石(shi)英(ying)撓性(xing)(xing)加(jia)(jia)速度(du)計的(de)(de)(de)(de)引(yin)線方(fang)式主(zhu)要涉及(ji)其內部(bu)引(yin)線的(de)(de)(de)(de)連接(jie)(jie)(jie)工(gong)藝。這(zhe)種連接(jie)(jie)(jie)方(fang)式通常采用金(jin)絲(si)鍵(jian)合技術(shu)，它是一種精(jing)細的(de)(de)(de)(de)電(dian)氣連接(jie)(jie)(jie)方(fang)法，石(shi)英(ying)撓性(xing)(xing)式加(jia)(jia)速度(du)傳(chuan)感(gan)(gan)器選(xuan)型，用于將(jiang)傳(chuan)感(gan)(gan)器內部(bu)的(de)(de)(de)(de)微小(xiao)焊(han)盤與相應的(de)(de)(de)(de)接(jie)(jie)(jie)線柱連接(jie)(jie)(jie)起(qi)來。具(ju)體來說(shuo)，在制(zhi)造過(guo)(guo)程(cheng)中(zhong)會使用到專門的(de)(de)(de)(de)工(gong)裝和(he)設備(bei)來實(shi)現(xian)這(zhe)一精(jing)密的(de)(de)(de)(de)連接(jie)(jie)(jie)操(cao)(cao)作：首先將(jiang)下(xia)力矩器和(he)石(shi)英(ying)玻璃鍍膜擺(bai)片(pian)（即(ji)部(bu)件——石(shi)英(ying)撓性(xing)(xing)梁及(ji)其上的(de)(de)(de)(de)敏感(gan)(gan)質量(liang)塊）固定(ding)好；然后(hou)通過(guo)(guo)控(kong)制(zhi)升降裝置(zhi)和(he)真空吸附裝置(zhi)的(de)(de)(de)(de)高度(du)及(ji)位置(zhi)關(guan)系(xi)來確(que)保(bao)(bao)(bao)操(cao)(cao)作的(de)(de)(de)(de)穩(wen)定(ding)性(xing)(xing)和(he)準確(que)性(xing)(xing)；接(jie)(jie)(jie)著(zhu)利用帶有(you)加(jia)(jia)熱功能的(de)(de)(de)(de)劈刀進行金(jin)絲(si)球焊(han)接(jie)(jie)(jie)以(yi)及(ji)楔形(xing)焊(han)接(jie)(jie)(jie)等步驟(zou)來完成(cheng)各個(ge)關(guan)鍵(jian)點的(de)(de)(de)(de)可(ke)靠(kao)電(dian)氣互聯。此過(guo)(guo)程(cheng)無需添加(jia)(jia)額外的(de)(de)(de)(de)焊(han)料且不會引(yin)入雜質污染，并且形(xing)成(cheng)的(de)(de)(de)(de)鍵(jian)合點具(ju)有(you)很高的(de)(de)(de)(de)耐溫性(xing)(xing)能（通常超過(guo)(guo)250℃），從而(er)保(bao)(bao)(bao)證(zheng)了傳(chuan)感(gan)(gan)器長期(qi)工(gong)作的(de)(de)(de)(de)可(ke)靠(kao)性(xing)(xing)和(he)穩(wen)定(ding)性(xing)(xing)。此外整個(ge)工(gong)藝流程(cheng)中(zhong)對于溫度(du)、壓力以(yi)及(ji)超聲作用時(shi)間等因素均(jun)需嚴格控(kong)制(zhi)以(yi)保(bao)(bao)(bao)證(zheng)佳的(de)(de)(de)(de)連接(jie)(jie)(jie)質量(liang)和(he)生產效率。

石(shi)(shi)(shi)英(ying)撓(nao)性(xing)(xing)(xing)(xing)(xing)(xing)加(jia)(jia)速(su)度(du)(du)(du)計(ji)(ji)(ji)是一種基于(yu)慣(guan)性(xing)(xing)(xing)(xing)(xing)(xing)原理(li)(li)(li)(li)的(de)(de)(de)高精(jing)度(du)(du)(du)加(jia)(jia)速(su)度(du)(du)(du)傳(chuan)感(gan)器(qi)，廣泛應用(yong)(yong)(yong)于(yu)航(hang)空航(hang)天、慣(guan)性(xing)(xing)(xing)(xing)(xing)(xing)導航(hang)、監測(ce)等(deng)領(ling)域。其(qi)工(gong)(gong)作原理(li)(li)(li)(li)結(jie)(jie)合(he)(he)了(le)石(shi)(shi)(shi)英(ying)材料(liao)的(de)(de)(de)優異特性(xing)(xing)(xing)(xing)(xing)(xing)和(he)(he)撓(nao)性(xing)(xing)(xing)(xing)(xing)(xing)支(zhi)(zhi)承(cheng)(cheng)結(jie)(jie)構(gou)(gou)的(de)(de)(de)精(jing)密(mi)設計(ji)(ji)(ji)，通(tong)過(guo)(guo)檢(jian)測(ce)慣(guan)性(xing)(xing)(xing)(xing)(xing)(xing)力(li)引起(qi)的(de)(de)(de)形(xing)(xing)變(bian)實現(xian)加(jia)(jia)速(su)度(du)(du)(du)的(de)(de)(de)測(ce)量(liang)(liang)。