石英(ying)(ying)(ying)撓性(xing)(xing)(xing)加(jia)速(su)度(du)(du)計(ji)是一種基于(yu)(yu)石英(ying)(ying)(ying)材料壓(ya)電(dian)效應(ying)與撓性(xing)(xing)(xing)支撐結構的高(gao)精(jing)度(du)(du)慣性(xing)(xing)(xing)傳感(gan)器(qi)(qi)，廣(guang)泛應(ying)用(yong)于(yu)(yu)航空航天、慣性(xing)(xing)(xing)導航、監測(ce)及精(jing)密(mi)儀器(qi)(qi)領域。其(qi)由石英(ying)(ying)(ying)晶(jing)體諧振器(qi)(qi)和(he)撓性(xing)(xing)(xing)懸臂梁組成，通(tong)過(guo)檢(jian)測(ce)慣性(xing)(xing)(xing)力引起的結構形變實現加(jia)速(su)度(du)(du)測(ce)量。信(xin)(xin)(xin)號(hao)輸(shu)(shu)出(chu)(chu)特性(xing)(xing)(xing)方面，石英(ying)(ying)(ying)撓性(xing)(xing)(xing)加(jia)速(su)度(du)(du)計(ji)通(tong)常產生與輸(shu)(shu)入加(jia)速(su)度(du)(du)成正比(bi)的電(dian)荷或電(dian)壓(ya)信(xin)(xin)(xin)號(hao)。壓(ya)電(dian)石英(ying)(ying)(ying)晶(jing)體在受力時(shi)產生表(biao)面電(dian)荷，經(jing)電(dian)荷放大(da)器(qi)(qi)轉換為(wei)低阻(zu)抗(kang)電(dian)壓(ya)信(xin)(xin)(xin)號(hao)。典型靈(ling)敏度(du)(du)可(ke)達100-500mV/g，量程范圍(wei)覆蓋(gai)±1g至(zhi)±100g，低頻響應(ying)可(ke)延伸至(zhi)0Hz（靜態測(ce)量），高(gao)頻響應(ying)上(shang)限約(yue)1kHz。輸(shu)(shu)出(chu)(chu)信(xin)(xin)(xin)號(hao)易受溫度(du)(du)漂移影響，需內置溫度(du)(du)傳感(gan)器(qi)(qi)配合補(bu)(bu)償算法，溫漂系(xi)數(shu)(shu)可(ke)控制在50μg/℃以內。信(xin)(xin)(xin)號(hao)處理(li)流程包含三個關鍵環(huan)節：首(shou)先通(tong)過(guo)低噪聲(sheng)前置放大(da)器(qi)(qi)將pC級電(dian)荷信(xin)(xin)(xin)號(hao)放大(da)，并轉化為(wei)電(dian)壓(ya)信(xin)(xin)(xin)號(hao)；其(qi)次采用(yong)帶通(tong)濾(lv)波器(qi)(qi)（0.1Hz-500Hz）抑(yi)(yi)制高(gao)頻噪聲(sheng)和(he)超(chao)低頻干(gan)擾(rao)；進行模數(shu)(shu)轉換與數(shu)(shu)字補(bu)(bu)償，無伺(si)服石英(ying)(ying)(ying)撓性(xing)(xing)(xing)加(jia)速(su)度(du)(du)計(ji)價格(ge)，通(tong)過(guo)查表(biao)法或多項式擬合消除非線性(xing)(xing)(xing)誤(wu)差，非線性(xing)(xing)(xing)度(du)(du)可(ke)達0.05%FS。對于(yu)(yu)交叉軸(zhou)干(gan)擾(rao)，依托(tuo)精(jing)密(mi)機(ji)械(xie)加(jia)工(gong)可(ke)將串擾(rao)抑(yi)(yi)制在-40dB以下。該(gai)傳感(gan)器(qi)(qi)在航空航天領域優(you)(you)勢(shi)顯著，其(qi)分辨率可(ke)達10μg，零偏穩定性(xing)(xing)(xing)優(you)(you)于(yu)(yu)50μg/h，具備抗(kang)沖擊（>1000g）、耐振動(dong)特性(xing)(xing)(xing)。但相比(bi)MEMS加(jia)速(su)度(du)(du)計(ji)，體積較大(da)（典型尺寸30×30×15mm），功耗較高(gao)（約(yue)1W），適用(yong)于(yu)(yu)對精(jing)度(du)(du)要求嚴(yan)苛的工(gong)業場景。現代設計(ji)中常集成自檢(jian)電(dian)路，通(tong)過(guo)施加(jia)靜電(dian)激勵實現傳感(gan)器(qi)(qi)健康(kang)狀態在線監測(ce)。

