石英撓性加速度計偏置溫度系數

石(shi)(shi)英(ying)(ying)(ying)撓性(xing)(xing)(xing)(xing)(xing)(xing)加(jia)(jia)(jia)速(su)度(du)(du)計(ji)(ji)(ji)是(shi)一(yi)種(zhong)基(ji)于(yu)石(shi)(shi)英(ying)(ying)(ying)材(cai)料(liao)的(de)(de)高(gao)精(jing)度(du)(du)慣性(xing)(xing)(xing)(xing)(xing)(xing)傳感(gan)(gan)器(qi)，廣泛(fan)應(ying)(ying)(ying)用(yong)于(yu)航空(kong)航天、導(dao)航制(zhi)導(dao)及工業控制(zhi)等領域。其原理是(shi)通(tong)過(guo)(guo)檢(jian)測(ce)石(shi)(shi)英(ying)(ying)(ying)撓性(xing)(xing)(xing)(xing)(xing)(xing)梁在慣性(xing)(xing)(xing)(xing)(xing)(xing)力(li)作用(yong)下的(de)(de)形(xing)變(bian)(bian)(bian)(bian)，利用(yong)壓(ya)電(dian)效應(ying)(ying)(ying)或(huo)電(dian)容(rong)變(bian)(bian)(bian)(bian)化(hua)(hua)轉換為電(dian)信(xin)號，從而測(ce)量加(jia)(jia)(jia)速(su)度(du)(du)。由于(yu)石(shi)(shi)英(ying)(ying)(ying)具(ju)(ju)有(you)優(you)異的(de)(de)機械(xie)穩(wen)(wen)定(ding)(ding)性(xing)(xing)(xing)(xing)(xing)(xing)、低(di)熱(re)(re)(re)(re)膨脹(zhang)系(xi)(xi)數和(he)(he)高(gao)彈性(xing)(xing)(xing)(xing)(xing)(xing)模(mo)量，此類傳感(gan)(gan)器(qi)在長期穩(wen)(wen)定(ding)(ding)性(xing)(xing)(xing)(xing)(xing)(xing)和(he)(he)重復性(xing)(xing)(xing)(xing)(xing)(xing)上表現(xian)突出。**偏(pian)(pian)(pian)(pian)置(zhi)溫(wen)(wen)(wen)度(du)(du)系(xi)(xi)數的(de)(de)重要性(xing)(xing)(xing)(xing)(xing)(xing)**偏(pian)(pian)(pian)(pian)置(zhi)溫(wen)(wen)(wen)度(du)(du)系(xi)(xi)數（BiasTemperatureCoefficient，BTC）是(shi)衡(heng)量加(jia)(jia)(jia)速(su)度(du)(du)計(ji)(ji)(ji)零(ling)(ling)點輸(shu)出隨(sui)溫(wen)(wen)(wen)度(du)(du)漂(piao)移的(de)(de)關鍵(jian)指標，通(tong)常以(yi)μg/℃或(huo)mV/℃表示。在無加(jia)(jia)(jia)速(su)度(du)(du)輸(shu)入時，理想輸(shu)出應(ying)(ying)(ying)為零(ling)(ling)，但溫(wen)(wen)(wen)度(du)(du)變(bian)(bian)(bian)(bian)化(hua)(hua)會導(dao)致石(shi)(shi)英(ying)(ying)(ying)材(cai)料(liao)特性(xing)(xing)(xing)(xing)(xing)(xing)、支撐結構(gou)形(xing)變(bian)(bian)(bian)(bian)及電(dian)路(lu)參數變(bian)(bian)(bian)(bian)化(hua)(hua)，引起零(ling)(ling)點偏(pian)(pian)(pian)(pian)移。BTC直接(jie)影響(xiang)(xiang)系(xi)(xi)統在寬溫(wen)(wen)(wen)環境下的(de)(de)精(jing)度(du)(du)，尤其在溫(wen)(wen)(wen)差(cha)劇烈的(de)(de)應(ying)(ying)(ying)用(yong)場景(jing)（如(ru)軌道變(bian)(bian)(bian)(bian)化(hua)(hua)、飛(fei)行(xing)）中，需(xu)(xu)嚴(yan)格控制(zhi)BTC以(yi)降(jiang)低(di)導(dao)航誤(wu)差(cha)。