石(shi)(shi)英(ying)(ying)撓(nao)性(xing)(xing)加(jia)(jia)(jia)速度(du)(du)計是(shi)一種基于(yu)力(li)平衡原(yuan)理(li)的高(gao)精(jing)度(du)(du)慣(guan)性(xing)(xing)傳感(gan)(gan)器(qi)(qi)，其(qi)由(you)石(shi)(shi)英(ying)(ying)材料(liao)制成，具有(you)優異(yi)的溫度(du)(du)穩定性(xing)(xing)和抗電(dian)(dian)磁(ci)干擾能力(li)。其(qi)結構主要由(you)石(shi)(shi)英(ying)(ying)擺(bai)片、撓(nao)性(xing)(xing)支(zhi)撐梁(liang)、質量塊(kuai)、電(dian)(dian)磁(ci)驅動(dong)線(xian)圈(quan)和電(dian)(dian)容(rong)檢(jian)測(ce)單元組(zu)成。**工作(zuo)原(yuan)理(li)**：當(dang)加(jia)(jia)(jia)速度(du)(du)作(zuo)用(yong)于(yu)傳感(gan)(gan)器(qi)(qi)時，質量塊(kuai)在(zai)(zai)慣(guan)性(xing)(xing)力(li)作(zuo)用(yong)下產生位(wei)(wei)移(yi)，帶動(dong)石(shi)(shi)英(ying)(ying)撓(nao)性(xing)(xing)梁(liang)發生彈性(xing)(xing)形變。石(shi)(shi)英(ying)(ying)材料(liao)的壓電(dian)(dian)特性(xing)(xing)使(shi)(shi)其(qi)在(zai)(zai)形變時產生電(dian)(dian)荷信(xin)號，但更(geng)關鍵的是(shi)通過電(dian)(dian)容(rong)檢(jian)測(ce)單元（或電(dian)(dian)磁(ci)感(gan)(gan)應）將位(wei)(wei)移(yi)量轉(zhuan)化為(wei)電(dian)(dian)信(xin)號。閉(bi)環控制系(xi)統(tong)中(zhong)，該信(xin)號經放(fang)大后反(fan)饋至電(dian)(dian)磁(ci)驅動(dong)線(xian)圈(quan)，產生與(yu)慣(guan)性(xing)(xing)力(li)方向(xiang)相反(fan)的電(dian)(dian)磁(ci)恢復力(li)，使(shi)(shi)質量塊(kuai)始終(zhong)保持在(zai)(zai)平衡位(wei)(wei)置。通過測(ce)量反(fan)饋電(dian)(dian)流的強度(du)(du)即可反(fan)推出加(jia)(jia)(jia)速度(du)(du)值（a=F/m）。**技術特性(xing)(xing)**：1.石(shi)(shi)英(ying)(ying)材料(liao)的低熱膨脹系(xi)數（0.5×10^-6/℃）保障了溫度(du)(du)穩定性(xing)(xing)；2.撓(nao)性(xing)(xing)梁(liang)采用(yong)化學蝕刻(ke)工藝加(jia)(jia)(jia)工，厚(hou)度(du)(du)可控制在(zai)(zai)0.05-0.1mm，實(shi)現(xian)高(gao)靈(ling)敏度(du)(du)；3.閉(bi)環反(fan)饋系(xi)統(tong)使(shi)(shi)量程可達±50g，分辨率(lv)優于(yu)10^-5g；4.交叉軸(zhou)干擾低于(yu)0.1%，重(zhong)復性(xing)(xing)誤(wu)差小于(yu)50μg。**應用(yong)領域**：主要用(yong)于(yu)慣(guan)性(xing)(xing)導航(hang)系(xi)統(tong)（如航(hang)天器(qi)(qi)、戰略）、精(jing)密監測(ce)、石(shi)(shi)油測(ce)井(jing)等場景。相較于(yu)MEMS加(jia)(jia)(jia)速度(du)(du)計，橋梁(liang) 加(jia)(jia)(jia)速度(du)(du)計價格，其(qi)長(chang)期穩定性(xing)(xing)提高(gao)2個數量級(ji)，但成本較高(gao)且體積較大（典型尺寸(cun)30×30×20mm）。現(xian)代(dai)改(gai)進型通過數字化閉(bi)環控制、溫度(du)(du)補償算法(fa)和微封(feng)裝技術，進一步提升了動(dong)態范圍（可達±100g）和抗沖擊能力(li)（>1000g）。

