石英(ying)(ying)撓(nao)(nao)性(xing)(xing)加速(su)度(du)(du)(du)計(ji)焊(han)接(jie)(jie)(jie)工(gong)(gong)藝(yi)解析石英(ying)(ying)撓(nao)(nao)性(xing)(xing)加速(su)度(du)(du)(du)計(ji)作為(wei)高(gao)精(jing)度(du)(du)(du)慣(guan)性(xing)(xing)傳感器(qi)，其部件是由熔融石英(ying)(ying)材料制(zhi)(zhi)成(cheng)的撓(nao)(nao)性(xing)(xing)擺片結(jie)構。焊(han)接(jie)(jie)(jie)工(gong)(gong)藝(yi)直接(jie)(jie)(jie)影響器(qi)件性(xing)(xing)能(neng)與(yu)可靠性(xing)(xing)，需(xu)嚴格遵循特(te)殊工(gong)(gong)藝(yi)規范(fan)。一、焊(han)接(jie)(jie)(jie)工(gong)(gong)藝(yi)特(te)點1.材料特(te)性(xing)(xing)：石英(ying)(ying)材料脆性(xing)(xing)大、導熱系(xi)數低，焊(han)接(jie)(jie)(jie)時易(yi)產(chan)生熱應力裂紋2.結(jie)構要求：0.05-0.2mm超(chao)薄撓(nao)(nao)需(xu)保持(chi)(chi)微(wei)米級形變(bian)(bian)精(jing)度(du)(du)(du)3.潔(jie)凈度(du)(du)(du)要求：需(xu)達到(dao)ISO5級無(wu)塵環(huan)境(jing)標準(zhun)二、關鍵工(gong)(gong)藝(yi)流程1.焊(han)前處理：-采(cai)用(yong)(yong)等離子清洗去除表面氧(yang)化(hua)物-使用(yong)(yong)J型精(jing)密夾具(ju)實(shi)現0.01mm級定位精(jing)度(du)(du)(du)-預置低熔點玻璃焊(han)料（Sn62Pb36Ag2）2.焊(han)接(jie)(jie)(jie)實(shi)施：-采(cai)用(yong)(yong)脈(mo)沖(chong)激(ji)光焊(han)接(jie)(jie)(jie)工(gong)(gong)藝(yi)（波(bo)長(chang)1064nm）-功率密度(du)(du)(du)控制(zhi)(zhi)在(zai)1.2-1.5kW/mm2-脈(mo)沖(chong)頻率8-12kHz，脈(mo)寬0.5-2ms-氣保護氣體流量8-10L/min3.焊(han)后(hou)處理：-階(jie)梯式退火(huo)消除殘余應力（300℃→200℃→室溫）-顯微(wei)檢測焊(han)縫完整性(xing)(xing)（放大倍率200X）-氦質(zhi)譜(pu)檢漏(lou)測試（漏(lou)率＜1×10^-9Pa·m3/s）三、質(zhi)量控制(zhi)(zhi)要點1.溫度(du)(du)(du)控制(zhi)(zhi)：焊(han)接(jie)(jie)(jie)區瞬(shun)時溫度(du)(du)(du)不超(chao)過800℃，避免石英(ying)(ying)相變(bian)(bian)2.形變(bian)(bian)監(jian)測：激(ji)光干涉儀實(shi)時檢測撓(nao)(nao)變(bian)(bian)形量（＜0.5μm）3.強(qiang)度(du)(du)(du)測試：焊(han)縫剪切強(qiang)度(du)(du)(du)需(xu)達到(dao)45MPa以上4.環(huan)境(jing)控制(zhi)(zhi)：濕度(du)(du)(du)保持(chi)(chi)30±5%RH，溫度(du)(du)(du)波(bo)動±1℃焊(han)接(jie)(jie)(jie)工(gong)(gong)藝(yi)使產(chan)品合格率提升至98%以上，零偏穩定性(xing)(xing)優于5μg，在(zai)航(hang)空航(hang)天、精(jing)密導航(hang)領域得到(dao)成(cheng)功應用(yong)(yong)。隨(sui)著微(wei)連(lian)接(jie)(jie)(jie)技術的發展，激(ji)光誘導石墨烯焊(han)接(jie)(jie)(jie)等新工(gong)(gong)藝(yi)正在(zai)試驗(yan)(yan)驗(yan)(yan)證(zheng)中，有望(wang)進一步提升器(qi)件性(xing)(xing)能(neng)指標。

