)(de)(de)沖(chong)擊，適(shi)(shi)用(yong)(yong)于(yu)(yu)(yu)發(fa)射(she)或沖(chong)擊監測(ce)。-**耐環(huan)境(jing)型(xing)**：通(tong)過(guo)(guo)特(te)(te)殊材(cai)料(liao)與(yu)(yu)(yu)封裝工藝適(shi)(shi)應(ying)高(gao)(gao)溫、輻射(she)或強振(zhen)動(dong)(dong)環(huan)境(jing)，如石(shi)油測(ce)井或核(he)工業檢測(ce)。###5.**按信(xin)號(hao)輸(shu)(shu)(shu)出(chu)(chu)分(fen)類(lei)**-**模擬輸(shu)(shu)(shu)出(chu)(chu)**：直接輸(shu)(shu)(shu)出(chu)(chu)與(yu)(yu)(yu)加(jia)(jia)(jia)(jia)速(su)(su)度(du)(du)成(cheng)比例的(de)(de)(de)電壓(ya)或電流信(xin)號(hao)，便于(yu)(yu)(yu)實(shi)時(shi)(shi)處(chu)理，但易受噪聲干(gan)(gan)擾。-**數字輸(shu)(shu)(shu)出(chu)(chu)**：集成(cheng)模數轉換與(yu)(yu)(yu)數字濾波(bo)，抗干(gan)(gan)擾性(xing)(xing)(xing)(xing)(xing)強，適(shi)(shi)合(he)遠距離(li)傳輸(shu)(shu)(shu)及(ji)復雜(za)系(xi)(xi)統(tong)(tong)(tong)集成(cheng)，如飛控。此外，隨著微(wei)機(ji)電（MEMS）技(ji)術的(de)(de)(de)發(fa)展，微(wei)型(xing)化石(shi)英(ying)(ying)撓性(xing)(xing)(xing)(xing)(xing)加(jia)(jia)(jia)(jia)速(su)(su)度(du)(du)計(ji)(ji)逐(zhu)漸興起，在(zai)保持高(gao)(gao)精(jing)(jing)度(du)(du)的(de)(de)(de)同時(shi)(shi)實(shi)現(xian)更小體積與(yu)(yu)(yu)更低功耗，擴展了其(qi)在(zai)消費(fei)電子與(yu)(yu)(yu)中的(de)(de)(de)應(ying)用(yong)(yong)潛力(li)。未來，智(zhi)能(neng)化、多(duo)參數融合(he)（如溫度(du)(du)/振(zhen)動(dong)(dong)補償）及(ji)新(xin)材(cai)料(liao)應(ying)用(yong)(yong)將進一步推動(dong)(dong)該技(ji)術的(de)(de)(de)革新(xin)。