石英撓(nao)性(xing)(xing)加(jia)(jia)速(su)度計(ji)(ji)的(de)(de)分(fen)(fen)(fen)(fen)(fen)(fen)辨(bian)(bian)力(li)(li)在**250到(dao)500個字(zi)(zi)(zi)(zi)（counts）之間**，通常(chang)(chang)指(zhi)其輸(shu)出(chu)信(xin)號(hao)的(de)(de)小可(ke)(ke)檢(jian)(jian)測(ce)(ce)變化對應(ying)的(de)(de)加(jia)(jia)速(su)度值。以下是(shi)技術背景和關(guan)鍵要(yao)點：---###**1.什么是(shi)“分(fen)(fen)(fen)(fen)(fen)(fen)辨(bian)(bian)力(li)(li)”？**-**定(ding)義**：分(fen)(fen)(fen)(fen)(fen)(fen)辨(bian)(bian)力(li)(li)是(shi)傳感(gan)器能夠檢(jian)(jian)測(ce)(ce)到(dao)的(de)(de)小加(jia)(jia)速(su)度變化，通常(chang)(chang)以數(shu)(shu)(shu)(shu)字(zi)(zi)(zi)(zi)輸(shu)出(chu)的(de)(de)小有(you)效單位(wei)(wei)（LSB，LeastSignificantBit）表示。-**單位(wei)(wei)**：1個'字(zi)(zi)(zi)(zi)'（count）對應(ying)模數(shu)(shu)(shu)(shu)轉換（ADC）后的(de)(de)一個數(shu)(shu)(shu)(shu)字(zi)(zi)(zi)(zi)增量(liang)(liang)(liang)(liang)(liang)，具體物(wu)理(li)量(liang)(liang)(liang)(liang)(liang)（如(ru)(ru)μg或m/s2）需結合傳感(gan)器量(liang)(liang)(liang)(liang)(liang)程(cheng)和ADC位(wei)(wei)數(shu)(shu)(shu)(shu)計(ji)(ji)算。---###**2.石英撓(nao)性(xing)(xing)加(jia)(jia)速(su)度計(ji)(ji)的(de)(de)特性(xing)(xing)**-**原理(li)**：利用(yong)石英材(cai)料的(de)(de)撓(nao)性(xing)(xing)特性(xing)(xing)，通過檢(jian)(jian)測(ce)(ce)質(zhi)量(liang)(liang)(liang)(liang)(liang)塊的(de)(de)位(wei)(wei)移測(ce)(ce)量(liang)(liang)(liang)(liang)(liang)加(jia)(jia)速(su)度。-**優(you)勢(shi)**：高(gao)穩定(ding)性(xing)(xing)、低噪(zao)聲、抗(kang)沖擊，適用(yong)于高(gao)精(jing)度慣(guan)性(xing)(xing)導(dao)(dao)航、航空航天(tian)等領(ling)域。-**典型分(fen)(fen)(fen)(fen)(fen)(fen)辨(bian)(bian)力(li)(li)**：250-500字(zi)(zi)(zi)(zi)（對應(ying)微(wei)重力(li)(li)級變化，例(li)如(ru)(ru)0.1-1μg量(liang)(liang)(liang)(liang)(liang)級）。---###**3.分(fen)(fen)(fen)(fen)(fen)(fen)辨(bian)(bian)力(li)(li)與(yu)關(guan)鍵參數(shu)(shu)(shu)(shu)的(de)(de)關(guan)系**-**量(liang)(liang)(liang)(liang)(liang)程(cheng)**：量(liang)(liang)(liang)(liang)(liang)程(cheng)越小，分(fen)(fen)(fen)(fen)(fen)(fen)辨(bian)(bian)力(li)(li)越高(gao)（例(li)如(ru)(ru)±10g量(liang)(liang)(liang)(liang)(liang)程(cheng)的(de)(de)分(fen)(fen)(fen)(fen)(fen)(fen)辨(bian)(bian)力(li)(li)優(you)于±100g量(liang)(liang)(liang)(liang)(liang)程(cheng)）。-**ADC位(wei)(wei)數(shu)(shu)(shu)(shu)**：ADC分(fen)(fen)(fen)(fen)(fen)(fen)辨(bian)(bian)率（如(ru)(ru)16位(wei)(wei)、24位(wei)(wei)）直接影響(xiang)數(shu)(shu)(shu)(shu)字(zi)(zi)(zi)(zi)輸(shu)出(chu)的(de)(de)“字(zi)(zi)(zi)(zi)”對應(ying)物(wu)理(li)值。