石(shi)(shi)英(ying)撓性(xing)(xing)(xing)(xing)(xing)加(jia)速(su)(su)度(du)計是一種基于(yu)石(shi)(shi)英(ying)材(cai)料(liao)的(de)(de)高精(jing)(jing)度(du)慣性(xing)(xing)(xing)(xing)(xing)傳感(gan)(gan)器，其(qi)(qi)尺(chi)(chi)(chi)(chi)(chi)寸(cun)(cun)(cun)設(she)(she)計直接影響(xiang)其(qi)(qi)性(xing)(xing)(xing)(xing)(xing)能與應用(yong)場(chang)景。典型(xing)(xing)尺(chi)(chi)(chi)(chi)(chi)寸(cun)(cun)(cun)范(fan)圍(wei)因(yin)型(xing)(xing)號和(he)用(yong)途(tu)而異，常(chang)(chang)見的(de)(de)封(feng)裝(zhuang)形式為圓柱形或(huo)長方體(ti)(ti)結(jie)(jie)構(gou)，直徑通(tong)(tong)常(chang)(chang)介于(yu)20至(zhi)(zhi)(zhi)50毫米，長度(du)或(huo)厚度(du)在10至(zhi)(zhi)(zhi)30毫米之間，整體(ti)(ti)重量(liang)(liang)約30至(zhi)(zhi)(zhi)150克(ke)(ke)。例(li)如，某型(xing)(xing)航(hang)(hang)空用(yong)石(shi)(shi)英(ying)撓性(xing)(xing)(xing)(xing)(xing)加(jia)速(su)(su)度(du)計的(de)(de)外(wai)(wai)形為直徑32毫米、高度(du)18毫米的(de)(de)圓柱體(ti)(ti)，重量(liang)(liang)約50克(ke)(ke)，兼顧了緊(jin)湊性(xing)(xing)(xing)(xing)(xing)與抗振需求。###結(jie)(jie)構(gou)與尺(chi)(chi)(chi)(chi)(chi)寸(cun)(cun)(cun)特(te)征石(shi)(shi)英(ying)撓性(xing)(xing)(xing)(xing)(xing)加(jia)速(su)(su)度(du)計的(de)(de)組(zu)件包括(kuo)石(shi)(shi)英(ying)擺片(pian)、撓性(xing)(xing)(xing)(xing)(xing)支撐梁(liang)、質量(liang)(liang)塊、電(dian)磁(ci)線圈和(he)信(xin)號檢測(ce)電(dian)路。其(qi)(qi)中，石(shi)(shi)英(ying)擺片(pian)的(de)(de)厚度(du)通(tong)(tong)常(chang)(chang)為0.1至(zhi)(zhi)(zhi)0.3毫米，通(tong)(tong)過(guo)(guo)光刻和(he)離子蝕(shi)刻工藝(yi)實現(xian)微(wei)米級(ji)精(jing)(jing)度(du)的(de)(de)撓性(xing)(xing)(xing)(xing)(xing)結(jie)(jie)構(gou)。微(wei)型(xing)(xing)化(hua)(hua)設(she)(she)計中，敏(min)感(gan)(gan)元件的(de)(de)有(you)效區(qu)域(yu)可(ke)控制在10×10毫米以(yi)(yi)內，而整體(ti)(ti)封(feng)裝(zhuang)需預(yu)留電(dian)磁(ci)驅動空間和(he)熱膨脹緩沖(chong)(chong)結(jie)(jie)構(gou)，故總尺(chi)(chi)(chi)(chi)(chi)寸(cun)(cun)(cun)難以(yi)(yi)大(da)(da)(da)幅縮(suo)(suo)減(jian)。