###一、結(jie)(jie)構(gou)(gou)與材料(liao)特性(xing)(xing)(xing)(xing)(xing)(xing)石(shi)(shi)(shi)英(ying)撓(nao)性(xing)(xing)(xing)(xing)(xing)(xing)加(jia)(jia)速(su)度(du)(du)(du)計(ji)(ji)(ji)的(de)(de)(de)部件(jian)包括石(shi)(shi)(shi)英(ying)撓(nao)性(xing)(xing)(xing)(xing)(xing)(xing)擺片、檢(jian)測(ce)質(zhi)量(liang)(liang)塊(kuai)、差(cha)動電(dian)容(rong)極板和(he)(he)電(dian)磁(ci)反饋系(xi)統。石(shi)(shi)(shi)英(ying)材料(liao)因其(qi)高彈性(xing)(xing)(xing)(xing)(xing)(xing)模(mo)量(liang)(liang)、低熱(re)膨(peng)脹系(xi)數和(he)(he)優異的(de)(de)(de)熱(re)穩(wen)定(ding)性(xing)(xing)(xing)(xing)(xing)(xing)，成(cheng)為撓(nao)性(xing)(xing)(xing)(xing)(xing)(xing)支(zhi)(zhi)承(cheng)(cheng)的(de)(de)(de)理(li)(li)(li)(li)想選擇。石(shi)(shi)(shi)英(ying)擺片通(tong)過(guo)(guo)微(wei)(wei)機械加(jia)(jia)工(gong)(gong)形(xing)(xing)成(cheng)薄壁撓(nao)性(xing)(xing)(xing)(xing)(xing)(xing)鉸鏈，允(yun)許質(zhi)量(liang)(liang)塊(kuai)在(zai)敏感(gan)軸方(fang)向產生微(wei)(wei)小位移(yi)，同(tong)時限制(zhi)(zhi)其(qi)他(ta)方(fang)向的(de)(de)(de)自由度(du)(du)(du)，確保高軸向靈敏度(du)(du)(du)。###二、工(gong)(gong)作原理(li)(li)(li)(li)當加(jia)(jia)速(su)度(du)(du)(du)作用(yong)(yong)(yong)于(yu)傳(chuan)感(gan)器(qi)時，檢(jian)測(ce)質(zhi)量(liang)(liang)塊(kuai)受慣(guan)性(xing)(xing)(xing)(xing)(xing)(xing)力(li)（F=ma）驅(qu)動，導致(zhi)石(shi)(shi)(shi)英(ying)撓(nao)性(xing)(xing)(xing)(xing)(xing)(xing)擺片發(fa)生彈性(xing)(xing)(xing)(xing)(xing)(xing)形(xing)(xing)變(bian)。這種位移(yi)通(tong)過(guo)(guo)差(cha)動電(dian)容(rong)檢(jian)測(ce)系(xi)統轉化(hua)為電(dian)信號：質(zhi)量(liang)(liang)塊(kuai)兩(liang)側的(de)(de)(de)電(dian)容(rong)極板間距變(bian)化(hua)引起(qi)電(dian)容(rong)差(cha)值(zhi)，通(tong)過(guo)(guo)調制(zhi)(zhi)解調電(dian)路輸出與加(jia)(jia)速(su)度(du)(du)(du)成(cheng)正比(bi)的(de)(de)(de)電(dian)壓信號。閉環(huan)系(xi)統通(tong)過(guo)(guo)電(dian)磁(ci)線圈施(shi)加(jia)(jia)反饋力(li)使(shi)(shi)質(zhi)量(liang)(liang)塊(kuai)復(fu)位，反饋電(dian)流(liu)反映加(jia)(jia)速(su)度(du)(du)(du)值(zhi)，顯(xian)著提升線性(xing)(xing)(xing)(xing)(xing)(xing)度(du)(du)(du)和(he)(he)動態范圍。###三、關鍵技術(shu)優勢1.**溫(wen)度(du)(du)(du)穩(wen)定(ding)性(xing)(xing)(xing)(xing)(xing)(xing)**：石(shi)(shi)(shi)英(ying)材料(liao)的(de)(de)(de)熱(re)穩(wen)定(ding)性(xing)(xing)(xing)(xing)(xing)(xing)有(you)效降低溫(wen)漂，配合(he)(he)溫(wen)度(du)(du)(du)補償電(dian)路，可在(zai)-40℃~85℃寬溫(wen)域工(gong)(gong)作。