石英撓(nao)性(xing)(xing)(xing)(xing)(xing)(xing)加(jia)(jia)(jia)速(su)(su)度(du)(du)(du)計(ji)是慣(guan)性(xing)(xing)(xing)(xing)(xing)(xing)導(dao)航(hang)(hang)系統的(de)(de)(de)(de)傳(chuan)感(gan)器(qi)之一，其基(ji)(ji)于(yu)石英材(cai)料的(de)(de)(de)(de)物理特(te)(te)(te)性(xing)(xing)(xing)(xing)(xing)(xing)與撓(nao)性(xing)(xing)(xing)(xing)(xing)(xing)支(zhi)承(cheng)結(jie)構(gou)設計(ji)，實現了高精度(du)(du)(du)、高穩(wen)(wen)定(ding)(ding)性(xing)(xing)(xing)(xing)(xing)(xing)的(de)(de)(de)(de)加(jia)(jia)(jia)速(su)(su)度(du)(du)(du)測(ce)(ce)量(liang)。該技(ji)術(shu)通(tong)(tong)過(guo)(guo)(guo)檢(jian)測(ce)(ce)慣(guan)性(xing)(xing)(xing)(xing)(xing)(xing)力引起的(de)(de)(de)(de)石英敏感(gan)元件形(xing)(xing)變(bian)(bian)或振動參數(shu)變(bian)(bian)化(hua)，將機(ji)械(xie)加(jia)(jia)(jia)速(su)(su)度(du)(du)(du)轉化(hua)為電(dian)信號(hao)輸出，在(zai)無(wu)人系統、航(hang)(hang)空(kong)航(hang)(hang)天、制導(dao)等(deng)領域具有的(de)(de)(de)(de)作用(yong)(yong)。###技(ji)術(shu)原理與結(jie)構(gou)特(te)(te)(te)征(zheng)石英撓(nao)性(xing)(xing)(xing)(xing)(xing)(xing)加(jia)(jia)(jia)速(su)(su)度(du)(du)(du)計(ji)采用(yong)(yong)光刻蝕工(gong)藝在(zai)石英晶體(ti)上加(jia)(jia)(jia)工(gong)出微米(mi)(mi)級撓(nao)性(xing)(xing)(xing)(xing)(xing)(xing)梁結(jie)構(gou)，通(tong)(tong)過(guo)(guo)(guo)精密焊接(jie)形(xing)(xing)成(cheng)(cheng)對(dui)稱的(de)(de)(de)(de)'雙E型'或'H型'彈性(xing)(xing)(xing)(xing)(xing)(xing)支(zhi)承(cheng)系統。敏感(gan)質量(liang)塊由撓(nao)性(xing)(xing)(xing)(xing)(xing)(xing)梁懸掛在(zai)基(ji)(ji)座上，當(dang)載體(ti)產生(sheng)加(jia)(jia)(jia)速(su)(su)度(du)(du)(du)時，質量(liang)塊在(zai)慣(guan)性(xing)(xing)(xing)(xing)(xing)(xing)力作用(yong)(yong)下(xia)產生(sheng)位移，通(tong)(tong)過(guo)(guo)(guo)電(dian)容檢(jian)測(ce)(ce)或壓(ya)電(dian)效應將機(ji)械(xie)位移轉換為電(dian)信號(hao)。石英材(cai)料固有的(de)(de)(de)(de)零蠕變(bian)(bian)特(te)(te)(te)性(xing)(xing)(xing)(xing)(xing)(xing)、熱膨脹系數(shu)小(xiao)(xiao)（0.55×10??/℃）和彈性(xing)(xing)(xing)(xing)(xing)(xing)模量(liang)穩(wen)(wen)定(ding)(ding)性(xing)(xing)(xing)(xing)(xing)(xing)（溫度(du)(du)(du)系數(shu)僅-25ppm/℃），確保(bao)了傳(chuan)感(gan)器(qi)在(zai)寬溫域（-55℃~85℃）內(nei)保(bao)持(chi)優(you)于(yu)10??g的(de)(de)(de)(de)測(ce)(ce)量(liang)精度(du)(du)(du)。