**影響(xiang)(xiang)因素分(fen)析**1.**材(cai)料(liao)熱(re)(re)(re)(re)特性(xing)(xing)(xing)(xing)(xing)(xing)**：石(shi)(shi)英(ying)(ying)(ying)雖具(ju)(ju)有(you)低(di)熱(re)(re)(re)(re)膨脹(zhang)系(xi)(xi)數，但其壓(ya)電(dian)常數仍隨(sui)溫(wen)(wen)(wen)度(du)(du)非線性(xing)(xing)(xing)(xing)(xing)(xing)變(bian)(bian)(bian)(bian)化(hua)(hua)，導(dao)致輸(shu)出漂(piao)移。2.**結構(gou)熱(re)(re)(re)(re)應(ying)(ying)(ying)力(li)**：撓性(xing)(xing)(xing)(xing)(xing)(xing)梁與(yu)金屬(shu)基(ji)座(zuo)的(de)(de)熱(re)(re)(re)(re)膨脹(zhang)系(xi)(xi)數差(cha)異，在溫(wen)(wen)(wen)度(du)(du)變(bian)(bian)(bian)(bian)化(hua)(hua)時產生內(nei)應(ying)(ying)(ying)力(li)，改變(bian)(bian)(bian)(bian)梁的(de)(de)剛(gang)度(du)(du)和(he)(he)諧振頻(pin)率(lv)。3.**電(dian)路(lu)溫(wen)(wen)(wen)漂(piao)**：前(qian)置(zhi)放大器(qi)的(de)(de)失調電(dian)壓(ya)和(he)(he)增益(yi)隨(sui)溫(wen)(wen)(wen)度(du)(du)變(bian)(bian)(bian)(bian)化(hua)(hua)，疊加(jia)(jia)(jia)在傳感(gan)(gan)器(qi)信(xin)號中，加(jia)(jia)(jia)劇偏(pian)(pian)(pian)(pian)置(zhi)漂(piao)移。**優(you)化(hua)(hua)與(yu)補(bu)償(chang)技術**1.**材(cai)料(liao)與(yu)結構(gou)設計(ji)(ji)(ji)**：采(cai)用(yong)熱(re)(re)(re)(re)匹配合金（如(ru)因瓦合金）作為基(ji)座(zuo)，減少熱(re)(re)(re)(re)應(ying)(ying)(ying)力(li)；優(you)化(hua)(hua)梁的(de)(de)幾何形(xing)狀以(yi)分(fen)散熱(re)(re)(re)(re)應(ying)(ying)(ying)變(bian)(bian)(bian)(bian)。2.**溫(wen)(wen)(wen)度(du)(du)補(bu)償(chang)電(dian)路(lu)**：內(nei)置(zhi)溫(wen)(wen)(wen)度(du)(du)傳感(gan)(gan)器(qi)，通(tong)過(guo)(guo)模(mo)擬(ni)電(dian)路(lu)或(huo)數字(zi)算法（如(ru)多項式擬(ni)合）實時修正偏(pian)(pian)(pian)(pian)置(zhi)輸(shu)出。3.**工藝(yi)改進**：離(li)子束(shu)刻蝕等精(jing)密加(jia)(jia)(jia)工技術確(que)保結構(gou)對稱性(xing)(xing)(xing)(xing)(xing)(xing)，降(jiang)低(di)各(ge)向異性(xing)(xing)(xing)(xing)(xing)(xing)熱(re)(re)(re)(re)變(bian)(bian)(bian)(bian)形(xing)的(de)(de)影響(xiang)(xiang)。**測(ce)試與(yu)校準**量產前(qian)需(xu)(xu)進行(xing)高(gao)低(di)溫(wen)(wen)(wen)循環試驗（-40℃至+85℃），標定(ding)(ding)BTC曲線并(bing)寫入補(bu)償(chang)模(mo)塊。例如(ru)，某型加(jia)(jia)(jia)速(su)度(du)(du)計(ji)(ji)(ji)通(tong)過(guo)(guo)二階(jie)溫(wen)(wen)(wen)度(du)(du)補(bu)償(chang)將BTC從200μg/℃降(jiang)至5μg/℃以(yi)內(nei)，顯(xian)著提(ti)升了環境下的(de)(de)可靠性(xing)(xing)(xing)(xing)(xing)(xing)。