2.**高分辨(bian)率(lv)**：撓(nao)性(xing)(xing)(xing)(xing)(xing)(xing)支(zhi)(zhi)承(cheng)(cheng)的(de)(de)(de)微(wei)(wei)米級(ji)形(xing)(xing)變(bian)檢(jian)測(ce)能(neng)(neng)力(li)使(shi)(shi)分辨(bian)率(lv)達到(dao)10^-6g量(liang)(liang)級(ji)。3.**抗沖擊性(xing)(xing)(xing)(xing)(xing)(xing)**：全固態結(jie)(jie)構(gou)(gou)無(wu)活動摩擦部件(jian)，可承(cheng)(cheng)受>1000g的(de)(de)(de)沖擊載荷。4.**長期穩(wen)定(ding)性(xing)(xing)(xing)(xing)(xing)(xing)**：石(shi)(shi)(shi)英(ying)的(de)(de)(de)蠕變(bian)特性(xing)(xing)(xing)(xing)(xing)(xing)，年漂移(yi)率(lv)低于(yu)50μg。###四、典型(xing)應用(yong)(yong)(yong)該技術(shu)已應用(yong)(yong)(yong)于(yu)微(wei)(wei)推力(li)器(qi)控制(zhi)(zhi)、戰略(lve)制(zhi)(zhi)導、石(shi)(shi)(shi)油(you)測(ce)斜(xie)儀(yi)等(deng)場景。某型(xing)戰略(lve)采用(yong)(yong)(yong)雙(shuang)軸石(shi)(shi)(shi)英(ying)加(jia)(jia)速(su)度(du)(du)(du)計(ji)(ji)(ji)，石(shi)(shi)(shi)英(ying)撓(nao)性(xing)(xing)(xing)(xing)(xing)(xing)式(shi)加(jia)(jia)速(su)度(du)(du)(du)傳(chuan)感(gan)器(qi)應用(yong)(yong)(yong)，零(ling)偏(pian)穩(wen)定(ding)性(xing)(xing)(xing)(xing)(xing)(xing)達到(dao)5μg/√Hz，角度(du)(du)(du)測(ce)量(liang)(liang)精(jing)度(du)(du)(du)優于(yu)0.001°，顯(xian)著提升打(da)擊精(jing)度(du)(du)(du)。這種將精(jing)密(mi)機械、材料(liao)科學和(he)(he)閉環(huan)控制(zhi)(zhi)相結(jie)(jie)合(he)(he)的(de)(de)(de)設計(ji)(ji)(ji)理(li)(li)(li)(li)念，使(shi)(shi)石(shi)(shi)(shi)英(ying)撓(nao)性(xing)(xing)(xing)(xing)(xing)(xing)加(jia)(jia)速(su)度(du)(du)(du)計(ji)(ji)(ji)在(zai)慣(guan)性(xing)(xing)(xing)(xing)(xing)(xing)傳(chuan)感(gan)領(ling)域持續(xu)發(fa)揮(hui)重(zhong)要作用(yong)(yong)(yong)，其(qi)性(xing)(xing)(xing)(xing)(xing)(xing)能(neng)(neng)指(zhi)標仍在(zai)通(tong)過(guo)(guo)表面(mian)微(wei)(wei)加(jia)(jia)工(gong)(gong)技術(shu)和(he)(he)數字化(hua)閉環(huan)技術(shu)的(de)(de)(de)融(rong)合(he)(he)不斷提升。

石英撓性加速度(du)計(ji)的工作原理如(ru)下(xia)：

它(ta)利用石(shi)英(ying)材料(liao)的(de)(de)彈性(xing)特性(xing)。在加速度(du)計中(zhong)，有(you)一(yi)個石(shi)英(ying)擺片(pian)，通過撓(nao)性(xing)支(zhi)撐結構與(yu)(yu)基座相連。當有(you)加速度(du)作(zuo)用時，慣(guan)性(xing)力會使(shi)擺片(pian)產生微小(xiao)的(de)(de)變(bian)形(xing)。擺片(pian)上鍍有(you)金屬電極(ji)，其(qi)與(yu)(yu)固定的(de)(de)電極(ji)之間形(xing)成電容(rong)。加速度(du)的(de)(de)變(bian)化會導致擺片(pian)變(bian)形(xing)量的(de)(de)改(gai)變(bian)，石(shi)英(ying)撓(nao)性(xing)式加速度(du)傳感器，從(cong)而引起電容(rong)值的(de)(de)變(bian)化。通過檢(jian)測(ce)電容(rong)的(de)(de)變(bian)化，并經(jing)過一(yi)系列的(de)(de)信(xin)號處理和轉(zhuan)換，就可以測(ce)量出(chu)加速度(du)的(de)(de)大小(xiao)和方向。這種加速度(du)計具有(you)高精度(du)、高穩定性(xing)等(deng)特點。