石(shi)(shi)(shi)英(ying)(ying)撓(nao)性(xing)加(jia)速(su)度(du)(du)(du)(du)計(ji)是(shi)(shi)一(yi)種高(gao)(gao)(gao)精(jing)度(du)(du)(du)(du)慣性(xing)傳(chuan)(chuan)感(gan)器(qi)(qi)(qi)，能夠測(ce)量(liang)物體在(zai)運(yun)動(dong)中(zhong)的(de)(de)加(jia)速(su)度(du)(du)(du)(du)、傾斜角度(du)(du)(du)(du)或振動(dong)狀態(tai)。它廣(guang)泛應(ying)用(yong)于(yu)航(hang)(hang)空(kong)航(hang)(hang)天、導(dao)航(hang)(hang)系統(tong)、地(di)質勘(kan)探和(he)工(gong)業(ye)(ye)自動(dong)化等(deng)(deng)領(ling)域，動(dong)車石(shi)(shi)(shi)英(ying)(ying)擾(rao)性(xing)加(jia)速(su)度(du)(du)(du)(du)傳(chuan)(chuan)感(gan)器(qi)(qi)(qi)價(jia)格，是(shi)(shi)現代(dai)精(jing)密(mi)測(ce)量(liang)技術中(zhong)的(de)(de)元件(jian)之一(yi)。###結構與原理其部件(jian)是(shi)(shi)由**石(shi)(shi)(shi)英(ying)(ying)材料**制(zhi)成(cheng)的(de)(de)撓(nao)性(xing)擺片(pian)。石(shi)(shi)(shi)英(ying)(ying)具(ju)有(you)近乎(hu)零熱膨脹系數(shu)、高(gao)(gao)(gao)彈性(xing)和(he)優異的(de)(de)穩定(ding)(ding)性(xing)，是(shi)(shi)理想的(de)(de)結構材料。擺片(pian)通過薄壁撓(nao)性(xing)支撐固(gu)定(ding)(ding)在(zai)傳(chuan)(chuan)感(gan)器(qi)(qi)(qi)內(nei)部，形(xing)成(cheng)彈性(xing)懸(xuan)臂(bei)結構。當傳(chuan)(chuan)感(gan)器(qi)(qi)(qi)受到加(jia)速(su)度(du)(du)(du)(du)作用(yong)時，擺片(pian)因慣性(xing)力(li)產生微(wei)小位移(yi)，導(dao)致兩側電(dian)(dian)(dian)容極板的(de)(de)間距變(bian)(bian)化，從而改(gai)變(bian)(bian)電(dian)(dian)(dian)容值(zhi)(zhi)。檢(jian)測(ce)電(dian)(dian)(dian)路將電(dian)(dian)(dian)容變(bian)(bian)化轉換為電(dian)(dian)(dian)信號，動(dong)車石(shi)(shi)(shi)英(ying)(ying)擾(rao)性(xing)加(jia)速(su)度(du)(du)(du)(du)傳(chuan)(chuan)感(gan)器(qi)(qi)(qi)型號，經過放大和(he)計(ji)算(suan)后輸出的(de)(de)加(jia)速(su)度(du)(du)(du)(du)值(zhi)(zhi)。部分(fen)型號還采用(yong)**閉環反饋(kui)系統(tong)**，通過電(dian)(dian)(dian)磁(ci)力(li)實時平(ping)衡擺片(pian)位移(yi)，進一(yi)步提升測(ce)量(liang)精(jing)度(du)(du)(du)(du)。###技術優勢1.