總之，石(shi)(shi)英(ying)(ying)(ying)撓性(xing)(xing)(xing)(xing)(xing)(xing)加(jia)(jia)(jia)速(su)度(du)(du)計(ji)(ji)(ji)的(de)(de)偏(pian)(pian)(pian)(pian)置(zhi)溫(wen)(wen)(wen)度(du)(du)系(xi)(xi)數是(shi)衡(heng)量其環境適(shi)應(ying)(ying)(ying)性(xing)(xing)(xing)(xing)(xing)(xing)的(de)(de)參數，需(xu)(xu)通(tong)過(guo)(guo)多學科(ke)協同(tong)優(you)化(hua)(hua)實現(xian)與(yu)高(gao)穩(wen)(wen)定(ding)(ding)性(xing)(xing)(xing)(xing)(xing)(xing)的(de)(de)平衡(heng)。隨(sui)著微納加(jia)(jia)(jia)工與(yu)智能(neng)補(bu)償(chang)技術的(de)(de)發(fa)展(zhan)，未來(lai)有(you)望進一(yi)步突破溫(wen)(wen)(wen)度(du)(du)限(xian)制(zhi)，拓(tuo)展(zhan)其在深空(kong)探(tan)測(ce)等領域的(de)(de)應(ying)(ying)(ying)用(yong)邊界。

石英撓性加速度計的主要結構部件

石英(ying)(ying)(ying)(ying)撓性(xing)(xing)(xing)(xing)加(jia)速(su)(su)度(du)(du)(du)計(ji)(ji)是一種基于慣性(xing)(xing)(xing)(xing)原理的高(gao)精度(du)(du)(du)傳感器，石英(ying)(ying)(ying)(ying)加(jia)速(su)(su)度(du)(du)(du)計(ji)(ji)用途，其(qi)結(jie)構(gou)由(you)石英(ying)(ying)(ying)(ying)材(cai)(cai)料(liao)與精密(mi)機械設(she)計(ji)(ji)結(jie)合而成(cheng)(cheng)，主要包(bao)含以下關鍵部件(jian)：1.**石英(ying)(ying)(ying)(ying)撓性(xing)(xing)(xing)(xing)梁(liang)(liang)**作為彈(dan)性(xing)(xing)(xing)(xing)元件(jian)，通(tong)(tong)常由(you)單(dan)晶石英(ying)(ying)(ying)(ying)通(tong)(tong)過(guo)(guo)光刻或(huo)微(wei)加(jia)工技術制(zhi)成(cheng)(cheng)薄片(pian)結(jie)構(gou)，厚度(du)(du)(du)可達微(wei)米級。石英(ying)(ying)(ying)(ying)的高(gao)彈(dan)性(xing)(xing)(xing)(xing)模量(liang)和低熱(re)膨脹系(xi)數賦予梁(liang)(liang)優(you)異(yi)的機械穩(wen)定(ding)(ding)性(xing)(xing)(xing)(xing)。其(qi)的撓性(xing)(xing)(xing)(xing)設(she)計(ji)(ji)（如(ru)E型或(huo)雙端(duan)固定(ding)(ding)結(jie)構(gou)）允許(xu)在敏(min)感軸方向產生(sheng)(sheng)可控形變(bian)，同(tong)時約束(shu)其(qi)他自由(you)度(du)(du)(du)，確(que)保線(xian)性(xing)(xing)(xing)(xing)響(xiang)應。2.**慣性(xing)(xing)(xing)(xing)質量(liang)塊(kuai)**由(you)高(gao)密(mi)度(du)(du)(du)材(cai)(cai)料(liao)（如(ru)鎢合金）制(zhi)成(cheng)(cheng)，通(tong)(tong)過(guo)(guo)微(wei)焊(han)接或(huo)粘(zhan)接固定(ding)(ding)于撓性(xing)(xing)(xing)(xing)梁(liang)(liang)末(mo)端(duan)。質量(liang)塊(kuai)在加(jia)速(su)(su)度(du)(du)(du)作用下產生(sheng)(sheng)慣性(xing)(xing)(xing)(xing)力，驅動(dong)(dong)撓性(xing)(xing)(xing)(xing)梁(liang)(liang)彎曲(qu)變(bian)形，其(qi)位移(yi)量(liang)與加(jia)速(su)(su)度(du)(du)(du)成(cheng)(cheng)正比。