###影響(xiang)尺(chi)(chi)(chi)(chi)(chi)寸(cun)(cun)(cun)的(de)(de)關鍵因(yin)素1.**精(jing)(jing)度(du)要(yao)求**：高精(jing)(jing)度(du)型(xing)(xing)號需更大(da)(da)(da)的(de)(de)質量(liang)(liang)塊以(yi)(yi)提(ti)高信(xin)噪比(bi)，導致尺(chi)(chi)(chi)(chi)(chi)寸(cun)(cun)(cun)增加(jia)。例(li)如，導航(hang)(hang)級(ji)產品可(ke)能比(bi)戰(zhan)術(shu)級(ji)產品體(ti)(ti)積大(da)(da)(da)20%-30%。2.**環境適應性(xing)(xing)(xing)(xing)(xing)**：或(huo)航(hang)(hang)天型(xing)(xing)號需強化(hua)(hua)封(feng)裝(zhuang)以(yi)(yi)耐受(shou)沖(chong)(chong)擊（>1000g）和(he)寬溫域(yu)（-55℃至(zhi)(zhi)(zhi)125℃），外(wai)(wai)殼(ke)厚度(du)通(tong)(tong)常(chang)(chang)增加(jia)1-2毫米。3.**集(ji)成度(du)**：新型(xing)(xing)設(she)(she)計采用(yong)ASIC電(dian)路將(jiang)信(xin)號調理模塊集(ji)成在封(feng)裝(zhuang)內，相(xiang)比(bi)外(wai)(wai)置電(dian)路可(ke)減(jian)少30%的(de)(de)安(an)裝(zhuang)空間。###技術(shu)演進與小型(xing)(xing)化(hua)(hua)趨勢近年來(lai)，通(tong)(tong)過(guo)(guo)石(shi)(shi)英(ying)深反(fan)應離子刻蝕(shi)（DRIE）技術(shu)，撓性(xing)(xing)(xing)(xing)(xing)梁(liang)厚度(du)已(yi)突破50微(wei)米級(ji)，浙江石(shi)(shi)英(ying)撓性(xing)(xing)(xing)(xing)(xing)加(jia)速(su)(su)度(du)計價格，使敏(min)感(gan)(gan)芯片(pian)厚度(du)縮(suo)(suo)減(jian)至(zhi)(zhi)(zhi)2毫米以(yi)(yi)內。同(tong)(tong)時(shi)，三維封(feng)裝(zhuang)技術(shu)將(jiang)電(dian)路堆疊于(yu)機械結(jie)(jie)構(gou)上(shang)方，促使部分(fen)型(xing)(xing)號體(ti)(ti)積較(jiao)早期(qi)產品減(jian)少40%。然而，受(shou)限于(yu)石(shi)(shi)英(ying)材(cai)料(liao)特(te)性(xing)(xing)(xing)(xing)(xing)和(he)物(wu)理測(ce)量(liang)(liang)原理，其(qi)(qi)尺(chi)(chi)(chi)(chi)(chi)寸(cun)(cun)(cun)仍大(da)(da)(da)于(yu)MEMS加(jia)速(su)(su)度(du)計，但在微(wei)重力測(ce)量(liang)(liang)和(he)戰(zhan)略級(ji)導航(hang)(hang)領域(yu)仍。工業級(ji)產品尺(chi)(chi)(chi)(chi)(chi)寸(cun)(cun)(cun)相(xiang)對(dui)寬松(song)，通(tong)(tong)常(chang)(chang)采用(yong)30×30×15毫米的(de)(de)標準化(hua)(hua)模塊；而星(xing)載型(xing)(xing)號通(tong)(tong)過(guo)(guo)鈦(tai)合(he)金(jin)輕量(liang)(liang)化(hua)(hua)殼(ke)體(ti)(ti)可(ke)將(jiang)重量(liang)(liang)控制在80克(ke)(ke)以(yi)(yi)下。未來(lai)，隨著異質集(ji)成技術(shu)和(he)新型(xing)(xing)壓電(dian)材(cai)料(liao)的(de)(de)應用(yong)，石(shi)(shi)英(ying)撓性(xing)(xing)(xing)(xing)(xing)加(jia)速(su)(su)度(du)計有(you)望在保持μg級(ji)精(jing)(jing)度(du)的(de)(de)同(tong)(tong)時(shi)，進一步突破小型(xing)(xing)化(hua)(hua)瓶頸(jing)。