###導(dao)航(hang)(hang)系統應用(yong)(yong)特(te)(te)(te)性(xing)(xing)(xing)(xing)(xing)(xing)在(zai)慣(guan)性(xing)(xing)(xing)(xing)(xing)(xing)導(dao)航(hang)(hang)系統中，石英加(jia)(jia)(jia)速(su)(su)度(du)(du)(du)計(ji)通(tong)(tong)常與光纖(xian)陀螺構(gou)成(cheng)(cheng)組合(he)導(dao)航(hang)(hang)單(dan)元。其典(dian)型量(liang)程(cheng)為±50g，閾值(zhi)靈敏度(du)(du)(du)可(ke)(ke)達1μg，二階非線(xian)性(xing)(xing)(xing)(xing)(xing)(xing)系數(shu)小(xiao)(xiao)于(yu)5μg/g2，通(tong)(tong)過(guo)(guo)(guo)溫度(du)(du)(du)補償(chang)算法可(ke)(ke)將零偏穩(wen)(wen)定(ding)(ding)性(xing)(xing)(xing)(xing)(xing)(xing)控制在(zai)10??g量(liang)級。級產品(pin)平均(jun)故障間(jian)隔時間(jian)（MTBF）超過(guo)(guo)(guo)50，000小(xiao)(xiao)時，振動環境（20~2000Hz）下(xia)性(xing)(xing)(xing)(xing)(xing)(xing)能(neng)波動小(xiao)(xiao)于(yu)3%。在(zai)末制導(dao)階段，配合(he)卡爾曼濾波算法可(ke)(ke)實現0.1m/s2的(de)(de)(de)(de)速(su)(su)度(du)(du)(du)測(ce)(ce)量(liang)精度(du)(du)(du)，滿足(zu)CEP（圓概率誤差）小(xiao)(xiao)于(yu)10米(mi)(mi)的(de)(de)(de)(de)戰(zhan)術(shu)要(yao)求。###技(ji)術(shu)演進與挑戰(zhan)當(dang)前第三代(dai)石英加(jia)(jia)(jia)速(su)(su)度(du)(du)(du)計(ji)采用(yong)(yong)數(shu)字閉(bi)環控制技(ji)術(shu)，通(tong)(tong)過(guo)(guo)(guo)力反(fan)饋線(xian)圈將測(ce)(ce)量(liang)帶(dai)寬擴展至(zhi)(zhi)500Hz以(yi)上，分辨率提升至(zhi)(zhi)0.1μg。但面臨MEMS技(ji)術(shu)的(de)(de)(de)(de)競爭(zheng)壓(ya)力，需在(zai)小(xiao)(xiao)型化(hua)（現有體(ti)積約(yue)50cm3）和成(cheng)(cheng)本(ben)控制（單(dan)價約(yue)2萬美元）方(fang)面持(chi)續改進。新型離子(zi)束刻蝕工(gong)藝可(ke)(ke)將敏感(gan)元件厚度(du)(du)(du)減(jian)至(zhi)(zhi)100μm以(yi)下(xia)，配合(he)ASIC集成(cheng)(cheng)封裝技(ji)術(shu)，有望將系統體(ti)積縮小(xiao)(xiao)40%，功耗降低(di)至(zhi)(zhi)1W以(yi)內(nei)。該技(ji)術(shu)憑(ping)借0.001°/h的(de)(de)(de)(de)角隨(sui)機(ji)游走(zou)系數(shu)和0.0003g/√Hz的(de)(de)(de)(de)噪聲(sheng)密度(du)(du)(du)，在(zai)無(wu)GNSS信號(hao)環境下(xia)仍能(neng)維持(chi)導(dao)航(hang)(hang)精度(du)(du)(du)，未來在(zai)深空(kong)探測(ce)(ce)、高超聲(sheng)速(su)(su)等(deng)領域具有重要(yao)應用(yong)(yong)前景。

