高(gao)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)系滑閥式真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)泵（Rotary Piston Vacuum Pump）廣泛應用(yong)(yong)于真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)拉晶、真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)鍍膜、真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)冶金、真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)熱處理、真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)浸漬、真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)干(gan)燥、真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)蒸餾、真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)練泥(ni)、航(hang)(hang)空(kong)(kong)(kong)(kong)(kong)(kong)航(hang)(hang)天模(mo)擬(ni)試驗等新材(cai)料、新技(ji)術、新工藝的(de)(de)(de)生產與研制中。滑閥真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)泵可(ke)單獨使(shi)用(yong)(yong)，也(ye)可(ke)作(zuo)為羅(luo)茨真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)泵、油增壓(ya)泵、油擴散泵的(de)(de)(de)前(qian)級泵的(de)(de)(de)使(shi)用(yong)(yong)。當抽吸對(dui)黑色金屬有腐蝕(shi)、對(dui)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)油起化學反應、含大量(liang)蒸汽、大量(liang)粉塵(chen)的(de)(de)(de)氣體時，需附加裝置(zhi)。優點：相(xiang)(xiang)比旋片式真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)泵耐用(yong)(yong)性要高(gao)好幾倍且抽氣速(su)率大，價格相(xiang)(xiang)對(dui)高(gao)一點。

真空(kong)(kong)泵(beng)組閥(fa)片可以有效(xiao)(xiao)地減少(shao)多余功耗的(de)投(tou)入，增加(jia)和(he)效(xiao)(xiao)率下(xia)降閥(fa)片，經(jing)常(chang)是下(xia)部(bu)(bu)緊貼在真空(kong)(kong)泵(beng)機組端面圓盤上(shang)，上(shang)部(bu)(bu)擺(bai)開(kai)一個角度，被扭(niu)曲成“S”形(xing)，經(jing)過長時間(jian)(jian)的(de)使用(yong)會出現設(she)(she)備(bei)老化的(de)情(qing)況。此時設(she)(she)備(bei)的(de)工作(zuo)狀態(tai)出現問題，閥(fa)片中(zhong)間(jian)(jian)應力過于(yu)集(ji)中(zhong)，加(jia)快了其他部(bu)(bu)件的(de)疲勞和(he)破壞程度，減少(shao)了設(she)(she)備(bei)使用(yong)壽命，導致閥(fa)片從中(zhong)間(jian)(jian)部(bu)(bu)分出現斷(duan)裂情(qing)況，影(ying)響正常(chang)使用(yong)。

擴(kuo)散(san)泵(beng)(beng)：以(yi)低(di)壓(ya)高(gao)(gao)速蒸汽流（油(you)或等蒸汽）作(zuo)(zuo)為(wei)工作(zuo)(zuo)介質(zhi)的(de)噴(pen)射(she)真(zhen)空(kong)(kong)(kong)泵(beng)(beng)。氣體分子(zi)擴(kuo)散(san)到蒸汽射(she)流中，被送(song)到出口。在射(she)流中氣體分子(zi)密度(du)始終(zhong)是很低(di)的(de)，這(zhe)種泵(beng)(beng)適于(yu)在分子(zi)流狀態(tai)下(xia)工作(zuo)(zuo)。可分為(wei)：① 自凈化擴(kuo)散(san)泵(beng)(beng)：泵(beng)(beng)液(ye)中易揮發的(de)雜(za)質(zhi)經專(zhuan)門的(de)機械(xie)輸送(song)到出口而(er)不回(hui)到鍋爐中的(de)一(yi)種油(you)擴(kuo)散(san)泵(beng)(beng)② 分餾式擴(kuo)散(san)泵(beng)(beng)：這(zhe)種泵(beng)(beng)具有分餾裝(zhuang)置，使蒸汽壓(ya)強(qiang)較低(di)的(de)工作(zuo)(zuo)液(ye)蒸汽進入(ru)高(gao)(gao)真(zhen)空(kong)(kong)(kong)工作(zuo)(zuo)的(de)噴(pen)嘴(zui)，而(er)蒸汽壓(ya)強(qiang)較高(gao)(gao)的(de)工作(zuo)(zuo)液(ye)蒸汽進入(ru)低(di)真(zhen)空(kong)(kong)(kong)工作(zuo)(zuo)的(de)噴(pen)嘴(zui)，它是一(yi)種多級油(you)擴(kuo)散(san)泵(beng)(beng)。