質量(liang)塊(kuai)設(she)計(ji)(ji)需平衡靈(ling)敏(min)度(du)(du)(du)與結(jie)構(gou)剛度(du)(du)(du)，通(tong)(tong)常采(cai)用對稱(cheng)布局以減小交叉耦合誤差。3.**電(dian)容檢測(ce)系(xi)統(tong)**由(you)固定(ding)(ding)電(dian)極(ji)與質量(liang)塊(kuai)附著的動(dong)(dong)電(dian)極(ji)構(gou)成(cheng)(cheng)差分電(dian)容結(jie)構(gou)。撓性(xing)(xing)(xing)(xing)梁(liang)(liang)形變(bian)導板間距變(bian)化，通(tong)(tong)過(guo)(guo)載波(bo)(bo)調制(zhi)技術檢測(ce)電(dian)容差值，靈(ling)敏(min)度(du)(du)(du)可達亞納米級位移(yi)識別。極(ji)板常鍍金以提(ti)高(gao)導電(dian)性(xing)(xing)(xing)(xing)，并采(cai)用真空(kong)封(feng)(feng)裝(zhuang)減少(shao)空(kong)氣阻(zu)尼干擾(rao)。4.**力反(fan)饋閉環系(xi)統(tong)**包(bao)含永磁體、力矩線(xian)圈及伺服電(dian)路。當(dang)檢測(ce)到(dao)位移(yi)時，電(dian)路生(sheng)(sheng)成(cheng)(cheng)反(fan)饋電(dian)流驅動(dong)(dong)線(xian)圈，產生(sheng)(sheng)與慣性(xing)(xing)(xing)(xing)力平衡的洛倫茲力，使質量(liang)塊(kuai)回(hui)歸零(ling)位。反(fan)饋電(dian)流經精密(mi)采(cai)樣電(dian)阻(zu)轉換后輸出加(jia)速(su)(su)度(du)(du)(du)信號，該閉環設(she)計(ji)(ji)大(da)幅提(ti)升(sheng)線(xian)性(xing)(xing)(xing)(xing)度(du)(du)(du)和動(dong)(dong)態范圍。5.**溫(wen)度(du)(du)(du)補(bu)償模塊(kuai)**集成(cheng)(cheng)微(wei)型溫(wen)度(du)(du)(du)傳感器和補(bu)償算法電(dian)路。石英(ying)(ying)(ying)(ying)雖具(ju)低熱(re)敏(min)感性(xing)(xing)(xing)(xing)，但細微(wei)溫(wen)度(du)(du)(du)漂移(yi)仍通(tong)(tong)過(guo)(guo)數字濾波(bo)(bo)或(huo)材(cai)(cai)料(liao)匹(pi)配（如(ru)選用殷鋼支(zhi)架）進行實時校正，確(que)保全溫(wen)域穩(wen)定(ding)(ding)性(xing)(xing)(xing)(xing)。6.**真空(kong)密(mi)封(feng)(feng)殼(ke)體**采(cai)用金屬(shu)-陶(tao)瓷封(feng)(feng)裝(zhuang)技術，內(nei)部維持10^-3P真空(kong)以消除(chu)氣體阻(zu)尼。外(wai)殼(ke)多層電(dian)磁屏蔽設(she)計(ji)(ji)有(you)效隔離外(wai)部磁場(chang)與機械振動(dong)(dong)，同(tong)時通(tong)(tong)過(guo)(guo)熱(re)膨脹匹(pi)配焊(han)接確(que)保長期(qi)氣密(mi)性(xing)(xing)(xing)(xing)。這些部件(jian)協(xie)同(tong)工作，使石英(ying)(ying)(ying)(ying)撓性(xing)(xing)(xing)(xing)加(jia)速(su)(su)度(du)(du)(du)計(ji)(ji)在航空(kong)航天、慣性(xing)(xing)(xing)(xing)導航等領域實現μg級分辨率與10^-5量(liang)級的非線(xian)性(xing)(xing)(xing)(xing)精度(du)(du)(du)，其(qi)結(jie)構(gou)設(she)計(ji)(ji)充分體現了微(wei)機械系(xi)統(tong)的高(gao)集成(cheng)(cheng)與材(cai)(cai)料(liao)特性(xing)(xing)(xing)(xing)優(you)化。