-**公(gong)式**：﹨(﹨text{分(fen)(fen)(fen)(fen)(fen)(fen)辨(bian)(bian)力(li)(li)（物(wu)理(li)值）}=﹨frac{﹨text{量(liang)(liang)(liang)(liang)(liang)程(cheng)}}{﹨text{ADC滿(man)量(liang)(liang)(liang)(liang)(liang)程(cheng)輸(shu)出(chu)字(zi)(zi)(zi)(zi)數(shu)(shu)(shu)(shu)}}﹨)例(li)：量(liang)(liang)(liang)(liang)(liang)程(cheng)±10g，24位(wei)(wei)ADC（滿(man)量(liang)(liang)(liang)(liang)(liang)程(cheng)字(zi)(zi)(zi)(zi)數(shu)(shu)(shu)(shu)=223≈8.4×10?），分(fen)(fen)(fen)(fen)(fen)(fen)辨(bian)(bian)力(li)(li)≈2.38μg/字(zi)(zi)(zi)(zi)。-**噪(zao)聲水平(ping)**：電子噪(zao)聲和機(ji)械噪(zao)聲會(hui)降低有(you)效分(fen)(fen)(fen)(fen)(fen)(fen)辨(bian)(bian)力(li)(li)。---###**4.典型應(ying)用(yong)場景**-**慣(guan)性(xing)(xing)導(dao)(dao)航**：高(gao)分(fen)(fen)(fen)(fen)(fen)(fen)辨(bian)(bian)力(li)(li)（250-500字(zi)(zi)(zi)(zi)）可(ke)(ke)提升姿態控制精(jing)度。-**振動監測(ce)(ce)**：檢(jian)(jian)測(ce)(ce)微(wei)小機(ji)械振動（需配合高(gao)頻(pin)采樣）。-**地質(zhi)勘探(tan)**：用(yong)于波(bo)或重力(li)(li)梯度測(ce)(ce)量(liang)(liang)(liang)(liang)(liang)。---###**5.注意事(shi)項**-**分(fen)(fen)(fen)(fen)(fen)(fen)辨(bian)(bian)力(li)(li)vs.精(jing)度**：高(gao)分(fen)(fen)(fen)(fen)(fen)(fen)辨(bian)(bian)力(li)(li)不意味著高(gao)精(jing)度（精(jing)度受非線性(xing)(xing)、溫漂等影響(xiang)）。-**信(xin)號(hao)調理(li)**：前置(zhi)放大器、濾波(bo)電路的(de)(de)設計(ji)(ji)直接影響(xiang)有(you)效分(fen)(fen)(fen)(fen)(fen)(fen)辨(bian)(bian)力(li)(li)。-**環境因(yin)素**：溫度變化、電磁干擾可(ke)(ke)能劣(lie)化實際分(fen)(fen)(fen)(fen)(fen)(fen)辨(bian)(bian)力(li)(li)。---###**6.提升分(fen)(fen)(fen)(fen)(fen)(fen)辨(bian)(bian)力(li)(li)的(de)(de)方(fang)法**-選(xuan)擇低噪(zao)聲電子元件（如(ru)(ru)高(gao)精(jing)度運放）。-優(you)化ADC采樣率和位(wei)(wei)數(shu)(shu)(shu)(shu)（如(ru)(ru)24位(wei)(wei)Σ-Δ型ADC）。-采用(yong)數(shu)(shu)(shu)(shu)字(zi)(zi)(zi)(zi)濾波(bo)算法（如(ru)(ru)卡爾曼濾波(bo)）抑制噪(zao)聲。---如(ru)(ru)需具體型號(hao)的(de)(de)分(fen)(fen)(fen)(fen)(fen)(fen)辨(bian)(bian)力(li)(li)換算或選(xuan)型建議，請(qing)提供量(liang)(liang)(liang)(liang)(liang)程(cheng)、ADC位(wei)(wei)數(shu)(shu)(shu)(shu)等參數(shu)(shu)(shu)(shu)，可(ke)(ke)進一步分(fen)(fen)(fen)(fen)(fen)(fen)析其物(wu)理(li)意義。