石(shi)(shi)(shi)英(ying)撓性(xing)加(jia)(jia)(jia)速(su)度(du)(du)(du)(du)計(ji)是一種高(gao)精(jing)度(du)(du)(du)(du)慣(guan)性(xing)傳(chuan)感器，主(zhu)要用(yong)于(yu)測(ce)(ce)量物(wu)體(ti)在(zai)空間中(zhong)(zhong)的(de)(de)(de)線加(jia)(jia)(jia)速(su)度(du)(du)(du)(du)或(huo)角加(jia)(jia)(jia)速(su)度(du)(du)(du)(du)，并通(tong)過慣(guan)性(xing)導(dao)(dao)航(hang)、姿態控制、振(zhen)動(dong)監(jian)(jian)測(ce)(ce)等(deng)方(fang)式(shi)服(fu)務于(yu)多個高(gao)科技(ji)領(ling)域。其(qi)原理(li)基于(yu)石(shi)(shi)(shi)英(ying)材料的(de)(de)(de)壓電(dian)(dian)效應和(he)(he)(he)撓性(xing)支撐結(jie)構(gou)的(de)(de)(de)形(xing)(xing)變(bian)(bian)特性(xing)：當傳(chuan)感器受到加(jia)(jia)(jia)速(su)度(du)(du)(du)(du)作用(yong)時(shi)(shi)(shi)(shi)，石(shi)(shi)(shi)英(ying)振(zhen)梁(liang)(liang)或(huo)撓性(xing)擺片發生微(wei)(wei)(wei)形(xing)(xing)變(bian)(bian)，通(tong)過檢(jian)測(ce)(ce)壓電(dian)(dian)信(xin)號或(huo)電(dian)(dian)容變(bian)(bian)化(hua)(hua)轉(zhuan)化(hua)(hua)為電(dian)(dian)信(xin)號輸出，從而量化(hua)(hua)加(jia)(jia)(jia)速(su)度(du)(du)(du)(du)值。###主(zhu)要應用(yong)領(ling)域1.**航(hang)空航(hang)天與(yu)(yu)**在(zai)飛機、、等(deng)載(zai)體(ti)中(zhong)(zhong)，石(shi)(shi)(shi)英(ying)撓性(xing)加(jia)(jia)(jia)速(su)度(du)(du)(du)(du)計(ji)是慣(guan)性(xing)導(dao)(dao)航(hang)系(xi)統(tong)（INS）的(de)(de)(de)組件。它(ta)與(yu)(yu)陀螺儀配(pei)合，實時(shi)(shi)(shi)(shi)測(ce)(ce)量載(zai)體(ti)的(de)(de)(de)三維加(jia)(jia)(jia)速(su)度(du)(du)(du)(du)，通(tong)過積分運算獲取速(su)度(du)(du)(du)(du)、位置(zhi)和(he)(he)(he)姿態數據(ju)，確保(bao)在(zai)無(wu)GPS信(xin)號環境(jing)下(xia)的(de)(de)(de)導(dao)(dao)航(hang)。例如，彈道的(de)(de)(de)制導(dao)(dao)系(xi)統(tong)依(yi)賴其(qi)高(gao)精(jing)度(du)(du)(du)(du)（可(ke)(ke)達(da)微(wei)(wei)(wei)重力(li)級）實現復(fu)雜軌(gui)跡控制。2.**汽車工(gong)業(ye)與(yu)(yu)自(zi)(zi)動(dong)駕駛**車輛中(zhong)(zhong)，該傳(chuan)感器用(yong)于(yu)電(dian)(dian)子(zi)穩定程序（ESP）、防抱死系(xi)統(tong)（ABS）及自(zi)(zi)動(dong)駕駛模塊，監(jian)(jian)測(ce)(ce)車輛急(ji)加(jia)(jia)(jia)速(su)、制動(dong)或(huo)側傾時(shi)(shi)(shi)(shi)的(de)(de)(de)動(dong)態變(bian)(bian)化(hua)(hua)，及時(shi)(shi)(shi)(shi)調(diao)整扭矩分配(pei)或(huo)觸發安全機制。其(qi)抗(kang)振(zhen)動(dong)、耐高(gao)溫特性(xing)適(shi)(shi)配(pei)嚴苛的(de)(de)(de)車載(zai)環境(jing)。3.**工(gong)業(ye)設(she)備(bei)與(yu)(yu)能(neng)源(yuan)領(ling)域**在(zai)風力(li)發電(dian)(dian)機、高(gao)鐵、橋梁(liang)(liang)等(deng)大型設(she)備(bei)中(zhong)(zhong)，石(shi)(shi)(shi)英(ying)加(jia)(jia)(jia)速(su)度(du)(du)(du)(du)計(ji)用(yong)于(yu)長(chang)期振(zhen)動(dong)監(jian)(jian)測(ce)(ce)，通(tong)過分析頻譜(pu)特征(zheng)預測(ce)(ce)機械(xie)故障。