石(shi)英撓性(xing)(xing)(xing)(xing)加(jia)(jia)(jia)速(su)(su)度(du)(du)(du)計(ji)(ji)(ji)(ji)是一(yi)種基于石(shi)英材(cai)(cai)料的(de)(de)(de)(de)高精度(du)(du)(du)慣性(xing)(xing)(xing)(xing)傳感器，其(qi)尺(chi)寸(cun)設計(ji)(ji)(ji)(ji)直(zhi)接影響(xiang)其(qi)性(xing)(xing)(xing)(xing)能與應用(yong)場景。典型(xing)(xing)(xing)尺(chi)寸(cun)范圍因型(xing)(xing)(xing)號(hao)(hao)和用(yong)途(tu)而異(yi)，常(chang)見(jian)的(de)(de)(de)(de)封(feng)裝(zhuang)形式為圓柱形或(huo)長方(fang)體(ti)(ti)結(jie)(jie)構(gou)(gou)，加(jia)(jia)(jia)速(su)(su)度(du)(du)(du)計(ji)(ji)(ji)(ji)多少錢，直(zhi)徑通(tong)常(chang)介于20至(zhi)(zhi)50毫(hao)(hao)(hao)米(mi)(mi)(mi)(mi)，長度(du)(du)(du)或(huo)厚(hou)(hou)度(du)(du)(du)在(zai)(zai)(zai)10至(zhi)(zhi)30毫(hao)(hao)(hao)米(mi)(mi)(mi)(mi)之間(jian)，石(shi)英橈(rao)性(xing)(xing)(xing)(xing)加(jia)(jia)(jia)速(su)(su)度(du)(du)(du)計(ji)(ji)(ji)(ji)，整體(ti)(ti)重量(liang)約(yue)30至(zhi)(zhi)150克(ke)(ke)。例如，某型(xing)(xing)(xing)航空(kong)(kong)用(yong)石(shi)英撓性(xing)(xing)(xing)(xing)加(jia)(jia)(jia)速(su)(su)度(du)(du)(du)計(ji)(ji)(ji)(ji)的(de)(de)(de)(de)外(wai)(wai)形為直(zhi)徑32毫(hao)(hao)(hao)米(mi)(mi)(mi)(mi)、高度(du)(du)(du)18毫(hao)(hao)(hao)米(mi)(mi)(mi)(mi)的(de)(de)(de)(de)圓柱體(ti)(ti)，重量(liang)約(yue)50克(ke)(ke)，兼顧(gu)了緊湊性(xing)(xing)(xing)(xing)與抗(kang)振需(xu)求。###結(jie)(jie)構(gou)(gou)與尺(chi)寸(cun)特征石(shi)英撓性(xing)(xing)(xing)(xing)加(jia)(jia)(jia)速(su)(su)度(du)(du)(du)計(ji)(ji)(ji)(ji)的(de)(de)(de)(de)組件包括石(shi)英擺片(pian)(pian)、撓性(xing)(xing)(xing)(xing)支撐梁(liang)、質量(liang)塊(kuai)、電(dian)(dian)磁線圈(quan)和信(xin)號(hao)(hao)檢(jian)測(ce)電(dian)(dian)路。其(qi)中，石(shi)英擺片(pian)(pian)的(de)(de)(de)(de)厚(hou)(hou)度(du)(du)(du)通(tong)常(chang)為0.1至(zhi)(zhi)0.3毫(hao)(hao)(hao)米(mi)(mi)(mi)(mi)，通(tong)過光(guang)刻(ke)和離(li)子蝕刻(ke)工藝實現(xian)微(wei)米(mi)(mi)(mi)(mi)級精度(du)(du)(du)的(de)(de)(de)(de)撓性(xing)(xing)(xing)(xing)結(jie)(jie)構(gou)(gou)。微(wei)型(xing)(xing)(xing)化設計(ji)(ji)(ji)(ji)中，敏(min)感元(yuan)件的(de)(de)(de)(de)有效區(qu)域可控制在(zai)(zai)(zai)10×10毫(hao)(hao)(hao)米(mi)(mi)(mi)(mi)以(yi)(yi)(yi)內，而整體(ti)(ti)封(feng)裝(zhuang)需(xu)預留電(dian)(dian)磁驅動空(kong)(kong)間(jian)和熱(re)膨脹(zhang)緩(huan)沖(chong)結(jie)(jie)構(gou)(gou)，故總尺(chi)寸(cun)難以(yi)(yi)(yi)大幅(fu)縮減。###影響(xiang)尺(chi)寸(cun)的(de)(de)(de)(de)關鍵(jian)因素1.