石(shi)(shi)英(ying)(ying)撓(nao)(nao)性(xing)加(jia)(jia)(jia)速(su)(su)(su)(su)(su)度(du)(du)(du)(du)計(ji)是一種基于(yu)石(shi)(shi)英(ying)(ying)材料(liao)特(te)(te)性(xing)和撓(nao)(nao)性(xing)支(zhi)(zhi)撐(cheng)結構(gou)設計(ji)的(de)(de)(de)(de)(de)(de)高(gao)(gao)(gao)精(jing)(jing)度(du)(du)(du)(du)慣性(xing)傳感器，主(zhu)要(yao)用(yong)(yong)(yong)于(yu)測(ce)(ce)量(liang)(liang)(liang)物體(ti)(ti)在(zai)運動過(guo)(guo)程中(zhong)的(de)(de)(de)(de)(de)(de)加(jia)(jia)(jia)速(su)(su)(su)(su)(su)度(du)(du)(du)(du)或(huo)靜態重(zhong)力(li)加(jia)(jia)(jia)速(su)(su)(su)(su)(su)度(du)(du)(du)(du)。其(qi)(qi)(qi)原(yuan)理(li)(li)是通(tong)過(guo)(guo)檢(jian)(jian)測(ce)(ce)慣性(xing)力(li)作用(yong)(yong)(yong)下敏感元件(jian)的(de)(de)(de)(de)(de)(de)形變(bian)(bian)(bian)或(huo)振動特(te)(te)性(xing)變(bian)(bian)(bian)化，石(shi)(shi)英(ying)(ying)振梁(liang)(liang)(liang)加(jia)(jia)(jia)速(su)(su)(su)(su)(su)度(du)(du)(du)(du)計(ji)價格，將(jiang)加(jia)(jia)(jia)速(su)(su)(su)(su)(su)度(du)(du)(du)(du)信號轉換為(wei)電(dian)(dian)(dian)信號輸出，具有高(gao)(gao)(gao)分辨率(lv)(lv)、低(di)噪聲和優異(yi)穩(wen)定(ding)性(xing)的(de)(de)(de)(de)(de)(de)特(te)(te)點(dian)。###工(gong)作原(yuan)理(li)(li)該加(jia)(jia)(jia)速(su)(su)(su)(su)(su)度(du)(du)(du)(du)計(ji)的(de)(de)(de)(de)(de)(de)元件(jian)由石(shi)(shi)英(ying)(ying)晶(jing)體(ti)(ti)材料(liao)制成，利用(yong)(yong)(yong)石(shi)(shi)英(ying)(ying)的(de)(de)(de)(de)(de)(de)壓電(dian)(dian)(dian)效(xiao)應(ying)和低(di)熱膨脹系數特(te)(te)性(xing)。其(qi)(qi)(qi)結構(gou)通(tong)常包(bao)含一個撓(nao)(nao)性(xing)支(zhi)(zhi)撐(cheng)的(de)(de)(de)(de)(de)(de)振動梁(liang)(liang)(liang)（石(shi)(shi)英(ying)(ying)振梁(liang)(liang)(liang)），梁(liang)(liang)(liang)兩端(duan)固定(ding)并連接檢(jian)(jian)測(ce)(ce)質量(liang)(liang)(liang)塊(kuai)。當外界加(jia)(jia)(jia)速(su)(su)(su)(su)(su)度(du)(du)(du)(du)作用(yong)(yong)(yong)于(yu)系統時(shi)(shi)(shi)，質量(liang)(liang)(liang)塊(kuai)因慣性(xing)力(li)產生位(wei)移(yi)，導(dao)致石(shi)(shi)英(ying)(ying)振梁(liang)(liang)(liang)發(fa)生彎曲形變(bian)(bian)(bian)。通(tong)過(guo)(guo)電(dian)(dian)(dian)容式(shi)或(huo)壓電(dian)(dian)(dian)式(shi)檢(jian)(jian)測(ce)(ce)機(ji)制，將(jiang)梁(liang)(liang)(liang)的(de)(de)(de)(de)(de)(de)形變(bian)(bian)(bian)量(liang)(liang)(liang)轉換為(wei)電(dian)(dian)(dian)信號，經電(dian)(dian)(dian)路處理(li)(li)后輸出與加(jia)(jia)(jia)速(su)(su)(su)(su)(su)度(du)(du)(du)(du)成正(zheng)(zheng)比(bi)的(de)(de)(de)(de)(de)(de)電(dian)(dian)(dian)壓信號。