**高(gao)(gao)(gao)穩定(ding)(ding)性(xing)**：石(shi)(shi)(shi)英(ying)(ying)材料耐(nai)溫性(xing)強(qiang)（-50℃~120℃），抗老化，長期使用(yong)性(xing)能幾乎(hu)無(wu)衰減。2.**靈敏度(du)(du)(du)(du)高(gao)(gao)(gao)**：可檢(jian)測(ce)微(wei)米(mi)級位移(yi)，分(fen)辨率(lv)達10??g（地(di)球(qiu)重力(li)加(jia)速(su)度(du)(du)(du)(du)的(de)(de)百(bai)萬分(fen)之一(yi)）。3.**抗干(gan)擾(rao)能力(li)強(qiang)**：全(quan)固(gu)態(tai)結構無(wu)機械摩擦，耐(nai)受強(qiang)振動(dong)和(he)電(dian)(dian)(dian)磁(ci)干(gan)擾(rao)。4.**長壽命**：無(wu)磨損部件(jian)，使用(yong)壽命超過10萬小時。###典型應(ying)用(yong)-**航(hang)(hang)空(kong)航(hang)(hang)天**：制(zhi)導(dao)、姿態(tai)控制(zhi)-**資源勘(kan)探**：波檢(jian)測(ce)、油氣鉆探定(ding)(ding)向(xiang)-**智能裝備**：高(gao)(gao)(gao)鐵軌道監測(ce)、工(gong)業(ye)(ye)機器(qi)(qi)(qi)人運(yun)動(dong)控制(zhi)-**科研領(ling)域**：引力(li)波探測(ce)、精(jing)密(mi)實驗平(ping)臺穩控相比MEMS加(jia)速(su)度(du)(du)(du)(du)計(ji)，石(shi)(shi)(shi)英(ying)(ying)撓(nao)性(xing)型在(zai)環境和(he)超高(gao)(gao)(gao)精(jing)度(du)(du)(du)(du)場景(jing)中(zhong)具(ju)有(you)性(xing)，但其成(cheng)本較高(gao)(gao)(gao)，多(duo)用(yong)于(yu)、科研等(deng)(deng)領(ling)域。隨(sui)著工(gong)藝(yi)優化，未來(lai)或將在(zai)自動(dong)駕(jia)駛、等(deng)(deng)民用(yong)市場發揮更大價(jia)值(zhi)(zhi)。

石(shi)(shi)英(ying)(ying)(ying)(ying)撓(nao)性(xing)(xing)(xing)加速(su)(su)度(du)(du)計是一種基于(yu)(yu)力(li)平(ping)(ping)衡原(yuan)理(li)的(de)高精(jing)度(du)(du)慣性(xing)(xing)(xing)傳(chuan)(chuan)感(gan)器(qi)(qi)，其(qi)由石(shi)(shi)英(ying)(ying)(ying)(ying)材料制成，具有優(you)(you)異的(de)溫(wen)度(du)(du)穩定(ding)性(xing)(xing)(xing)和(he)(he)抗(kang)電(dian)磁(ci)干擾(rao)能(neng)力(li)。其(qi)結構(gou)主要(yao)由石(shi)(shi)英(ying)(ying)(ying)(ying)擺片、撓(nao)性(xing)(xing)(xing)支撐梁、質(zhi)量(liang)(liang)塊(kuai)(kuai)(kuai)、電(dian)磁(ci)驅動(dong)(dong)(dong)(dong)線(xian)圈和(he)(he)電(dian)容(rong)檢(jian)測(ce)(ce)單(dan)元(yuan)組(zu)成。**工作(zuo)原(yuan)理(li)**：當加速(su)(su)度(du)(du)作(zuo)用于(yu)(yu)傳(chuan)(chuan)感(gan)器(qi)(qi)時(shi)，質(zhi)量(liang)(liang)塊(kuai)(kuai)(kuai)在慣性(xing)(xing)(xing)力(li)作(zuo)用下(xia)產(chan)(chan)生位移，動(dong)(dong)(dong)(dong)車(che)(che)石(shi)(shi)英(ying)(ying)(ying)(ying)擾(rao)性(xing)(xing)(xing)加速(su)(su)度(du)(du)傳(chuan)(chuan)感(gan)器(qi)(qi)型(xing)號，帶(dai)動(dong)(dong)(dong)(dong)石(shi)(shi)英(ying)(ying)(ying)(ying)撓(nao)性(xing)(xing)(xing)梁發生彈性(xing)(xing)(xing)形變。