**精度(du)(du)(du)要求**：高精度(du)(du)(du)型(xing)(xing)(xing)號(hao)(hao)需(xu)更大的(de)(de)(de)(de)質量(liang)塊(kuai)以(yi)(yi)(yi)提高信(xin)噪比(bi)，導(dao)致尺(chi)寸(cun)增加(jia)(jia)(jia)。例如，導(dao)航級產(chan)品可能比(bi)戰(zhan)術級產(chan)品體(ti)(ti)積(ji)大20%-30%。2.**環境適應性(xing)(xing)(xing)(xing)**：或(huo)航天型(xing)(xing)(xing)號(hao)(hao)需(xu)強(qiang)化封(feng)裝(zhuang)以(yi)(yi)(yi)耐受沖(chong)擊（>1000g）和寬溫(wen)域（-55℃至(zhi)(zhi)125℃），外(wai)(wai)殼厚(hou)(hou)度(du)(du)(du)通(tong)常(chang)增加(jia)(jia)(jia)1-2毫(hao)(hao)(hao)米(mi)(mi)(mi)(mi)。3.**集成度(du)(du)(du)**：新型(xing)(xing)(xing)設計(ji)(ji)(ji)(ji)采(cai)用(yong)ASIC電(dian)(dian)路將(jiang)信(xin)號(hao)(hao)調理(li)模塊(kuai)集成在(zai)(zai)(zai)封(feng)裝(zhuang)內，相比(bi)外(wai)(wai)置(zhi)電(dian)(dian)路可減少30%的(de)(de)(de)(de)安裝(zhuang)空(kong)(kong)間(jian)。###技(ji)(ji)術演進與小(xiao)型(xing)(xing)(xing)化趨勢(shi)近年來(lai)，通(tong)過石(shi)英深反應離(li)子刻(ke)蝕（DRIE）技(ji)(ji)術，撓性(xing)(xing)(xing)(xing)梁(liang)厚(hou)(hou)度(du)(du)(du)已突(tu)破50微(wei)米(mi)(mi)(mi)(mi)級，使敏(min)感芯片(pian)(pian)厚(hou)(hou)度(du)(du)(du)縮減至(zhi)(zhi)2毫(hao)(hao)(hao)米(mi)(mi)(mi)(mi)以(yi)(yi)(yi)內。同(tong)時(shi)，海南加(jia)(jia)(jia)速(su)(su)度(du)(du)(du)計(ji)(ji)(ji)(ji)，三維封(feng)裝(zhuang)技(ji)(ji)術將(jiang)電(dian)(dian)路堆疊(die)于機械結(jie)(jie)構(gou)(gou)上方(fang)，促(cu)使部分型(xing)(xing)(xing)號(hao)(hao)體(ti)(ti)積(ji)較早期產(chan)品減少40%。然而，受限于石(shi)英材(cai)(cai)料特性(xing)(xing)(xing)(xing)和物理(li)測(ce)量(liang)原理(li)，其(qi)尺(chi)寸(cun)仍大于MEMS加(jia)(jia)(jia)速(su)(su)度(du)(du)(du)計(ji)(ji)(ji)(ji)，但在(zai)(zai)(zai)微(wei)重力(li)測(ce)量(liang)和戰(zhan)略級導(dao)航領域仍。工業級產(chan)品尺(chi)寸(cun)相對寬松，通(tong)常(chang)采(cai)用(yong)30×30×15毫(hao)(hao)(hao)米(mi)(mi)(mi)(mi)的(de)(de)(de)(de)標準化模塊(kuai)；而星載(zai)型(xing)(xing)(xing)號(hao)(hao)通(tong)過鈦合金輕量(liang)化殼體(ti)(ti)可將(jiang)重量(liang)控制在(zai)(zai)(zai)80克(ke)(ke)以(yi)(yi)(yi)下。未來(lai)，隨著異(yi)質集成技(ji)(ji)術和新型(xing)(xing)(xing)壓電(dian)(dian)材(cai)(cai)料的(de)(de)(de)(de)應用(yong)，石(shi)英撓性(xing)(xing)(xing)(xing)加(jia)(jia)(jia)速(su)(su)度(du)(du)(du)計(ji)(ji)(ji)(ji)有望在(zai)(zai)(zai)保持μg級精度(du)(du)(du)的(de)(de)(de)(de)同(tong)時(shi)，進一(yi)步(bu)突(tu)破小(xiao)型(xing)(xing)(xing)化瓶頸。

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