石(shi)(shi)(shi)油勘探中(zhong)(zhong)，它(ta)與(yu)(yu)儀結(jie)合，通(tong)過檢(jian)測(ce)(ce)地(di)下(xia)結(jie)構(gou)反射(she)的(de)(de)(de)振(zhen)動(dong)波輔助定位油氣(qi)資源(yuan)。4.**科研(yan)與(yu)(yu)精(jing)密(mi)儀器**地(di)球(qiu)物(wu)理(li)研(yan)究（如監(jian)(jian)測(ce)(ce)）、航(hang)天器微(wei)(wei)(wei)重力(li)實驗、精(jing)密(mi)機床運動(dong)控制等(deng)領(ling)域均需依(yi)賴其(qi)亞微(wei)(wei)(wei)米(mi)級分辨能(neng)力(li)。例如，姿態調(diao)整時(shi)(shi)(shi)(shi)，加(jia)(jia)(jia)速(su)度(du)(du)(du)(du)計(ji)可(ke)(ke)感知微(wei)(wei)(wei)小推進力(li)引起(qi)的(de)(de)(de)速(su)度(du)(du)(du)(du)變(bian)(bian)化(hua)(hua)。###技(ji)術(shu)優(you)勢相比MEMS加(jia)(jia)(jia)速(su)度(du)(du)(du)(du)計(ji)，石(shi)(shi)(shi)英(ying)撓性(xing)結(jie)構(gou)具有更高(gao)的(de)(de)(de)長(chang)期穩定性(xing)（零(ling)點漂移低）和(he)(he)(he)溫度(du)(du)(du)(du)適(shi)(shi)應性(xing)（工(gong)作范(fan)圍可(ke)(ke)達(da)-55°C至125°C），同時(shi)(shi)(shi)(shi)兼(jian)顧靈敏度(du)(du)(du)(du)與(yu)(yu)抗(kang)沖擊(ji)能(neng)力(li)。其(qi)全固態設(she)計(ji)無(wu)活動(dong)部件磨損，壽(shou)命長(chang)達(da)數萬小時(shi)(shi)(shi)(shi)，適(shi)(shi)用(yong)于(yu)長(chang)期連續監(jian)(jian)測(ce)(ce)場景。###發展趨勢隨(sui)著導(dao)(dao)航(hang)技(ji)術(shu)的(de)(de)(de)興起(qi)，石(shi)(shi)(shi)英(ying)加(jia)(jia)(jia)速(su)度(du)(du)(du)(du)計(ji)正與(yu)(yu)光纖陀螺、原子(zi)干(gan)涉儀等(deng)融合，構(gou)成新一代(dai)組合導(dao)(dao)航(hang)系(xi)統(tong)。此(ci)外，微(wei)(wei)(wei)型化(hua)(hua)與(yu)(yu)智能(neng)化(hua)(hua)改進使其(qi)逐步滲透至機器人、等(deng)新興領(ling)域，持(chi)續推動(dong)高(gao)精(jing)度(du)(du)(du)(du)傳(chuan)感技(ji)術(shu)的(de)(de)(de)邊界。

石英(ying)撓(nao)性(xing)加(jia)速度(du)計的(de)(de)(de)(de)分(fen)(fen)(fen)(fen)辨(bian)(bian)(bian)(bian)力(li)在(zai)**250到500個(ge)字(zi)(zi)(zi)(zi)（counts）之間**，通(tong)常指其輸(shu)出(chu)信號(hao)的(de)(de)(de)(de)小可(ke)(ke)檢(jian)測變(bian)化(hua)(hua)對(dui)(dui)(dui)應(ying)(ying)的(de)(de)(de)(de)加(jia)速度(du)值。以(yi)下是(shi)(shi)技術背景和關(guan)鍵要點(dian)：---###**1.什么是(shi)(shi)“分(fen)(fen)(fen)(fen)辨(bian)(bian)(bian)(bian)力(li)”？**-**定義**：分(fen)(fen)(fen)(fen)辨(bian)(bian)(bian)(bian)力(li)是(shi)(shi)傳(chuan)感器能(neng)夠(gou)檢(jian)測到的(de)(de)(de)(de)小加(jia)速度(du)變(bian)化(hua)(hua)，通(tong)常以(yi)數(shu)(shu)(shu)字(zi)(zi)(zi)(zi)輸(shu)出(chu)的(de)(de)(de)(de)小有效(xiao)單(dan)位(wei)(wei)(wei)（LSB，LeastSignificantBit）表示。