石(shi)(shi)(shi)英(ying)(ying)(ying)(ying)(ying)撓(nao)性(xing)(xing)(xing)(xing)加(jia)(jia)速度(du)(du)(du)(du)(du)計(ji)(ji)(ji)是一(yi)(yi)種高(gao)精度(du)(du)(du)(du)(du)慣性(xing)(xing)(xing)(xing)傳感(gan)(gan)器(qi)，其敏(min)感(gan)(gan)元(yuan)件(jian)(jian)是由石(shi)(shi)(shi)英(ying)(ying)(ying)(ying)(ying)材(cai)(cai)料(liao)制(zhi)成(cheng)(cheng)(cheng)的(de)(de)(de)(de)(de)(de)撓(nao)性(xing)(xing)(xing)(xing)擺片(pian)組(zu)件(jian)(jian)。這(zhe)一(yi)(yi)組(zu)件(jian)(jian)的(de)(de)(de)(de)(de)(de)設計(ji)(ji)(ji)和材(cai)(cai)料(liao)特性(xing)(xing)(xing)(xing)使其能夠感(gan)(gan)知外界加(jia)(jia)速度(du)(du)(du)(du)(du)變化(hua)(hua)，成(cheng)(cheng)(cheng)為(wei)加(jia)(jia)速度(du)(du)(du)(du)(du)計(ji)(ji)(ji)實(shi)現(xian)(xian)高(gao)靈敏(min)度(du)(du)(du)(du)(du)與(yu)(yu)穩定(ding)性(xing)(xing)(xing)(xing)的(de)(de)(de)(de)(de)(de)關鍵。石(shi)(shi)(shi)英(ying)(ying)(ying)(ying)(ying)作為(wei)敏(min)感(gan)(gan)元(yuan)件(jian)(jian)的(de)(de)(de)(de)(de)(de)基(ji)礎材(cai)(cai)料(liao)，航天石(shi)(shi)(shi)英(ying)(ying)(ying)(ying)(ying)撓(nao)性(xing)(xing)(xing)(xing)加(jia)(jia)速度(du)(du)(du)(du)(du)計(ji)(ji)(ji)價格，具(ju)有多項優(you)異(yi)特性(xing)(xing)(xing)(xing)：首先，其熱膨脹系數(shu)極(ji)低（約0.55×10^-6/℃），顯著降低了溫(wen)度(du)(du)(du)(du)(du)變化(hua)(hua)引起的(de)(de)(de)(de)(de)(de)測(ce)(ce)量(liang)(liang)誤差(cha)；其次，石(shi)(shi)(shi)英(ying)(ying)(ying)(ying)(ying)的(de)(de)(de)(de)(de)(de)彈性(xing)(xing)(xing)(xing)模量(liang)(liang)高(gao)且(qie)穩定(ding)，單(dan)軸石(shi)(shi)(shi)英(ying)(ying)(ying)(ying)(ying)撓(nao)性(xing)(xing)(xing)(xing)加(jia)(jia)速度(du)(du)(du)(du)(du)計(ji)(ji)(ji)價格，撓(nao)性(xing)(xing)(xing)(xing)結(jie)構(gou)(gou)在受力(li)(li)后(hou)能產生的(de)(de)(de)(de)(de)(de)彈性(xing)(xing)(xing)(xing)形(xing)(xing)(xing)變；再者，石(shi)(shi)(shi)英(ying)(ying)(ying)(ying)(ying)的(de)(de)(de)(de)(de)(de)物理化(hua)(hua)學性(xing)(xing)(xing)(xing)質(zhi)穩定(ding)，抗電(dian)(dian)(dian)(dian)磁(ci)干(gan)擾能力(li)(li)強，且(qie)無磁(ci)性(xing)(xing)(xing)(xing)，適(shi)用(yong)(yong)于(yu)復雜環境。