撓(nao)(nao)性(xing)支(zhi)(zhi)撐(cheng)結構(gou)通(tong)過(guo)(guo)低(di)剛(gang)度(du)(du)(du)(du)設計(ji)實(shi)現微小位(wei)移(yi)的(de)(de)(de)(de)(de)(de)靈(ling)敏檢(jian)(jian)測(ce)(ce)，同時(shi)(shi)(shi)保持高(gao)(gao)(gao)抗沖擊能力(li)。###典(dian)型(xing)結構(gou)1.**石(shi)(shi)英(ying)(ying)振梁(liang)(liang)(liang)**：采用(yong)(yong)(yong)光刻(ke)或(huo)離子(zi)刻(ke)蝕工(gong)藝(yi)加(jia)(jia)(jia)工(gong)的(de)(de)(de)(de)(de)(de)高(gao)(gao)(gao)純度(du)(du)(du)(du)石(shi)(shi)英(ying)(ying)晶(jing)體(ti)(ti)，構(gou)成諧振器主(zhu)體(ti)(ti)2.**撓(nao)(nao)性(xing)支(zhi)(zhi)撐(cheng)**：薄壁鉸鏈結構(gou)實(shi)現質量(liang)(liang)(liang)塊(kuai)與基座的(de)(de)(de)(de)(de)(de)柔(rou)性(xing)連接3.**慣性(xing)質量(liang)(liang)(liang)塊(kuai)**：高(gao)(gao)(gao)密度(du)(du)(du)(du)材料(liao)（如鎢合(he)金）制成的(de)(de)(de)(de)(de)(de)檢(jian)(jian)測(ce)(ce)質量(liang)(liang)(liang)體(ti)(ti)4.**檢(jian)(jian)測(ce)(ce)系統**：包(bao)含電(dian)(dian)(dian)極(ji)板、閉環伺服電(dian)(dian)(dian)路和溫度(du)(du)(du)(du)補償模塊(kuai)###技術特(te)(te)點(dian)-**精(jing)(jing)度(du)(du)(du)(du)高(gao)(gao)(gao)**：分辨率(lv)(lv)可(ke)達(da)微克（μg）量(liang)(liang)(liang)級，長期穩(wen)定(ding)性(xing)優于(yu)0.01%-**抗干擾強**：石(shi)(shi)英(ying)(ying)材料(liao)具有零蠕變(bian)(bian)(bian)特(te)(te)性(xing)，溫度(du)(du)(du)(du)誤差通(tong)過(guo)(guo)補償電(dian)(dian)(dian)路可(ke)控制在(zai)5ppm/℃以(yi)內-**動態范圍寬**：典(dian)型(xing)量(liang)(liang)(liang)程覆蓋(gai)±1g至(zhi)±100g，頻響特(te)(te)性(xing)達(da)500Hz以(yi)上-**可(ke)靠(kao)性(xing)優異(yi)**：無機(ji)械磨損部件(jian)，加(jia)(jia)(jia)速(su)(su)(su)(su)(su)度(du)(du)(du)(du)計(ji)價格，壽命超過(guo)(guo)10萬小時(shi)(shi)(shi)###應(ying)用(yong)(yong)(yong)領域(yu)主(zhu)要(yao)應(ying)用(yong)(yong)(yong)于(yu)航(hang)(hang)(hang)空航(hang)(hang)(hang)天慣性(xing)導(dao)航(hang)(hang)(hang)（制導(dao)、姿態控制）、精(jing)(jing)密監(jian)測(ce)(ce)、石(shi)(shi)油測(ce)(ce)斜儀器、高(gao)(gao)(gao)精(jing)(jing)度(du)(du)(du)(du)工(gong)業自動化設備(bei)（半(ban)導(dao)體(ti)(ti)光刻(ke)機(ji)）等領域(yu)。在(zai)戰(zhan)略系統中(zhong)，其(qi)(qi)(qi)累積(ji)誤差可(ke)控制在(zai)1mg以(yi)下，航(hang)(hang)(hang)天加(jia)(jia)(jia)速(su)(su)(su)(su)(su)度(du)(du)(du)(du)計(ji)價格，滿(man)足長航(hang)(hang)(hang)時(shi)(shi)(shi)導(dao)航(hang)(hang)(hang)需求(qiu)。該技術現正(zheng)(zheng)向數字化、多軸集成方(fang)向發(fa)展，新型(xing)設計(ji)采用(yong)(yong)(yong)MEMS工(gong)藝(yi)實(shi)現芯片級封裝(zhuang)，同時(shi)(shi)(shi)引入光纖檢(jian)(jian)測(ce)(ce)技術提(ti)升抗電(dian)(dian)(dian)磁干擾能力(li)。