-**單(dan)位(wei)(wei)(wei)**：1個(ge)'字(zi)(zi)(zi)(zi)'（count）對(dui)(dui)(dui)應(ying)(ying)模數(shu)(shu)(shu)轉換（ADC）后的(de)(de)(de)(de)一個(ge)數(shu)(shu)(shu)字(zi)(zi)(zi)(zi)增(zeng)量(liang)(liang)(liang)(liang)，具(ju)體物理(li)(li)(li)量(liang)(liang)(liang)(liang)（如(ru)(ru)μg或(huo)m/s2）需結合傳(chuan)感器量(liang)(liang)(liang)(liang)程(cheng)(cheng)(cheng)和ADC位(wei)(wei)(wei)數(shu)(shu)(shu)計算(suan)。---###**2.石英(ying)撓(nao)性(xing)加(jia)速度(du)計的(de)(de)(de)(de)特性(xing)**-**原理(li)(li)(li)**：利用(yong)石英(ying)材(cai)料的(de)(de)(de)(de)撓(nao)性(xing)特性(xing)，通(tong)過檢(jian)測質量(liang)(liang)(liang)(liang)塊的(de)(de)(de)(de)位(wei)(wei)(wei)移測量(liang)(liang)(liang)(liang)加(jia)速度(du)。-**優(you)(you)勢**：高(gao)(gao)穩(wen)定性(xing)、低噪(zao)(zao)聲(sheng)、抗沖擊，適用(yong)于(yu)高(gao)(gao)精(jing)度(du)慣性(xing)導航(hang)(hang)、航(hang)(hang)空航(hang)(hang)天等領域(yu)。-**典(dian)(dian)型(xing)分(fen)(fen)(fen)(fen)辨(bian)(bian)(bian)(bian)力(li)**：250-500字(zi)(zi)(zi)(zi)（對(dui)(dui)(dui)應(ying)(ying)微(wei)(wei)重力(li)級變(bian)化(hua)(hua)，例如(ru)(ru)0.1-1μg量(liang)(liang)(liang)(liang)級）。---###**3.分(fen)(fen)(fen)(fen)辨(bian)(bian)(bian)(bian)力(li)與關(guan)鍵參(can)數(shu)(shu)(shu)的(de)(de)(de)(de)關(guan)系(xi)**-**量(liang)(liang)(liang)(liang)程(cheng)(cheng)(cheng)**：量(liang)(liang)(liang)(liang)程(cheng)(cheng)(cheng)越小，分(fen)(fen)(fen)(fen)辨(bian)(bian)(bian)(bian)力(li)越高(gao)(gao)（例如(ru)(ru)±10g量(liang)(liang)(liang)(liang)程(cheng)(cheng)(cheng)的(de)(de)(de)(de)分(fen)(fen)(fen)(fen)辨(bian)(bian)(bian)(bian)力(li)優(you)(you)于(yu)±100g量(liang)(liang)(liang)(liang)程(cheng)(cheng)(cheng)）。-**ADC位(wei)(wei)(wei)數(shu)(shu)(shu)**：ADC分(fen)(fen)(fen)(fen)辨(bian)(bian)(bian)(bian)率（如(ru)(ru)16位(wei)(wei)(wei)、24位(wei)(wei)(wei)）直(zhi)接影響(xiang)數(shu)(shu)(shu)字(zi)(zi)(zi)(zi)輸(shu)出(chu)的(de)(de)(de)(de)“字(zi)(zi)(zi)(zi)”對(dui)(dui)(dui)應(ying)(ying)物理(li)(li)(li)值。