這(zhe)些特性(xing)(xing)(xing)(xing)使石(shi)(shi)(shi)英(ying)(ying)(ying)(ying)(ying)成(cheng)(cheng)(cheng)為(wei)制(zhi)造高(gao)精度(du)(du)(du)(du)(du)加(jia)(jia)速度(du)(du)(du)(du)(du)計(ji)(ji)(ji)的(de)(de)(de)(de)(de)(de)理想材(cai)(cai)料(liao)。敏(min)感(gan)(gan)元(yuan)件(jian)(jian)的(de)(de)(de)(de)(de)(de)結(jie)構(gou)(gou)由光刻和化(hua)(hua)學蝕刻工(gong)藝(yi)精密(mi)加(jia)(jia)工(gong)而成(cheng)(cheng)(cheng)，主要(yao)包(bao)括：1.**撓(nao)性(xing)(xing)(xing)(xing)擺片(pian)**：厚度(du)(du)(du)(du)(du)僅數(shu)十微(wei)米(mi)(mi)的(de)(de)(de)(de)(de)(de)超薄(bo)石(shi)(shi)(shi)英(ying)(ying)(ying)(ying)(ying)片(pian)，通(tong)(tong)過(guo)(guo)微(wei)加(jia)(jia)工(gong)形(xing)(xing)(xing)成(cheng)(cheng)(cheng)柔性(xing)(xing)(xing)(xing)鉸(jiao)鏈結(jie)構(gou)(gou)，允許質(zhi)量(liang)(liang)塊(kuai)(kuai)(kuai)在加(jia)(jia)速度(du)(du)(du)(du)(du)作用(yong)(yong)下繞支點偏轉2.**檢(jian)(jian)測(ce)(ce)質(zhi)量(liang)(liang)塊(kuai)(kuai)(kuai)**：與(yu)(yu)擺片(pian)集成(cheng)(cheng)(cheng)的(de)(de)(de)(de)(de)(de)石(shi)(shi)(shi)英(ying)(ying)(ying)(ying)(ying)質(zhi)量(liang)(liang)塊(kuai)(kuai)(kuai)，通(tong)(tong)常設計(ji)(ji)(ji)為(wei)對(dui)稱(cheng)結(jie)構(gou)(gou)以減小(xiao)交叉耦(ou)合誤差(cha)3.**電(dian)(dian)(dian)(dian)極(ji)系統**：在石(shi)(shi)(shi)英(ying)(ying)(ying)(ying)(ying)表面鍍(du)制(zhi)的(de)(de)(de)(de)(de)(de)金屬電(dian)(dian)(dian)(dian)極(ji)，包(bao)括驅(qu)動電(dian)(dian)(dian)(dian)極(ji)和檢(jian)(jian)測(ce)(ce)電(dian)(dian)(dian)(dian)極(ji)，用(yong)(yong)于(yu)形(xing)(xing)(xing)成(cheng)(cheng)(cheng)靜(jing)電(dian)(dian)(dian)(dian)力(li)(li)反(fan)(fan)饋和電(dian)(dian)(dian)(dian)容(rong)檢(jian)(jian)測(ce)(ce)其工(gong)作原理基(ji)于(yu)經典牛頓力(li)(li)學：當加(jia)(jia)速度(du)(du)(du)(du)(du)作用(yong)(yong)于(yu)傳感(gan)(gan)器(qi)時，檢(jian)(jian)測(ce)(ce)質(zhi)量(liang)(liang)塊(kuai)(kuai)(kuai)因慣性(xing)(xing)(xing)(xing)力(li)(li)產生位移，導(dao)致(zhi)撓(nao)性(xing)(xing)(xing)(xing)擺片(pian)發(fa)生微(wei)米(mi)(mi)級(ji)彈性(xing)(xing)(xing)(xing)變形(xing)(xing)(xing)。