石(shi)(shi)英(ying)(ying)(ying)(ying)材料的(de)壓電(dian)特性(xing)(xing)(xing)使(shi)其(qi)在形變時(shi)產(chan)(chan)生電(dian)荷信(xin)(xin)號，但更(geng)關鍵(jian)的(de)是通過(guo)電(dian)容(rong)檢(jian)測(ce)(ce)單(dan)元(yuan)（或電(dian)磁(ci)感(gan)應(ying)）將(jiang)位移量(liang)(liang)轉化(hua)為電(dian)信(xin)(xin)號。閉環控制系統中，該(gai)信(xin)(xin)號經放大(da)(da)后反(fan)饋至電(dian)磁(ci)驅動(dong)(dong)(dong)(dong)線(xian)圈，產(chan)(chan)生與慣性(xing)(xing)(xing)力(li)方向(xiang)相反(fan)的(de)電(dian)磁(ci)恢復(fu)力(li)，使(shi)質(zhi)量(liang)(liang)塊(kuai)(kuai)(kuai)始終保持在平(ping)(ping)衡位置。通過(guo)測(ce)(ce)量(liang)(liang)反(fan)饋電(dian)流的(de)強(qiang)度(du)(du)即可(ke)反(fan)推出加速(su)(su)度(du)(du)值（a=F/m）。**技(ji)術特性(xing)(xing)(xing)**：1.石(shi)(shi)英(ying)(ying)(ying)(ying)材料的(de)低熱膨脹系數（0.5×10^-6/℃）保障了溫(wen)度(du)(du)穩定(ding)性(xing)(xing)(xing)；2.撓(nao)性(xing)(xing)(xing)梁采用化(hua)學蝕刻(ke)工藝加工，厚度(du)(du)可(ke)控制在0.05-0.1mm，實(shi)現高靈敏度(du)(du)；3.閉環反(fan)饋系統使(shi)量(liang)(liang)程可(ke)達±50g，動(dong)(dong)(dong)(dong)車(che)(che)石(shi)(shi)英(ying)(ying)(ying)(ying)擾(rao)性(xing)(xing)(xing)加速(su)(su)度(du)(du)傳(chuan)(chuan)感(gan)器(qi)(qi)，分(fen)辨率(lv)優(you)(you)于(yu)(yu)10^-5g；4.交(jiao)叉軸干擾(rao)低于(yu)(yu)0.1%，重復(fu)性(xing)(xing)(xing)誤差小于(yu)(yu)50μg。**應(ying)用領域**：主要(yao)用于(yu)(yu)慣性(xing)(xing)(xing)導航系統（如航天(tian)器(qi)(qi)、戰略）、精(jing)密監測(ce)(ce)、石(shi)(shi)油(you)測(ce)(ce)井等場景。相較(jiao)(jiao)于(yu)(yu)MEMS加速(su)(su)度(du)(du)計，其(qi)長期穩定(ding)性(xing)(xing)(xing)提高2個數量(liang)(liang)級，但成本較(jiao)(jiao)高且體積較(jiao)(jiao)大(da)(da)（典型(xing)尺寸30×30×20mm）。現代改進型(xing)通過(guo)數字化(hua)閉環控制、溫(wen)度(du)(du)補償(chang)算法和(he)(he)微封(feng)裝(zhuang)技(ji)術，進一步提升了動(dong)(dong)(dong)(dong)態范(fan)圍（可(ke)達±100g）和(he)(he)抗(kang)沖擊能(neng)力(li)（>1000g）。