-**公式**：﹨(﹨text{分(fen)(fen)(fen)(fen)辨(bian)(bian)(bian)(bian)力(li)（物理(li)(li)(li)值）}=﹨frac{﹨text{量(liang)(liang)(liang)(liang)程(cheng)(cheng)(cheng)}}{﹨text{ADC滿量(liang)(liang)(liang)(liang)程(cheng)(cheng)(cheng)輸(shu)出(chu)字(zi)(zi)(zi)(zi)數(shu)(shu)(shu)}}﹨)例：量(liang)(liang)(liang)(liang)程(cheng)(cheng)(cheng)±10g，24位(wei)(wei)(wei)ADC（滿量(liang)(liang)(liang)(liang)程(cheng)(cheng)(cheng)字(zi)(zi)(zi)(zi)數(shu)(shu)(shu)=223≈8.4×10?），單(dan)軸石英(ying)擾性(xing)加(jia)速度(du)傳(chuan)感器廠家，分(fen)(fen)(fen)(fen)辨(bian)(bian)(bian)(bian)力(li)≈2.38μg/字(zi)(zi)(zi)(zi)。-**噪(zao)(zao)聲(sheng)水平(ping)**：電子(zi)噪(zao)(zao)聲(sheng)和機(ji)(ji)械噪(zao)(zao)聲(sheng)會降低有效(xiao)分(fen)(fen)(fen)(fen)辨(bian)(bian)(bian)(bian)力(li)。---###**4.典(dian)(dian)型(xing)應(ying)(ying)用(yong)場景**-**慣性(xing)導航(hang)(hang)**：高(gao)(gao)分(fen)(fen)(fen)(fen)辨(bian)(bian)(bian)(bian)力(li)（250-500字(zi)(zi)(zi)(zi)）可(ke)(ke)提升姿(zi)態控制(zhi)精(jing)度(du)。-**振動(dong)監測**：檢(jian)測微(wei)(wei)小機(ji)(ji)械振動(dong)（需配合高(gao)(gao)頻采(cai)樣）。-**地質勘探**：用(yong)于(yu)波(bo)或(huo)重力(li)梯度(du)測量(liang)(liang)(liang)(liang)。---###**5.注(zhu)意事項**-**分(fen)(fen)(fen)(fen)辨(bian)(bian)(bian)(bian)力(li)vs.精(jing)度(du)**：高(gao)(gao)分(fen)(fen)(fen)(fen)辨(bian)(bian)(bian)(bian)力(li)不意味著(zhu)高(gao)(gao)精(jing)度(du)（精(jing)度(du)受(shou)非線性(xing)、溫漂等影響(xiang)）。-**信號(hao)調(diao)理(li)(li)(li)**：前置放(fang)大(da)器、濾(lv)波(bo)電路的(de)(de)(de)(de)設(she)計直(zhi)接影響(xiang)有效(xiao)分(fen)(fen)(fen)(fen)辨(bian)(bian)(bian)(bian)力(li)。-**環境因素**：溫度(du)變(bian)化(hua)(hua)、電磁(ci)干擾可(ke)(ke)能(neng)劣(lie)化(hua)(hua)實際分(fen)(fen)(fen)(fen)辨(bian)(bian)(bian)(bian)力(li)。---###**6.提升分(fen)(fen)(fen)(fen)辨(bian)(bian)(bian)(bian)力(li)的(de)(de)(de)(de)方法(fa)**-選擇低噪(zao)(zao)聲(sheng)電子(zi)元件（如(ru)(ru)高(gao)(gao)精(jing)度(du)運(yun)放(fang)）。-優(you)(you)化(hua)(hua)ADC采(cai)樣率和位(wei)(wei)(wei)數(shu)(shu)(shu)（如(ru)(ru)24位(wei)(wei)(wei)Σ-Δ型(xing)ADC）。-采(cai)用(yong)數(shu)(shu)(shu)字(zi)(zi)(zi)(zi)濾(lv)波(bo)算(suan)法(fa)（如(ru)(ru)卡(ka)爾曼(man)濾(lv)波(bo)）抑制(zhi)噪(zao)(zao)聲(sheng)。---如(ru)(ru)需具(ju)體型(xing)號(hao)的(de)(de)(de)(de)分(fen)(fen)(fen)(fen)辨(bian)(bian)(bian)(bian)力(li)換算(suan)或(huo)選型(xing)建議(yi)，請提供量(liang)(liang)(liang)(liang)程(cheng)(cheng)(cheng)、ADC位(wei)(wei)(wei)數(shu)(shu)(shu)等參(can)數(shu)(shu)(shu)，可(ke)(ke)進一步分(fen)(fen)(fen)(fen)析其物理(li)(li)(li)意義。