這(zhe)種形(xing)(xing)(xing)變通(tong)(tong)過(guo)(guo)兩種方(fang)(fang)式被檢(jian)(jian)測(ce)(ce)：電(dian)(dian)(dian)(dian)容(rong)式檢(jian)(jian)測(ce)(ce)通(tong)(tong)過(guo)(guo)測(ce)(ce)量(liang)(liang)質(zhi)量(liang)(liang)塊(kuai)(kuai)(kuai)與(yu)(yu)固定(ding)電(dian)(dian)(dian)(dian)極(ji)間(jian)的(de)(de)(de)(de)(de)(de)電(dian)(dian)(dian)(dian)容(rong)變化(hua)(hua)；壓(ya)電(dian)(dian)(dian)(dian)式則利用(yong)(yong)石(shi)(shi)(shi)英(ying)(ying)(ying)(ying)(ying)的(de)(de)(de)(de)(de)(de)壓(ya)電(dian)(dian)(dian)(dian)效應產生電(dian)(dian)(dian)(dian)荷信(xin)號。同時，閉環系統通(tong)(tong)過(guo)(guo)靜(jing)電(dian)(dian)(dian)(dian)力(li)(li)反(fan)(fan)饋使質(zhi)量(liang)(liang)塊(kuai)(kuai)(kuai)保(bao)(bao)(bao)持平衡，反(fan)(fan)饋力(li)(li)大小(xiao)即對(dui)應加(jia)(jia)速度(du)(du)(du)(du)(du)值。敏(min)感(gan)(gan)元(yuan)件(jian)(jian)的(de)(de)(de)(de)(de)(de)創(chuang)新設計(ji)(ji)(ji)體現(xian)(xian)在三個方(fang)(fang)面：采用(yong)(yong)全石(shi)(shi)(shi)英(ying)(ying)(ying)(ying)(ying)一(yi)(yi)體化(hua)(hua)結(jie)構(gou)(gou)消(xiao)除裝配應力(li)(li)；撓(nao)性(xing)(xing)(xing)(xing)鉸(jiao)鏈的(de)(de)(de)(de)(de)(de)對(dui)稱(cheng)布局降低橫向干(gan)擾；微(wei)米(mi)(mi)級(ji)加(jia)(jia)工(gong)精度(du)(du)(du)(du)(du)確保(bao)(bao)(bao)結(jie)構(gou)(gou)一(yi)(yi)致(zhi)性(xing)(xing)(xing)(xing)。這(zhe)些設計(ji)(ji)(ji)使傳感(gan)(gan)器(qi)具(ju)備優(you)于(yu)1μg的(de)(de)(de)(de)(de)(de)分辨率和0.01%的(de)(de)(de)(de)(de)(de)線性(xing)(xing)(xing)(xing)度(du)(du)(du)(du)(du)，在航天器(qi)姿態控制(zhi)、戰略制(zhi)導(dao)等領域具(ju)有的(de)(de)(de)(de)(de)(de)作用(yong)(yong)。隨著微(wei)機電(dian)(dian)(dian)(dian)系統（MEMS）技術的(de)(de)(de)(de)(de)(de)發(fa)展，石(shi)(shi)(shi)英(ying)(ying)(ying)(ying)(ying)撓(nao)性(xing)(xing)(xing)(xing)加(jia)(jia)速度(du)(du)(du)(du)(du)計(ji)(ji)(ji)正向微(wei)型化(hua)(hua)、智能化(hua)(hua)方(fang)(fang)向演進，但其敏(min)感(gan)(gan)元(yuan)件(jian)(jian)仍保(bao)(bao)(bao)持著石(shi)(shi)(shi)英(ying)(ying)(ying)(ying)(ying)材(cai)(cai)料(liao)的(de)(de)(de)(de)(de)(de)優(you)勢。